Type: Solenoid Valves, Application: Unit for Manifold Mounting, Mounting Orientation: Manifold Base, Voltage: DC12V, Specification: Standard, Actuation: [Single] Single, Status at Power Off: Self-Recovery (Spring Return), Valve Positions: 2-Position Normally Closed, Pipe Port Type: -, Port Size: -, Pressure Rating(MPa): 0 to 1.0, Driving Type: Linear Motion Poppet, Seal Type: Soft Seal, Plumbing

A_HEC-OM-K001

water 35oC 800 600 400 200 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-11 Cooling capacity (HED007) 2) Heating capacity 3200 2800 2400 Heating capacity W Facility water 35oC 2000 1600 Facility water 10oC 1200 Facility water 25oC 800 400 0 0 10 20 30 40 50 60 70 Recirculating fluid temp. oC Fig.9-12 Heating capacity (HED007) 9.5 Performance Chart 9-16 A_HEC-OM-K001-1.7 Chapter

MHx-OMM0057

/ mm mm mm c.p.m. mm(L1-L2) (L1) (L2) g MHL2-10D 60 20 56 76 280 MHL2-10D1 40 78 118 345 10 40 MHL2-10D2 60 96 156 425 MHL2-16D 60 30 68 98 585 MHL2-16D1 60 110 170 795 16 40 MHL2-16D2 80 130 210 935 MHL2-20D 60 40 82 122 1,025 MHL2-20D1 80 142 222 1,495 20 40 MHL2-20D2 100 162 262 1,690 MHL2-25D 60 50 100 150 1,690 MHL2-25D1 100 182 282 2,560 25 40 MHL2-25D2 120 200 320 2,775 MHL2-32D

Air Cylinder NCA1 Series

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

NCA1

: 4-48 32 : 1-12 65 : M5 x 0.8 93 : M30 x 3.5 05 : 5-40 33 : 1 1/8-7 66 : M6 x 0.75 94 : M36 x 4.0 06 : 5-44 34 : 1 1/8-12 67 : M6 x 1.0 95 : M16 x 1.25 07 : 6-32 35 : 1 1/4-7 68 : M8 x 1.0 96 : M36 x 1.5 08 : 6-40 36 : 1 1/4-12 69 : M8 x 1.25 97 : M36 x 2.0 09 : 8-32 37 : 1 3/8-6 70 : M10 x 1.25 10 : 8-36 38 : 1 3/8-12 71 : M10 x 1.5 11 : 10-24 39 : 1-14 72 : M12 x 1.5 12 : 10-32 40 : 1

HRX-OM-Y120

HRX-OM-Y120-D Operation Manual Communication function Thermo-chiller Air-Cooled refrigerated type Water-Cooled refrigerated type HRL100-A-20/40 HRL100-W-40 HRL200-A-20/40 HRL200-W-40 HRL300-A-20/40 HRL400-A-40 Keep this manual available whenever necessary 2023 SMC CORPORATION All Rights Reserved To Users, Thank you for purchasing SMCs Thermo chiller (hereinafter referred to as the product

JXCx-OMT0001CN

(1) . 40 (2) . 41 7.

AMF

B 1 8 02 03 B B Thread B Rc(PT) F G(PF) N NPT 3 4 1B B Note) Refer to p.4.7-7 regarding How to Order of case assembly. 1 1 2 20 2B B AMF800 to AMF1000 (Standing style) AMF801/901 (Piping support style) 20 80 AMF 0 20 80 AMF 1 Body size Body size 80 90 80 90 Port size Port size 100 With bracket 20 2BFlange 30 3BFlange 40 4BFlange 20 2BFlange 30 3BFlange 40 4BFlange Shape Piping support style

ZQ

Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15 10 5 0 0.1 0 0.2 0.3 0.4 0.5 0.6 Supply pressure (MPa) 13-9-3 4 Series ZQ Specifications Ejector Weight Switch and suction

Compact Vacuum Ejector Series ZQ

0.3 0.4 0.5 0.6 Suction flow (l/min(ANR)) Supply pressure (MPa) ZQ110 Exhaust characteristics ZQ110 Flow characteristics Maximum suction flow (l/min(ANR)) Air consumption (l/min(ANR)) Maximum vacuum pressure (kPa) Maximum vacuum pressure (kPa) Maximum vacuum pressure -80 -80 60 -60 -60 50 40 -40 -40 30 Air consumption 20 -20 -20 10 Maximum suction flow Suction flow (l/min(ANR)) 25 20 15

AMF

4B flange 20 2B flange 30 3B flange 40 4B flange Vessel shape Piping support type Self-standing type 60 6B flange Model Selection Max.

