CU

4 q w r !3 !0 !2 i o !5 e y !1 Replacement parts: Seal kits Parts list Seal kit no. No. Description Cylinder tube Bore size Material No. of pcs.

Compact Rotary Actuator Rack-and-Pinion Type/Sizes: 10, 15, 20, 30, 40 Series CRQ2

x 10 -3 kgm 0.04 8 I = 0.5 x = 0.1 x 10 -3 kgm I = (1.04 + 1.25) x 10 -3 = 2.29 x 10 -3 kgm Gripper: I 17 Rotary Actuator Technical Data 3 Air Consumption Air consumption is the volume of air which is expended by the rotary actuator's reciprocal operation inside the actuator and in the piping between the actuator and the switching valve, etc.

CLQ

Solid state 3 wire, NPN Solid state 3 wire, PNP 2 wire 2 wire (Reed switch) (Solid state) Brown [Red] Brown [Red] Brown [Red] Load Load Brown [Red] Indicator light, protection circuit, etc.

3 Port Solenoid Valve Metal Seal Series VZ200 1

DXT170-176-2-01 DXT170-176-2-02 100V 200V 100 VAC 200 VAC DXT170-176-2-03 110V 110 VAC DXT170-176-2-04 220V 220 VAC DXT170-176-2-07 DXT170-176-3-51 DXT170-176-3-06 DXT170-176-3-05 DXT170-176-3-53 240V 6VD 12VD 24VD 48VD 240 VAC 6 VDC 12 VDC 24 VDC 48 VDC Circuit with Indicator Light AC circuit DC circuit NL: Neon bulb R: Resister D: Protective diode LED: Light emitting diode R: Resistor 4

EX500

Core wire colors 1 2 3 4 White Orange White 1 2 3 4 5 6 7 8 Pair 3 4 7 1 8 3 2 8 2 3 1 7 Plug connector pin arrangement White Brown Green Yellow Gray Pink Blue Shield 1 2 3 4 5 6 7 8 1 2 3 4 5 6 7 8 Pair Plug connector pin arrangement Green 4 5 6 6 5 4 Shield Socket connector pin arrangement Plug connector pin arrangement Connections (Straight cable) Connections 1690 Decentralized Serial

Ejector Valve Unit Series ZYY/ZYX 1

3 i w u o y q Section B-B' (Solenoid valve) Component Parts Replacement Parts Note Description Material Description Part no. No. No. SY114Urban white Resin Manifold block 3 port solenoid valve q o ZSE1-00--X130 Urban white Zinc die-casted Body Vacuum switch w !0 Urban white Resin Silencer cover P44027A End plate assembly e !1 Aluminum Nozzle AN203-KM8 Silencer r !

KR

Note) D1: Max. diameter 15-3-3 4 Series KR Union Tee: KRT Effective area (mm 2) FR soft nylon FR double layer Applicable tubing O.D.

Flow Sensor Series PFMV

(mm) Type Port size Model 4 M5 x 0.8 M-5AN-4 Barb fitting for nylon tube 6 M-5AN-6 Internal Construction Component Parts q w e r t y e w q Material No.

Speed Controller with Uni One-touch Fitting Series AS Elbow Type/Universal Type 1

2 q o !7 r !3 o r !0 w u t y !2 !3 !1 q i !4 e Meter-in type Meter-in type AS ASP ASN AQ ASV AK ASS ASR ASF Component Parts: Elbow Type Component Parts: Universal Type No. Description Material Note Body A Handle Body B Needle Gasket Seat ring Lock nut U seal Cassette Seal O-ring O-ring O-ring No.

MTS

7 q e @0 !0 o @2 @3 !5 u t !8 @1 r @4 w MX MTS MY 12 to 40 CY @7 !1 !7 q !6 !0 @2 @3 o @4 @6 y e r !

asilltr

s4n;i-i ;-. l q i +@i q. i +qei ")ftt--*9::l:1.i-: R"dffi.:i D-Az and D.A8 $vitches harc no buiftin conlacl prctection drcult. Us trls box tor inductiv bads, 5 rnlers or rlpre ol lead wiras, or 1 00, 200VAC aoolicatons, 0npul @'d) AND (Serial), OR (Parallel) connection example AND connction for 3-wir syslsm NPN outM "D"r e\r oh i!

Speed Controller with Residual Pressure Release Valve with One-touch Fitting Series AS



FE Elbow Type/Universal Type

How to Order Symbol 2 1 01 06 2 AS 1 F E S K JIS Symbol Hexagonal lock nut Body size 2 3 4 1/8, 1/4 standard 3/8 standard 1/2 standard With seal Applicable tubing O.D.

Compact Guide Cylinder

(Refer to page 3.)

Air Cylinder NCQ7 Series Compact Cylinder

s4n;i-i ;-. l q i +@i q. i +qei ")ftt--*9::l:1.i-: R"dffi.:i D-Az and D.A8 $vitches harc no buiftin conlacl prctection drcult. Us trls box tor inductiv bads, 5 rnlers or rlpre ol lead wiras, or 1 00, 200VAC aoolicatons, 0npul @'d) AND (Serial), OR (Parallel) connection example AND connction for 3-wir syslsm NPN outM "D"r e\r oh i!

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the

,,: ,.

UB 1t2 s/8n I 1 . 1 5 1.27 .281 112 't t4 3/4-'16 1.20 1 7 .312 1t2 318 3/416 '1.20 1.09 .408 112 3,/416 1.25 1.38 .408 5'l8 3/A 7/8-14 1.41 1.25 .408 518 718-14 t q o 1.36 .502 22 Tube To Male Pipe: ,15' ELBOW 1/4 1t8 7t16N .78 ,co .188 'lt4 1t4 7116-20 .75 .84 .188 5/16 118 112-20 . / c .65 .220 5/16 1t4 'U2-20 .75 .81 .220 g8 1t4 5/8.18 .89 .86 .283 U8 3i8 5/8-18 .91 .93 .283 3ri8 112

Manifold Specifications

For details, refer to pages 3-7-19 and 3-7-20.

Clean Gas Filter

Construction q t e r w IN Description No.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

(mm) Connection thread M3 x 0.5 M5 x 0.8 Weight (g) Connection thread H A B C D E F M Applicable tubing Model M q w e M-3AU-2 M-5AU-2 4.5 7 9 10 3 4 5 7.7 0.9 0.7 1.5 4 2 / 1 .2 4 2.5 Component Parts No. 1 2 3 Description Sleeve Barb fitting Gasket Material C3604 C3604 Note Electroless nickel plated Electroless nickel plated E D F NBR, Stainless steel 304 B C Width across flats H A Barb

AMR3000 to 6000

Applicable model 02 03 04 06 10 1/4 3/8 1/2 3/4 1 8 3 Pressure gauge 3 4 5 6 1 AMR300-02/03 AMR400-02 to 04 AMR500-04 to 06 AMR600-10 3 4 5 6 1 2 Nil E2 E3 E4 E6 E10 None None With pressure switch S Nil 4 3 1/4 3/8 1/2 3/4 1 Port size Adapter assembly Thread type Symbol Port size Nil N F Rc NPT G Thread type 02 03 04 06 10 1/4 3/8 1/2 3/4 1 The port size of adapter assembly is same as the