Plug-in/Plug Lead: Single Unit

Connector entry direction D side U side Electrical entry External pilot supply port Indicator light IP65 compatible U0 U1 U2 U3 U side D0 D1 D2 D3 D side Without cable Cable length 1.5 m Cable length 3 m Cable length 5 m Kit F Kit F U0 U1 U2 D0 D1 D2 1 to 12 stations Cable length 0.6 m Cable length 1.5 m Cable length 3 m Kit L Kit L 1 to 12 stations Type of connection T1 S kit (Serial transmission

MHZ2/MHZJ2

1 N1 1 N1 1 N1 2 N2 2 N2 2 N2 2 N2 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 MHZ2-10 MHZ2-16 MHZ2-20 MHZ2-25 Specifications and dimensions other than the above are the same as the basic type (including narrow type).

1

Supply pressure normal Supply pressure drop Supply pressure increase Normal filled pressure Insufficient filled pressure Excessive filled pressure P1 n1 n2 Vacuum Set value n1 n2 P1 Set value P2 n1 n2 P1 P2 P2 Time Normal mode Operating normally Operating normally Operating normally ON Time Reverse mode ON OFF Time OFF Time AUTO-SHIFT terminal When the Auto Shift Function is used.

SMC Electronic Switch Series Variations

Set value Vacuum P1 P2 P1 P2 P2 Time Operating normally Operating normally Operating normally ON Normal filled pressure Insufficient filled pressure Excessive filled pressure OFF Time n1 n2 When autoshift function is used n1 n2 n1 n2 Set value 10[ms] or longer GND Disconnected Time Reverse mode ON OFF Time When autoshift function is used Autoshift terminal 10[ms] or longer GND Disconnected

Metal Seal/Rubber Seal Series VQ Body Ported

(1/8") N3 (5/32") N7 (1/4") N7 (1/4") VQD P. 2-4-18 P. 2-4-20 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) M5 (M5 thread) C6 (6) kit N1 (1/8") N3 (5/32") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in silencer Built-in silencer C C3 (3.2) C4 (4) C6 (6) M5 (M5 thread) kit C6 (6) N1 (1/8") N3 (5/32") N7 (1/4") N7 (1/4") P. 2-4-50 P. 2-4-54 Built-in

4 Port Solenoid Valve Common Specifications Series SJ2000/3000

Direction Horizontal, Upward, Downward (Using elbow fittings for upward or downward) C6, C8, N7, N9 (Inch size elbow fitting is not available.) 1(P), 3/5(E) port Port size C2, C4, N1, N3, M3 SJ2000 4(A), 2(B) port C2, C4, C6, N1, N3, N7, M5 SJ3000 Weight W (g) Note 2) W = 51n + m + 133 n: Number of SUP/EXH blocks m: Weight of DIN rail Note 1) When many valves are operated simultaneously,

Digital Flow Switch (Integrated display type)

(-L) 68 14 2.8 depth 8.4 PF2M701/702/705/710/725/750-F1(-L) 70 14 2.8 depth 8.4 PF2M711/721-02(-L) 70 17 2.8 depth 6.2 PF2M711/721-N2(-L) 70 17 2.8 depth 6.2 PF2M711/721-F2(-L) 78 21 2.8 depth 6.2 -101No.PF-OMW0007-E PF2M7#L-#1/2(-L) (mm) Model A C B P PF2M701/702/705/710/725/750L-01(-L) 84.4 11 14 2.8 depth 8.4 PF2M701/702/705/710/725/750L-N1(-L) 84.4 12 14 2.8 depth 8.4 PF2M701/702/705/

High Vacuum Angle Valve

Nil FKM 1349-80*1 N1 EPDM 2101-80*1 P1 Barrel Perfluoro 70W Q1 Kalrez 4079 R1 Chemraz SS592 R2 SS630 R3 SSE38 S1 VMQ 1232-70*1 T1 FKM for Plasma 3310-75*1 *1 Values at normal temperature, excluding gas permeation *2 Refer to Construction on page 5 for changed part. Number corresponds with the parts number on the construction drawing.

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: QW (DeviceNet), Input Block Stations: 43 (4 Stations/M8: 4 Inputs 3 Pins), Input Block COM: N (-COM), Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: None, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: None, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: QW (DeviceNet), Input Block Stations: 63 (6 Stations/M8: 4 Inputs 3 Pins), Input Block COM: N (-COM), Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: None, US Option: X160US (Preferred US Option for DeviceNet Type)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N7 (1/4" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: ZEN (EtherNet/IP), Input Block Stations: 42 (4 Stations/M12: 4 Inputs), Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: 0 (w/o SI Unit), Input Block Stations: None, Input Block COM: +COM, Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: N3 (5/32" One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

SI Unit: QW (DeviceNet), Input Block Stations: 22 (2 Stations/M12: 4 Inputs), Input Block COM: N (-COM), Stations: 6 Stations, SUP/EXH Block Mounting: B (Both Sides 2~20 Stations), Pilot: S (Internal Pilot, Built-in Silencer), A, B Port: C6 (ø6 One-touch Fitting), Mounting Method: D (DIN Rail Mounting)

Enclosure: W (IP67), SI Unit: Q (for DeviceNetâ„¢), End Plate Type: 2 (Power Supply with M12 Connector, Max. Supplied Current 2 A), SI Unit Common: N (Negative Common), I/O Unit Stations: None, Valve Stations: 6 Stations, P, E Port Location: B (Both Sides), SUP/EXH Block Assy: S (Internal Pilot, Built-in Silencer), A, B Port Size: C4 (ø4 One-touch Fitting), Mounting: D (DIN Rail Mounting,

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 6 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: ø6 One-touch Fitting, Mounting Method: DIN Rail Mounting

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Side Direction, Stations: 6 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: ø6 One-touch Fitting, Mounting Method: DIN Rail Mounting

Type of Connector: D-sub Connector 25 Pin, Connector Outlet Direction: Connector Top Direction, Stations: 6 Stations, SUP/EXH Block Mounting: Both Sides 2~16 Stations, Pilot: Internal Pilot, Built-in Silencer, A, B Port: 1/4" One-touch Fitting, Mounting Method: DIN Rail Mounting