M-E05-1-LQ1

Tubing extensions size Nut Insert bushing Model Size Insert pin/Name plate symbol LQ1E21-T-R8 2 2-06 LQ1-2N06 LQ1-2B06 8 x 6 LQ1E21-T-R9 2 2-06 LQ1-2N06 LQ1-2B06 10 x 8 LQ1E21-T-R10 2 2-06 LQ1-2N06 LQ1-2B06 12 x 10 LQ1E22-T-R8 2 2-04 LQ1-2N04 LQ1-2B04 6 x 4 LQ1E22-T-R9 2 2-04 LQ1-2N04 LQ1-2B04 8 x 6 LQ1E22-T-R10 2 2-04 LQ1-2N04 LQ1-2B04 10 x 8 LQ1E22-T-R11 2 2-04 LQ1-2N04 LQ1-2B04 12 x 10

HRX-OM-W032

When the ambient temperature is out of the range between the temperatures set for AS.04 and AS.06, AL.03 or AL.04 may be generated at the same time when the product is turned ON.

HRX-OM-R016

Status (2): The circulating fluid temperature becomes within the set range of "AS.04". "AS.04" alarm monitoring starts. Status (3): The circulating fluid temperature exceeds the threshold of "AS.06", but the alarm will not be generated as it has returned within the 600 sec range of the "AS.23: Range over detecting timer".

Basic type / Direct mount type Series CY3B/CY3R

-AS2301F-01-04-X214 10-AS1301F-M5-04-X214 Resin body with One-touch fitting Universal type (throttle valve) 10-AS2301F-01-06-X214 10-AS1301F-M5-06-X214 10-AS2301F-01-08-X214 10-AS2001F-04-X214 10-AS1001F-04-X214 In-line type (throttle valve) 10-AS2001F-06-X214 10-AS1001F-06-X214 10-ASD330F-01-06 10-ASD230F-M5-04 Dual type (speed controller) CY3B CY3R 10-ASD330F-01-08 10-ASD230F-M5-06 AS2201FPQ

Plug-in/Plug Lead: Single Unit

03 04 VVQ5000-P-1(Plug-in type) VVQ5000-P-5(Plug lead type) 179 (Plug-in type) 133 (Plug lead type) 32 16 By mounting individual SUP spacers on a manifold block, it is possible to provide individual supply ports for each valve. 1 P 40.3 1(P) 4(A) 2(B) 03: Rc 3/8 04: Rc 1/2 1(P') 5(R1) 3(R2) Circuit diagram Plug-in type Plug llead type Individual EXH spacer 03 04 03 04 VVQ5000-R-1(Plug-in

Modular Design with Uniform Body Style

157.1 AF40-D 1/4, 3/8, 1/2 70 147.1 25.5 35.5 38.4 40 35.5 50 52 30 8.5 12.5 88 2.3 39 186.9 AF40-06-D 3/4 75 149.1 27 35.5 38.4 40 35.5 50 52 34 8.5 12.5 88 2.3 43 188.9 AF50-D 3/4, 1 90 220.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 259.9 AF60-D 1 95 234.1 32 45 30 45 70 66 40.5 11 13 113 3.2 52.5 273.9 Semi-standard specifications PC/PA bowl Metal bowl Metal bowl with level gauge With

F

Japanese N ...North American No Of Needle Revolutions 10 Turns / 8 Turns (AS1001F) Applicable Tube Material Nylon, Soft Nylon, Polyurethane A P P L I C A B L E T U B E OD B O D Y S I Z E mm 23 32 04 4 06 6 08 8 10 10 12 12 Inch 01 1/8 03 5/32 05 3/16 07 1/4 09 5/16 11 3/8 13 1/2 100 ...M5 (04, 06) 200 ...1/8 (04, 06) 205 ...1/4 (06, 08) 300 ...3/8 (06, 08, 10, 12) 400 ...1/2 (10, 12) W I

Soft Start-up Valve

66 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 14 AVL3000-03-1 to 6D/Y(Z)--A 41 50 53.5 46 5.5 15 70 2.3 33.5 54 M4 x 0.7 Depth 6 3 Width across flats 19 AVL4000-04-1 to 6D/Y(Z)--A 50 60 64 54 8.5 18 90 3.2 39 74 M5 x 0.8 Depth 6.5 4 Width across flats 22 AVL5000-06,10-1 to 6D/Y(Z)--A 70 75 70 60 11 16 100 3.2 45 80 56 M6 x 1 Depth 8 6 Width across flats 32 -32- Lockout type (Manual

0.55

03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 VV3PA 3 3 42 04 02 Type 42/Individual exhaust Series 3 5 7 Thread type VPA300 VPA500 VPA700 Nil F N T Rc G NPT NPTF Port size Stations 02 Symbol Port size Applicable series 1/4 3/8 1/2 02 03 04 VPA300 VPA500 VPA700 2 stations 20 stations 20 Manifold Option Description Part no.

