MHK2

75 Double acting Single acting MHK2-16D 16 6 14.6 20.6 113 MHK2-20D 20 10 16 26 235 MHZ MHK2-25D 25 14 19 33 440 MHK2-12S 120 12 9 4 9 13 76 Normally open Normally closed L1 MHF MHK2-16S 16 23 6 14.6 20.6 114 L2 L1 MHK2-20S 20 34 10 16 26 237 MHL L2 Series MHK2 MHK2-25S 25 58 14 19 33 443 Series MHKL2 MHK2-12C 12 12 4 9 13 76 MHR MHK2-16C 16 25 6 14.6 20.6 115 MHK MHK2-20C 20 44 10 16 26

Smooth Cylinder Series CQ2Y ø32, ø40, ø50, ø63, ø80, ø100 Specifications and auto switch information not provided below are the same as those of the anti-lateral load type of Series CQ2  S .

D-A7, A8 K M E S J L B + Stroke A + Stroke Rod end male thread H1 Auto switch D-A9, F9 Rod end nut C1 X L1 Rod end male thread (mm) Bore size (mm) C1 X H1 L1 32 20.5 23.5 28.5 M14 x 1.5 40 20.5 23.5 28.5 M14 x 1.5 50 26 28.5 33.5 M18 x 1.5 (mm) Without auto switch With auto switch A B A B U Z Bore size (mm) Stroke range (mm) C D E F H I J K L M N O P Q S 5 to 50 40 33 9 depth 7 32 50 43 13

Series PF2D Digital Flow Switch For Deionized Water and Chemicals

For Deionized Water and Chemicals Digital Flow Switch Series PF2D How to Order Remote Type Sensor Unit C PF2D5 13 20 1 Option (Refer to page 55.) Flow rate range None e-con connector x 1 pc. Nil C 0.4 to 4 l/min 1.8 to 20 l/min 4 to 40 l/min 04 20 40 The cable and connector are shipped unassembled.

Air Cylinder CP Series Cylinder Positioner Assembly

Slrcke = 0.79 (20mm) with Bool Millmelersrn Pareh$eses 7 SERIES CP CYLINDER POSITIONING ASSEMBLY DIMENSIONS REPAIR KITS SINGLE CLEVIS aoaE d,E L1 dNo NX 2.36 t-05 2 . 9 1 1.06 1 . 1 0 M 1 8 x 1 . 50.61 4.79 \20) 02 +0.070) (,27) (60) (28) \74) 115.5) 047 + 0.003 I 1 o 2.36 0.79 r.05 2.91 1.06 M 1 8 x l . 5 0 6 i (r2 +0.070) (16 "') (28) (60) (15.5) 120) \211 (13+0.070) 1 1 0 ; f f (28 ;)

Compact Guide Cylinder with One-way Lock Series MLGP ø40, ø50, ø63

P (plug) Rc 1/8 unlocking port Unlocks when pressurized GC GA XAH7 depth XL 2-Rc P PB A + Stroke E B + Stroke FA FB C + Stroke PA + Stroke GB Q G J K IE S XAH7 depth XL (mm) MLGPM, MLGPL common dimensions Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB GC H HA IA IB IC ID IE 14 11 100 44 16 12 44 54 10 120 M6 34 52 14 4 14 40 25, 50, 75 100, 125, 150, 175 200, 250, 300, 350 12 13

Modular Type Lubricator Series AL

13 C 26 36 38 40 38 41 45 L 40 53 70 70 90 90 M 2.3 2.3 2.3 2.3 3.2 3.2 AL10 AL20 AL30 AL40 AL40-06 AL50 AL60 M5 x 0.8 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1 25 40 53 70 75 90 95 Optional specification Metal bowl B 82 121 142 176 176 250 268 Model Metal bowl with level gauge B 162 196 196 270 288 Metal bowl with drain cock & level gauge B 186 220 220 294 312 With drain cock B

Series H, DL, L, LL Self-align Fittings

M L1 L2 1 4 8 6 DEF06-02 48 20 11 16 16 50.5 46.5 17 15 13 11 19 17 14 12 14 12 6max. 4max. 3 8 DEF08-03 66 3 8 3 8 DEF10-03 10 12 53.5 89 DEF12-03 54.5 34 51 17 17 17 17 15 17 19 19 104 17 19 17 19 7max. 7max. 105 Series H, DL, L, LL Self-align Fittings Plug: DP Applicable tube O.D. Weight (g) Part No.

3 Way,3 Port Solenoid Valve NVZ Series

(Ms) Tgpe 40 Manifold,/ Bottom Ported(External Pilot) inch (mm) Grommet (c), (H) (ln case ol lo-3zNorn, (M5)) L type plug connector(L) 13.78 (s50) 13.,13 (s41) r3.19 (35) Symbol (internal pilot tpe) N.C. N.O. slJrb s-zrJh P R P R w (external pilot type) N.C. N.O. A A , $TJ-b SZI;TF P R P B Model '.6NPTF 0.26 (130) 0 4 8 .,6. ].

Process Pump <Fluororesin Type> Series PA3000

Foot PP Variations Model Body Diaphragm Option Discharge Assembly flow rate (l/min) material material environment PA3310 PAP3310 PA3313 PAP3313 Standard Foot Silencer Automotive operation 1 to 13* Clean room New PFA PTFE Standard Air pilot actuation 0.1 to 9 Foot Clean room * With 3/8" inlet/outlet tube: 1 to 12 1 A for main wetted parts, stance is achieved!

