300ms) c) Deceleration time constant (300ms) b) Acceleration time constant (200ms) a) Servo motor speed (1000r/min) a) Servo motor speed (1000r/min) Forward rotation 0r/min Servo motor speed d) Absolute move command (1000 10STM m) f) Absolute move command (2000 10STM m) e) Dwell command time (100ms) 91 - 8.
(mm) 50 30 63 30 80 40 1-4. (mm) (Kg) 50 1.70 / 63 2.78 80 4.96 4 - RS1H 1. mA 2. V(m/min) (Kg) 3.
Series: NCA1 (Standard), Mounting: F (MF1, Front Flange), Bore Size: 400 (4"), Stroke: 4000 (40"), Air Cushion / Rod Boot: Both Ends (Air Cushion), Thread: Nil (Small Male, Standard, Threaded), Adjustment Range: Not Applicable, Auto Switch: No Switch, Lead Wire or Prewired Connector: 0.5m (Or None in the Case of No Switch), Number: 2 pcs.
Series MHR3 11223 Finger Rotary Actuated Air Gripper Size: 10, 15 Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors Directional Control Valves Air Grippers Modular F. R.
KK3 (KK3S-01MS + KK3P-01MS) 3,000 2,000 1,000 0 0.2 0 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.1 Connected plug and socket Pressure (MPa) 3 S Couplers How to Order KK 4 S 02 M S Body size With sealant (male thread) 3 4 6 1/8 1/4 1/2 Connection type Type Male thread Female thread With nut fitting Straight with One-touch fitting Elbow with One-touch fitting Bulkhead with One-touch fitting Symbol M F
Number of positions JIS Symbol P A/B A/B EA/EB VZ C [dm 3/(sbar)] C [dm 3/(sbar)] b b Cv Cv AC DC AC DC AC DC VS4110-01 (6A) 3.2 3.2 0.42 0.37 0.86 0.80 1 8 2 (Single) 1,200 180 13 or less 45 or less 0.7 0.82 VF VS4110-02 (8A) 1 4 4.0 3.4 0.17 0.47 0.91 0.89 VS4110-03 (10A) 3 8 4.1 3.9 0.19 0.35 0.96 1.00 VFR VS4210-01 (6A) 1 8 3.2 3.2 0.42 0.37 0.86 0.80 2 (Double) 1,200 180 13 or less 40
01MS + KK3P-01MS) 3,000 2,000 1,000 0 0.2 0 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0.1 Connected plug and socket Pressure (MPa) 3 S Couplers Series KK How to Order KK 4 S 02 M S Body size With sealant (male thread) 3 4 6 1/8 1/4 1/2 Connection type Type Male thread Female thread With nut fitting Straight with One-touch fitting Elbow with One-touch fitting Bulkhead with One-touch fitting Symbol M F
F (E) L H G F E B M L 28.5 34.5 47.5 52.5 64 78 11 16 21 24 32 41 9.5 12 18 20 28 36 4.8 6 9 10 14 18 10 17 22.5 24.5 27 30 3.5 4 5 6 7 8 14 20 25 29 37 49 1/8" 1/4" 3/8" 1/2" 3/4" 1" LQ3T1A LQ3T2A LQ3T3A LQ3T4A LQ3T5A LQ3T6A M 1/4 (E) (E) G H L L Panel Union : LQ3P J Panel Thickness (Max. t) (mm) Inch Size H W2 W1 Model Tubing O.D.
L O L G H F K J E D I A B C 2-4.5 A B C D E F G H I J K L Model 4 ZFC100-04 6 ZFC100-06 53.2 9.1 30 14.1 10 18 11.6 19.5 23 20 29 5/32" ZFC101-03 1/4" ZFC101-07 6 ZFC200-06 8 ZFC200-08 67 15.5 34 17.5 14 22 15.6 23.1 27 24 35 1/4" ZFC201-07 5/16" ZFC201-09 Element Replacement Element replacement procedure 1) Stop operation and reduce the filter's internal pressure to atmosphere. 2) Turn cover
sharing of switch/valve power supply, and single line for suction signal (valve wiring is unnecessary) Timer can be easily adjusted without programming Models Standard supply pressure Nozzle diameter (mm) Diffuser construction Air consumption l/min (ANR) Max. suction flow rate l/min (ANR) Model S M H ZMA05H 0.5 12 18 ZMA07H 0.7 24 23 0.5MPa ZMA10H 1.0 46 36 2 stage diffuser ZMA13H 1.3 95 40
2 10% 5-2 () ( 60cm 1 ) 10% 3 IDF Series 5-1 5 1 IDX-OM-W026 5 () 60cm 1 2 INOUT INOUT () IDF Series 5-1 5 2 IDX-OM-W026 5 5-2 (IDF55E,IDF75E) 1-1 5-1 OFF OFF IDF22EIDF55E IDF75E () ON OFF ON IDF Series 5-2 5 3 IDX-OM-W026 6 6-1 IDF22E-20 IDF22E-30 IDF37E-20 IDF37E-30 IDF55E-30 IDF75E-30 50Hz 3.9 5.7 8.4 11.0 m 60Hz 4.3 6.1 9.8 12.4 3/min (ANR)1 MPa 0.7 35 40
The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 10 Torr150 psig (10Torr9.9kgf/cm 2 ), Effective area (Cv): 0.14, Piping: side or bottom, Ambient and fluid temperature: 40 - 140 F (no freezing), MECH VALVE NON-EXCH ACTUATORS, VALVE, VM (VFM/VZM) MECHANICAL VALVE, CA, VM BODY PT 1/8NPT (F), .22880 lb, ModelPort sizeMaterialSensor
The VM series offers a wide variety of actuator styles and flow capacity up to 1.0 Cv.Fluid: air, Operating pressure: 10 Torr150 psig (10Torr9.9kgf/cm 2 ), Effective area (Cv): 0.14, Piping: side or bottom, Ambient and fluid temperature: 40 - 140 F (no freezing), MECH VALVE, VALVE, VM (VFM/VZM) MECHANICAL VALVE, CA, VM BODY PT 1/8NPT (F), .20943 lb, ModelPort sizeMaterialSensor cableMassWith
Magnet: D (Built-in), Mounting: F (Front Flange), Size: 40 (Pressure Receiving Area Equivalent to that of ø40 Type), Thread: M Threads (ø25) Rc Threads (ø32, ø40, ø50), Stroke: 40mm, Rod End: Rod End Female Thread, Locking Direction: F (Forwarding Stroke Lock)
The MLGP* - B/F is a compact body, locking actuator integrated with internal guide shafts to isolate the load bearing from the movement of the actuator's rod and seals. The locking mechanism can be specified for either the extension side (F) or the retraction side (B) of the stroke.
LEFS*F is a high performance version of the standard slider, equipped with a direct mounted, inline motor. Typical load capacities have increased 9-50%. Cycle time is dramatically reduced by a combination of higher maximum speed and acceleration/deceleration.
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations.
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations.
The MLGP-B/F is a compact body, locking actuator integrated with internal guide shafts to isolate the load bearing from the movement of the actuator's rod and seals. The locking mechanism can be specified for either the extension side (F) or the retraction side (B) of the stroke.
HRZ-F recirculating chillers are especially suited for high technology sectors, by conforming to several SEMI equipment standards and regulating fluid temperature to ±0.1°C. This model includes inverter control of the pump rotations for energy efficiency. Refrigerant is R410A, compliant with current EU F-gas regulations.