VEX1

Parts name VEX312-01 02 VEX33202 03 04 VEX34202 03 04 VEX35004 06 10 VEX322-01 02 VEX370-10 12 VEX390-14 20 Bracket (With bolt and washer) VEX1-18-1A VEX5-32A VEX7-32A VEX9-32A B Foot (With bolt and washer) VEX1-18-2A VEX3-32-2A F Pilot exhaust (P2) port silencer N AN120-M5 AN103-01 AN210-02 Internal pilot solenoid/External pilot solenoid Symbol Weight (kg) VEX33202 03 04 0.3 0.4 VEX34202

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Recommended flow rate Note) (l/min (ANR)) IN side, OUT side 2 3.2 4 4 6 6 8 1/8" 5/32" 5/32" 1/4" 1/4" 5/16" Internal capacity (cm3) 1.7 Mass (g) ZA Model ZFC050-02 ZFC050-23 ZFC050-04 ZFC100-04 ZFC100-06 ZFC200-06 ZFC200-08 ZFC051-01 ZFC051-03 ZFC101-03 ZFC101-07 ZFC201-07 ZFC201-09 2 7 10 10 20 30 50 7 10 10 20 30 50 4.9 ZX IN/OUT straight piping 4.3 1.7 ZR Metric size Easy installation

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

M5 Port size M5 x 0.8 R 1/8 R 1/4 R 3/8 R 1/2 10-32 UNF NPT 1/8 NPT 1/4 NPT 3/8 NPT 1/2 Type 01 02 03 04 U10/32 N01 N02 N03 N04 Elbow Universal 2 3 Universal type Applicable tubing O.D.

Table of Contents - Tubing

(Metric) How to Order TU 04 25 BU 20 Length per roll Tube O.D.

Table of Contents

MY3B25 Standard -X416 -X417 MY Stroke adjusting unit 0 to 16 32 to 48 16 to 32 L unit H unit MY3B40 Refer to the table below for applicable symbols.

CV/MVGQ

40 8 8 10 32 41 32 18 13 5 52 15.5 13 26 5 57.5 28 M8 x 1.25 15 24 M20 x 1.5 20 0 0.033 26 0 0.033 26 0 0.033 32 0 0.039 C J G5-S 10 9 10 40 45 40 22 13 5.5 60 19.5 17 32 6 63.5 33.5 M10 x 1.25 15 30 M26 x 1.5 12 9 10 40 45 40 22 13 5.5 60 19.5 17 32 6 68 37.5 M10 x 1.25 15 34.5 M26 x 1.5 CV 14 10 11 53 50 53 24 16 7 77 21 22 41 8 76 46.5 21.5 42.5 M32 x 2 M14 x 1.5 Dimensions by Stroke

CV/MVGQ

0 0.033 45 5.5 33.5 M26 x 1.5 13 30 70.5 15 6 M10 x 1.25 19.5 10 22 Up to 300 17 32 26 RS Q G 45 5.5 37.5 M26 x 1.5 13 34.5 76.5 15 6 M10 x 1.25 19.5 12 22 Up to 300 17 32 26 0 0.033 50 7 46.5 M32 x 2 16 42.5 84.5 21.5 8 M14 x 1.5 21 14 24 Up to 300 22 41 32 0 0.039 RS H A Z TZ TY TX TT TD S QY Q ZZ Bore size (mm) 20 25 32 40 RZQ 52 32 32 10 8 62 14 19.8 118 108 60 40 40 10 9 62 14 22 122

CA2

XC6 CA2 CA2W MK ML+ Adjustment CA2 Piston rod and rod end nut made of stainless steel Stroke MH + Stroke + Adjustment length CS1 ZZ + 2 strokes + Adjustment length (A: 25, B: 50) Specifications Action Cushion Double acting, Single/Double rod Air cushion C76 Bore size (mm) ZZ 180 197 205 253 267 MA 27 32 32 36 46 MK 12 15 15 20 20 MI 32 38 38 45 55 MH 45 49 49 66 69 ML 20 21 21 32 32 MM 14

Check Valve Series AK

Inch size Metric size Port size 4 04 03 5/32 M5 M5 x 0.8 Thread type 6 06 07 1/4 U10/32 10-32 UNF 8 08 09 5/16 Metric thread (M5) 01 1/8 Nil 10 10 11 3/8 Unified thread (10-32 UNF) 02 1/4 12 12 13 1/2 R 03 3/8 N NPT 04 1/2 Check valve free flow direction Applicable Tubing O.D./Port Size Combinations From male thread to One-touch fitting A Metric size Inch size Applicable tubing O.D.

13

type: White color L type: Black color (Mounting hole) B C D E F G H Model A 3 8 Rc3 8 Rc3 8 Rc3 8 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL-03-04-04 Rc 133 52.45 42 19 3.5 19 20.95 20.95 133 52.45 42 19 3.5 19 151.1 60.95 47.7 19 3.5 24 26.75 151.1 60.95 47.7 19 3.5 24 26.75 I J K L M N O Model 3 8 Rc3 8 Rc3 8 Rc1 2 Rc1 2 ZH18DS-03-03-03 ZH18DL-03-03-03 ZH20DS-03-04-04 ZH20DL

IDU/IDF

Note 5) Spare part for auto drain INA-20-41-04 is AD44x445.