25

X16 Liquid contact seals SF7000 (Perfluoropolyether rubber) 1 3 01 X16 PB101 A Actuation Symbol 3 Actuation Air operated X16 Made to Order Liquid contact seals SF7000 Thread type Option Symbol Type Rc NPT G Symbol Nil B Option None With foot Nil N F q With bracket which can be mounted to the back of the previous type e C With bracket which can be mounted to the foot at the back of the previous

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Escapements Series MIW/MIS

7 q y r !3 !2 t o w e !0 !5 !6 25, 32 Option @4 @1 @3 @0 !9 @2 Scraper Stroke adjuster u w !1 !8 (32 only) Description Material Note Component parts Description Material Note No. No.

Transfer

0 @2 @1 #2 ^2 ^5 $5 %2 @5 ^8 $4 ^1 @4 %4 %5 ^7 $3 #0 $2 %6 @7 ^4 o %7 ^9 ^6 @9 %8 ML2BS $1 %3 ^3 !

AMP

10 8 8 10 10 12 15 40 50 55 66 80 88 84 100 110 28 34 50 5 5 9 26 32 37 37 37 37 13 16 19 20 22 25 108 155 221 1/4, 3/8 3/8, 1/2 1/2, 3/4 3 Series AMP Model Selection Selection Caution Caution 1.

VXZ

Refer to pages 17-6-3 to 17-6-10 for Safety Instructions and Solenoid Valve Precautions. 17-3-62 3 Series VXZ22/23 Pilot Operated 2 Port Solenoid Valve For Zero Pressure Differential Operation The VX series will be revised shortly. N.C.

MHK2

6 i u q r !1 !0 Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

#4 #5 #6 #7 #8 #9 $0 $1 $2 $3 $4 $5 q w e r t y u i o !

MHK2

6 i u q r !1 !0 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Closed condition Normally closed !2 !3 !4 Component Parts Material Material Note Note No. q w e No. i o !0 !1 !2 !3 !4 !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

#4 #5 #6 #7 #8 #9 $0 $1 $2 $3 $4 $5 q w e r t y u i o !

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40

#4 #5 #6 #7 #8 #9 $0 $1 $2 $3 $4 $5 q w e r t y u i o !

4 Port Direct Operated Poppet Solenoid Valve Series VQ D1000

Note 2) 1 (P) 3 (R) Note 3) 1.13-4 Series VQD1000 Construction JIS Symbol (A) 4 (B) 2 Part name Component Parts Note Material No. q w e r t y u i o !0 Solenoid coil assembly Sub-plate Body Spool valve Poppet Guide ring Return spring Manual override Gasket Round head screw VQD1000-S-M5(Base mounted only) Aluminum ZDC 1 (P) 3 (R) q u e !

CUJ

Bore size (mm) Hard anodized Aluminum alloy CUJB4-PS 4 q Cylinder tube Electroless nickel plated Copper alloy Set of nos. above !1, !2, !3 and an exclusive grease pack.

ML1C

3 !1 %5 @6 @5 $5 #6 MLGC %2 CNG @8 !9 MNB e CNA2 $2 q %3 %4 $1 CNS #1 #0 @9 #4 $0 !5 !4 $7 $6 y %0 %1 CLS CLQ #3 #2 !8 @0 @2 @1 @7 RLQ @3 r MLU o #5 !6 $3 $4 MLGP Component Parts Component Parts Material No.

1 Blow Gun Series VMG K
M
H
D
MS Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com T
VMG Pressure loss is less than 1%. (nozz

3 !8 !2 u r e q w No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Ionizer Nozzle type IZN10 Series IZS

Static Neutralization Characteristics (Discharge Time from 1000 V to 100 V) q Energy saving static neutralization nozzle with right angles: IZN10-01-X367 wHigh flow rate nozzle with right angles: IZN10-02-X367 5 5 0.1 MPa 0.05 MPa 0.3 MPa 0.1 MPa 0.05 MPa Discharge time (Static neutralization time) [s] Discharge time (Static neutralization time) [s] 4 4 3 3 0.3 MPa 0.7 MPa 2 2 0.5 MPa 0.5

Series 10-, 21- ARP20 to 10-, 21- ARP40 Direct Operated Precision

Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Mass shown is for product without any options.

Series ARP20 to ARP40 10- 10- 21- 21- Direct Operated Precision Regulator Series ARP20K to ARP40K 10- 10- Direct Operated Precision 21- 21- Regulator with Backflow Function

Note 2) For the type set to 0.2 MPa only, repeatability will be within 3 kPa. Note 3) Mass shown is for product without any options.

Wedge Cam Operation Provides

6 q r !0 !1 !2 Fingers closed Normally closed !4 !3 Component Parts Component Parts Note Material Material Note No. q w e t y u No. i o !0 !1 !2 !3 !4 !

KC

(mm) 4 6 8 10 12 Note) Weight (g) D L Q M Model KCT04-00 KCT06-00 KCT08-00 KCT10-00 KCT12-00 Note) D: Max. diameter 10.4 12.8 15.2 18.5 20.9 28.6 32.7 39.2 45.5 49.2 5.3 6.1 7.1 7.9 8.6 18 19 21.5 24 25.5 8 15 23 39 52 3-applicable tubing Union Y: KCU Applicable tubing O.D.