High Power Cylinder Series RHC

D-A9V/M9V/M9WV/D-M9A(V)L types cannot be mounted. Do not indicate suffix N for no lead wire on D-A3/A44/G39/K39 models. Lead wire length symbols: 0.5 mNil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN -X Individual -X Since there are other applicable auto switches than listed, refer to page 1214 for details.

AS-FS Series Speed Controller with Indicator/ Elbow Type: Uni Thread Type

100 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations AS4201FSl, AS4211FSl AS3201FSl, AS3211FSl 12, 13, 16 Inlet pressure: 0.5 MPa Inlet pressure: 0.5 MPa 10, 11, 12 1500 1000 08, 09 Flow rate [L/min (ANR)] Flow rate [L/min (ANR)] 10, 11 06, 07 1000 500 500 0 0 5 10 0 0 5 10 Number of needle rotations Number of needle rotations Note) The numbers above the flow rate

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40

Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ Since there are other applicable auto switches than listed, refer to page 249 for details. For details about auto switches with pre-wired connector, refer to pages 1784 and 1785.

SYJ300-OMU0003

-Q 2 AC200V50/60Hz LN L AC110V50/60Hz LO 3 (AC115V50/60Hz) M 4 AC220V50/60Hz MN M (AC230V50/60Hz) MO *WDC *CE DC WO M8 1 W *M8 P13P14 *P13P14 5 D V115 5 DC24V 6 DC12V S () 1 AC100V50/60Hz Z () *DOZYOZ *AC S 2 AC200V50/60Hz 3 AC110V50/60Hz (AC115V50/60Hz 4 AC220V50/60Hz (AC230V50/60Hz) D DIN *DDO DC DC24VDC12V *DDO D DO Y DIN Y YO *ASSY V111(G,H,L,M,W) V115(DIN )

Metering Valve with Silencer Series ASN2

ASN How to Order AQ ASN2 03 ASV JIS Symbol AK Option Nil S None With seal ASS Port size ASR M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 ASF Thread type Metric thread (M5) Unified thread (10-32 UNF) R NPT Nil N Needle Valve/Flow Characteristics Inlet pressure: 0.5 MPa Flow rate (l/min (ANR)) Effective area (mm2) Number of needle rotations 15-11-1 Series ASN Construction Component

W2M/4M

Cor|duit, DIN connector (Note) Gauge port RC(PT)1/8, Pre6sur g6uge, 14{1.0}, 28{2.0}, 72{5.1), 100{7.1}, 145{10.2) How to Order Model t x#l r*m ? Electrlcal connectlon ?

Electro-Pneumatic Regulator IT1000/2000/4000

(Note) Gauge port RC(PT)1/8, Pre6sur g6uge, 14{1.0}, 28{2.0}, 72{5.1), 100{7.1}, 145{10.2) How to Order Model t x#l r*m ? Electrlcal connectlon ?

CUJ

Lead wire length (m) Load voltage Auto switch model Electrical entry direction Pre-wire connector Special function Type Electrical entry Indicator light Wiring (Output) 3 (L) 5 (Z) Applicable load 0.5 (Nil) AC DC Perpendicular In-line M9N M9P M9B F8N F8P F8B 3-wire (NPN) Solid state switch Relay, PLC 12 V 24 V Yes Grommet 3-wire (PNP) 2-wire Auto switches marked with are produced

ZPT/ZPX

A B d H Model H A SN-015A M14 x 1 19 21.9 5 ZPNA-M16 M16 x 1.5 22 25.4 6 ZPNA-M18 M18 x 1.5 27 31.2 9 ZPNA-M22 M22 x 1.5 30 34.6 8 Bolts (Hexagonal Socket Head Cap Screw) Dimensions d B (mm) A B d L 8 11 5.5 M3 x 0.5 L 8 12 7 M4 x 0.7 A 10 15 8.5 M5 x 0.8 13-11-96

Speed Controller with Indicator In-line Brass Stainless steel Electroless nickel plated In-line Type “Made to Order” “Made to Order” section has been added. Pages 3, 8 section has been added. ¡Lubricant: Vaseline -X12 The numerical indication of ¡Greas

AS2002FS-06 When connecting 4 pcs. and mounting L-brackets on both sides AS-20A Speed controller AS2002FS-06 4 pcs. 3 111 2 L-bracket AS-20L 2 pcs.

Low-Speed Rotary Actuator

Table 5 (mm) Size L Bolt 10 13 M 4 15 16 M 4 20 22.5 M 6 30 24.5 M 8 Bolt 40 28.5 M 8 Rotating range examples Fig.5 Fig.6 shows piping ports of the rotary actuator. Table 6 shows the port size. Table 6 Size Port size 10 M50.8 15 20 B Port A Port Rc 1/8 , G 1/8 NPT 1/8 , NPTF 1/8 30 40 Fig.6 Port location Rotary actuator ports have a fixed orifice.

RHC

L (Example) C73CL 5 m Z (Example) C73CZ None N (Example) C73CN Since there are other applicable auto switches than listed, refer to page 10-6-17 for details.

MXU

3-wire (NPN) 2-wire Relay, PLC IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

MXU

3-wire (NPN) 2-wire Relay, PLC IC circuit 5 V, 12 V 3-wire (PNP) 12 V 2-wire Relay, PLC 24 V Grommet 3-wire (NPN) 3-wire (PNP) IC circuit 5 V, 12 V Diagnostic indication (2-color indication) 2-wire 12 V Lead wire length symbols: 0.5 m Nil (Example) A93 3 m L (Example) A93L 5 m Z (Example) F9NWZ Solid state switches marked with are produced upon receipt of order.

Speed Controller with

Port size Body size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Metric size Inch size 2 to 16 1 to 4 M5 to 1/2 1/8" to 1/2" Flow rate 0 5 10 Number of needle rotations Refer to the Web Catalog for details.

AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) F9NWZ Auto switches marked are produced upon receipt of order. 11-6-5 6 Series CRJ Specifications 05 1 Size Basic type With external stopper Basic type With external stopper Fluid Air (Non-lube) Max. operating pressure 0.7 MPa Min. operating pressure 0.15 MPa 0 to 60C (No freezing) Ambient and fluid temperature

Mini-rotary Actuator Rack & Pinion Style Series CRJ Size: 05, 1 1

wire length symbols: 0.5 m Nil (Example) M9N 3 m L (Example) M9NL 5 m Z (Example) F9NWZ Auto switches marked are produced upon receipt of order. 11-6-5 6 Series CRJ Specifications 05 1 Size Basic type With external stopper Basic type With external stopper Fluid Air (Non-lube) Max. operating pressure 0.7 MPa Min. operating pressure 0.15 MPa 0 to 60C (No freezing) Ambient and fluid temperature

Booster Regulator Series VBA1110 to 4200 1

VBA200: Qb = 500 [l/min (ANR)] VBA400: Qb = 1050 [l/min (ANR)] NO VBA400 NO Max. 0.05 MPa Avoid pulsation Judgement of flow rate Qb < Q YES VBA200 YES Can not get necessary pressure. Tank capacity (l) Tc [s] = L W Obtain the tank capacity V. Select tank from table below.