Electro-Pneumatic Valve NVEP/NVEF Series

UJ I 2-Forled \bBion DIMENSIONS A B c o E F G H J K M P R s T 1.57 (40) 2.52 (64) 2.20 (56) 1.77 (45) 4.80 (1221 1.97 {50} 0.98 (25) 1 . 1 0 (28) 0.51 (13) 4.45 (113) ?

Digital Flow Switch for Deionized Water and Chemicals Series PF2D

1 q t i Series PF2D For Deionized Water and Chemicals Digital Flow Switch Dimensions: Separate Type Sensor Unit PF2D504-11/520-13 Internal circuits and wiring examples 60 70 176 z to , are terminal numbers.

3 Port Solenoid Valve SYJ300/500/700 Series

Note) At rated voltage A X A X P R P R 13 Series SYJ500 3 Port Solenoid Valve Valve Specifications External Pilot Type SYJ500R Pilot valve pressure is supplied separately from the main valve pressure through the use of a separate supply port. This model is suitable for low pressure and vacuum applications.

Series VC, Series VCS, Direct Operated 2 Port Solenoid Valve for Steam

orientation Unrestricted Vibration/Impact resistance m/s Note 2) 30/150 or less Rated voltage 100VAC, 110VAC, 200VAC, 220VAC, 230VAC (50/60Hz) Allowable voltage fluctuation 10% of rated voltage Coil insulation type Class H Power consumption W 50/60Hz VCS2: 4.9/4.1, VCS3: 7.7/6.6, VCS4: 10.5/9.3 Inrush VCS2: 22/19, VCS3: 36/30, VCS4: 45/37 Apparent power VA 50/60Hz Holding VCS2: 10/8, VCS3: 15/13

Digital Pressure Switch

Refer to Trouble No.13 Buttons do not work. The body of the Refer to Trouble No.14 pressure switch has become loose. There is noise. Refer to Trouble No.15 Refer to Trouble No.16 -56No.PS-OMS0007-H Troubleshooting list Problem No.

LZ-OM004xx

F G H [Tightening torque] No.LZ-OM00401 B (1/3) Electric Cylinder LZC series L[]ZC[]3[] 1.5 8 M4 x 0.7 x 6 deep [0.75Nm ] L[]ZC[]5[] 3 13 M5 x 0.8 x 8 deep [1.5Nm ] L[]ZC[]3[] M4 screw 0.75Nm M4 screw 0.75Nm L[]ZC[]3[] 4.5 8 2 7.5 11.5 12 L[]ZC[]5[] 6.5 13 3.2 10.7 16.7 15 L[]ZC[]5[] M5 screw 1.5Nm M6 screw 2.6Nm Model no.

AHC System Series MA

Closed: 6.6 Open: 12.6 745 Series MA2 Tool Stand MA210-S140 2 x 4.5 mounting hole Height can be adjusted With auto switch 13 4 x 4.5 mounting hole Mass: 520 g 746 AHC System Series MA2 Construction: Component Parts Single acting type When disconnected When connected Air supply (0.4 to 0.7 MPa) Exhaust AHC unit Tool adapter MHZ MHF MHL Component Parts Component Parts Description Description

03-ckqg_ckqp-e

Pressure Control Equipment Industrial Filters For 13 hole (Round/Without Shim) For 20 hole (Diamond/Without Shim) CKQG-R128 CKQG-D198 CKQG-D199 CKQG-R129 CKQG-R130 CKQG-D200 CKQG-D195S CKQG-R125S CKQG-D197S CKQG-R127S For 13 hole (Round/With Shim) For 20 hole (Diamond/With Shim) CKQG-R128S CKQG-D198S CKQG-D199S CKQG-R129S CKQG-D200S CKQG-R130S CKQG-R145 CKQG-R245 CKQG-R147 CKQG-R247 For 15

Precision Regulator

Description Material Qty. 11 Diaphragm assembly NBR, other P362010-1 1 1 1 1 1 P362020-13 P362020-2 P362020-13 P362020-2 12 Diaphragm assembly NBR, other P362010-2 1 1 1 1 1 P362020-5 P362020-5 P362030-34 P362030-34 13 Diaphragm NBR, other 1 1 P36202019 P36202019 14 Valve Stainless steel, NBR P36201058 1 15 Valve Stainless steel, H-NBR 1 1 P36202068#1 P36202068#1 16 Valve Brass

3-Screen Display High-Precision Digital Pressure Switch Air 1.0 MPa/1.6 MPa ISE70 ISE71

Process Data Diagnosis items Bit offset Item Note Internal product malfunction Outside of zero-clear range Outside of rated pressure range Upper temperature limit exceeded inside the product 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 2 Diagnosis 0: Normal 1: Abnormal 3 to 15 Measured pressure value Unsigned 13 bit Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Measured

Compact Cylinder

) (m1 + m2) V 2 Without Magnet for Auto Switch Kinetic energy E [J] = 2 100.0 m1: Mass of cylinder moving parts kg m2: Load mass kg V: Piston speed m/s 100 Allowable lateral load at rod end [N] 80 Mass of Cylinder Moving Parts: Without Magnet for Auto Switch [g] 63 50 10.0 Bore size [mm] Cylinder stroke [mm] 40 32 5 10 15 20 25 30 35 40 45 50 12 5 6 7 8 9 10 25 16 5 6 7 9 10 11 20 9 11 13