LFE-OMY0008

[%F.S.] 2.0 1.5 1.0 0.5 0.0 0 1 2 3 4 5 [s] [S] [MPa] [MPa] [MPa] [MPa] [ [ [ [ ] ] ] ] 2 69 No.LFE*-OMY0008 / / / / A B C 1 V 1.1 V 5 V 4 mA 4.4 mA 20 mA [L/min] LFE1 0.5 20 LFE2 2.5 100 LFE3 5 200 70 No.LFE*-OMY0008 2x )M12 () 1.6mm A B C D E F G H I J K L LFE13 3/8 90 73 40 23.5 56 83 89 24 6 1.6 96 87 LFE14 1/2 104 73 40 23.5 56 83 89 28 6 1.6 96 87 LFE26 3/4 105 78 50 29 67

VHS20/30/40/50

VR VH VHS Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

Series VQ4000 Base Mounted Plug-in/Plug Lead Single Unit For details about certified products conforming to international standards, visit us at www.smcworld.com.

Refer to pages 2-5-40 to 2-5-43 for control unit.

Digital Flow Switch

Accuracy [%F.S.] 50% 50% 50% 40% 40% 40% With 1 1/4" connected With 1 1/2" connected 30% 30% 30% With 3/4" connected Elbow piping (2") Elbow piping (1 1/2") 20% 20% 20% Elbow piping (1") 10% 10% 10% 3% 3% 3% 8 7 6 5 4 3 2 1 0 0% 0% 0% 8 7 6 5 4 3 2 1 0 8 7 6 5 4 3 2 1 0 Straight section [d] Straight section [d] Straight section [d] Straight When piping with diameter smaller than the straight

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Construction VHS20/30 VHS40/40-06/50 6 8 7 2 2 5 5 1 4 IN OUT OUT IN 1 9 3 EXH. EXH. Component Parts No.

Series KV2 Fittings

40 41 68 57 111 121 172 100/800 100/800 100/800 100/1000 100/800 100/600 100/400 100/400 100/400 100/400 100/200 100/200 100/200 100/200 100/200 100/200 50/100 50/100 50/100 ** Non-Standard Product, consult factory for lead time. * Dimension A reference after installation.

Series 10-, 21- AF-A Air Filter

53 70 70 90 90 8.4 13 12.5 12.5 13 13 5.4 6.5 8.5 8.5 11 11 22 23 26 25 35 35 27 35 52 52 66 66 30 41 50 50 70 70 20 26.7 35.5 35.5 45 47.5 25 35 40 40 30 30 30 38.4 38.4 20 26.7 35.5 35.5 45 47.5 9.8 14 18 20 24 24 91.4 121.9 153.9 155.9 226.9 240.9 40 53 70 75 90 95 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 1070 A

EXxx-OMY0006CN

Fig. 3-2 T 1 ms 40 ms UT1UT20V UT1 UT2UT1UT2LED UT1/UT2 10.2 GND OFF OFF LED AcknowledgementPROFIsafe 16.3 2 20 D 17 No.EX##-OMY0006CN SI UT1 UT2 OFF1 UT1 UT2 UT1 UT2 1(IN0-IN3)UT1 2(IN4-IN7)UT2 UT1/UT2 UT1 UT2 3.3.5 UT1/UT2 3.3.7. SI 7.2 SIL/SIL CL/Cat. /PL Table 3-1 SIL/SILCL/Cat.

VCB

Port size VCB2 VCW20-12-01A 34 40 25 30 12.8 12.8 5 4.5 6 13 1/8, 1/4 VCW30-12-02A 42 52 30 40 19 19 6 5.5 7 19 1/4, 3/8 VCB3 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-02A 42 52 30 40 23 23 6 5.5 7 19 1/4, 3/8 VCB4 VCW30-12-04A Note 1) 48 56 36 44 23 23 6 5.5 7 23 1/2 VCW40-12-06A 56 65 44 53 28.2 28.2 6 5.5 7 26 3/4 2 mounting screws (for mounting bracket) are included