XM, XY

Valve side exhaust 482 Stainless steel High Vacuum Angle/In-line Valve XMA, XYA Series Dimensions XMA/Angle type C D L2 (KF flange) Fn Fd Fc C (Fc) L1 (K flange) (CF flange) H B G A A (mm) Model A 103 113 158 170 196 235 B 38 48 66 79 100 117 C 1 1 2 2 3 3 D 30 40 55 75 87 114 Fn Fd 34 Fc 17 26 41 52 70 83 G 40 39 63 68 69 96 H P.C.D L1 6 x 4.4 L2 XMA-16 XMA-25 XMA-40 XMA-50 XMA-63 XMA-

MY1

F1 -X L2 L1 50 50 50 L3 2040 40 40 30 30 30 Data 20 20 20 1.

KB

L4 Weight (g) L2 L3 D1 D2 L1 D3 A Part No.

Plug-in/Plug Lead: Single Unit

= 41n + 96 n: Stations (Maximum 12 stations) Formula: L1 = 41n + 76, L2 = 41n + 96 n: Stations (Maximum 12 stations) L n Dimensions 2 158 178 9 445 465 2 158 178 9 445 465 3 199 219 10 486 506 3 199 219 10 486 506 4 240 260 11 527 547 4 240 260 11 527 547 5 281 301 12 568 588 5 281 301 12 568 588 6 322 342 6 322 342 7 363 383 7 363 383 8 404 424 L1 L2 8 404 424 L1 L2 2-6-37 Base Mounted

Card Motor

Amount of Overhang: Ln [mm], Correction Value for the Distances to the Moment Center: An [mm] Correction Value for the Distances to the Moment Center: An [mm] Fig. 1 Table 1 Mp: Pitching Mounting orientation My: Yawing Mr: Rolling Model A1 A2 22.5 L2 A2 LAT3m-10 LAT3m-20 LAT3m-30 2.2 L1 A1 32.5 2.2 42.5 2.2 Mr L1 A1 Horizontal W Mp My L3 W W Mr W L2 A2 L3 Vertical Mp My W W Allowable Load

KR

Spatter Cover 2: KR (Applicable tube: FR soft nylon, FR double layer) Applicable fitting size Model Installed L1 L2 D KR-08C1 KR-06C1 6 12.8 15 18 20 KR-10C1 KR-12C1 18 13.7 20 15.7 22 17.2 22 17.2 8 10 12 One-touch fitting How to install One-touch fitting Construction of spatter cover Install with matching A and B parts. 15-3-5

3 Port Direct Operated Poppet, Solenoid Valve, Series VKF300

Direct Operated Poppet Series VKF300 Dimensions/Manifolds Body Ported Type Common SUP, Common EXH/Top Ported Type 20 Manifold Grommet: G DIN terminal: D 4-Rc(PT) 1/8 (ports P, R) Manual override (non-locking) Applicable cord O.D. 4 to 6.5 Max .10 71.5 78.5 71 Light (DZ type only) 2-4.5 (mounting holes) 67.5 59 19 17 2 R P P R 34 2.3 7 20 Pg.7 4-Rc(PT) 1/8 (ports P, R) A A A P = 19 13.5 L2

Input Specification: 0 (Voltage Input), Output Specification: 0 (NPN Open Collector 2 Outputs Switching Type + Analog Voltage/Auto-shift Function Switching Type), Unit Specification: M (SI Unit Only), Lead Wire: L (Lead Wire w/Connector, 2m), Bracket/Panel Mount: A (Bracket)

Input Specification: 0 (Voltage Input), Input,Output Style: 0 (NPN 2 Output + 1~5V Output), Connector Type: Standard Connector Type, Unit: M (SI Fixed Unit), Option 1: L (Power Source, Output Connection Cable), Option 2: A (Bracket)

Input Specification: 0 (Voltage Input), Input,Output Style: 1 (NPN 2 Output + 4~20mA Output), Connector Type: Standard Connector Type, Unit: M (SI Fixed Unit), Option 1: L (Power Source, Output Connection Cable), Option 2: A (Bracket)

Input Specification: 0 (Voltage Input), Input,Output Style: 2 (NPN 2 Output + Auto Shift Input), Connector Type: Standard Connector Type, Unit: M (SI Fixed Unit), Option 1: L (Power Source, Output Connection Cable), Option 2: A (Bracket)

Input Specification: 0 (Voltage Input), Input,Output Style: 5 (PNP 2 Output + Auto Shift Input), Connector Type: Standard Connector Type, Unit: M (SI Fixed Unit), Option 1: L (Power Source, Output Connection Cable), Option 2: A (Bracket)

Input Specification: 0 (Voltage Input), Input,Output Style: 4 (PNP 2 Output + 4~20mA Output), Connector Type: Standard Connector Type, Unit: M (SI Fixed Unit), Option 1: L (Power Source, Output Connection Cable), Option 2: A (Bracket)

Input Specification: 1 (Current Input), Input,Output Style: 4 (PNP 2 Output + 4~20mA Output), Connector Type: Standard Connector Type, Unit: M (SI Fixed Unit), Option 1: L (Power Source, Output Connection Cable), Option 2: A (Bracket)

Input Specification: 0 (Voltage Input), Input,Output Style: 3 (PNP 2 Output + 1~5V Output), Connector Type: Standard Connector Type, Unit: M (SI Fixed Unit), Option 1: L (Power Source, Output Connection Cable), Option 2: A (Bracket)

Input Specification: 1 (Current Input), Output Specification: 1 (NPN Open Collector 2 Outputs Switching Type + Analog Current/Auto-shift Function Switching Type), Unit Specification: M (SI Unit Only), Lead Wire: L (Lead Wire w/Connector, 2m), Bracket/Panel Mount: A (Bracket)

Input Specification: Voltage Input, Input,Output Style: NPN 2 Output + 1~5V Output, Connector Type: Standard Connector Type, Unit: SI Fixed Unit, Option 1: Power Source, Output Connection Cable, Option 2: Bracket, Option 3: -

Input Specification: Voltage Input, Input,Output Style: NPN 2 Output + 4~20mA Output, Connector Type: Standard Connector Type, Unit: SI Fixed Unit, Option 1: Power Source, Output Connection Cable, Option 2: Bracket, Option 3: -

Input Specification: Voltage Input, Input,Output Style: NPN 2 Output + Auto Shift Input, Connector Type: Standard Connector Type, Unit: SI Fixed Unit, Option 1: Power Source, Output Connection Cable, Option 2: Bracket, Option 3: -

Input Specification: Voltage Input, Input,Output Style: PNP 2 Output + Auto Shift Input, Connector Type: Standard Connector Type, Unit: SI Fixed Unit, Option 1: Power Source, Output Connection Cable, Option 2: Bracket, Option 3: -