Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

Options J: With drain guide T: With element service indicator Element service indicator Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 10 10 10 10 10 10 10 10 10 I 56 66 66 80 80 90 90 100 150 J 15 20 17 22 19 25 21 30 40 K 5 8 8 8 8 10 10 10 15 L 9 12 12 14 14 14 14 16 20 M 5.5 6 6 7 7 9 9 9 11 N 35 O 54 66 66 80 80 88 88 102 136 P 70 84 84 100 100 110

AMPSeries

Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.

ARX Series

ARX21 mm Nil F Thread type G Pressure gauge Rc(PT) NPT G(PF) Nil N F ARX20Nmm ARX21Nmm P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

AMP

Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.

Plug-in/Plug Lead: Single Unit

construction Air/Inert gas Fluid (3) 1.0 MPa Maximum operating pressure Plug-in unit Single 0.20 MPa 0.10 MPa Min. operating pressure Valve specifications Solenoid specifications Double 0.15 MPa 0.10 MPa 3 position 0.20 MPa 0.15 MPa 1.5 MPa Proof pressure (1) 5 to 50C Ambient and fluid temperatnre Not required Lubrication Push type/Locking type (Tool required) Option Manual override (2) 150/30

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

Compact Manometer Series PPA 1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Caution To replace the batteries, turn the power OFF and replace them within approximately 30 seconds. When not completed within 30 seconds, Err will be displayed. In that case, perform zero clear once again.

PS1000/PS1100

1% F .S. or less Repeatability 0.4 4% F .S.

VVXA21/22

33 34 G 24 25 H 30 40 J 36 46 K 6 9 M 45.5 50.5 N 69 76 VVXA31 VVXA32 17-3-108

Air Suction Filter Series ZFA 1

Pitch (Section F-F') Port size (The above diagram is for ZFA200) ZFA100 Port size Symbol Model A B 19 18 24 28 1 8 1 4 ZFA200 L1 1 Number of manifold stations Model Symbol 2 56 68 76 88 3 74 86 104 116 4 92 104 132 144 5 110 122 160 172 6 128 140 188 200 7 148 158 216 228 8 164 176 244 256 9 182 194 272 284 10 200 212 300 312 38 50 48 60 ZFA100 L2 L1 L2 ZFA200 13-10-3

Compact Manometer Series PPA 1

Caution To replace the batteries, turn the power OFF and replace them within approximately 30 seconds. When not completed within 30 seconds, Err will be displayed. In that case, perform zero clear once again.

VCHN

Description For VCHN(F)3 VCHN3-EL Sound absorbing material Connecting thread 3/4 1 11/4 11/2 For VCHN(F)4 VCHN4-EL Sound absorbing material Torque 28 to 30 36 to 38 40 to 42 48 to 50 2. Do not apply a lateral load on the main body during or after mounting. 3.

ø 50, ø 63 Series CKZ3N Power Clamp Cylinder Complies to NAAMS standard Model Selection CKZ3N North American Type Made to Order European Type CKZ3T

mounting Nil F No Cylinder port Nil TF TP Yes NPT G Proximity switch T P W Rc TURCK P&F Arm opening angle 15 30 45 60 75 90 105 120 135 None 15 30 Arm mounting position 45 R Right L Left D 60 Both sides 75 90 105 120 135 Refer to Other Clamp Cylinders on page 12 for 80.

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

50/60 Hz) Allowable voltage range 10% (No continuous voltage uctuation) Electrical system Applicable earth leakage breaker (Standard) Rated current A 30 20 Sensitivity of leak current mA 30 Rated operating current 50/60 Hz5 A 16/18 8.4/9.1 Rated power consumption 50/60 Hz5 kW (kVA) 4.3/5.4 (5.5/6.0) 4.4/5.6 (5.8/6.3) Noise level (Front 1 m/Height 1 m)5 dB (A) 73 75 Alarm code list stickers

Exhaust Cleaner for Clean Rooms AMP Series

Recommended proper torque Nm Connection threads 1/2 M5 1/8 1/4 3/8 3/4 1 28 to 30 1.5 to 2 7 to 9 12 to 14 22 to 24 28 to 30 36 to 38 Torque 2. Twisting moment or bending moment other than the dead weight of the equipment should not be applied. To avoid damage, external piping should be supported separately from the product. 3.

JXCx-OMU0024

Setting Software Functions . 11 4.1 Various windows . 11 (1) Main window . 11 (2) Status window . 20 (3) Teaching window . 23 (4) Parameter window . 26 (5) Step Data window . 27 (6) Alarm window . 28 (7) Test Drive window . 30 4.2.

EXxx-OMN0029CN

No.EX-OMN0029CN-D TMSI DeviceNet // EX600-SDN#A EX600-ED# 3 9 10 12 12 15 15 17 SI 18 18 19 19 20 LED 25 27 27 28 29 29 30 30 31 31 31 -1No.EX-OMN0029CN-D 33 34 43 43 54 EDS 54 TM 55 RSNetWorx for DeviceNet 59 60 63 TM 65 DeviceNet 77 -2No.EX-OMN0029CN-D *1) (ISO/IEC)(JIS) *2) *1) ISO 4414 Pneumatic fluid power -General rules relating to systems ISO 4413

Low Maintenance Filter Series FN1

Description Material 1 5 SCS13 Cover O-ring 2 6 SCS13 Bowl Seal NBR 7 O-ring 65 x 250mm 3 SUS304 Element FPM 8 Scraper 65 x 500mm FN111 FN112 9 O-ring CDLQB63-30D-F Compact cylinder with lock 4 CDLQB63-50D-F Replacement parts: Seal kit Note Model Order no. Material FN11N NBR KT-FN11N Items 5 through 9 from the above chart.

Rotary Actuator NCRA1 Series Single Rack and Pinion

W tu"b" -30mm: 90" or 180" onv Special order onfy stze-Nom (Torque) (mm) (inch) 30-13i16(16.5in-tbs) 50-2(80in-tbs) 63 _ 2 1/2 (150 in-tbs) 80 3 1/8 (270 in-lbs) tm-4(640in-tbs) Il*. @l lffi*",* With Auto Switch Capability t. qRAl?

Electric Actuator with Integrated Guide Series LTF

G LTF 6 100 R 2 X10 Motor specification Lead screw lead Series Series 6 Nil X10 Standard motor F H L 6 8 6mm Cable length Non-standard motor 10mm Series 8 2 3 4 5 2m 20mm Motor specification 3m Motor output Standard motor Nil G R Y 4m Brake Matsushita Electric Industrial Co., Ltd. 5m Nil K None E F 100W Mitsubishi Electric Corporation Switch specification Yasukawa Electric Corporation 200W