(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Oil-resistant vinyl cabtire code 3 cores, ?

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

(between live parts and case)50 M or more (at 500 VDC by megameter) between live parts and case01: R 8, M5 x 0.8 T1: NPTF 1/8, M5 x 0.8 00: ZM ejector mount type40 g (Including 0.6 m-Long lead wire)Grommet typeConnector typeCompliant with CE marking

Air cylinder

L 100mm, or stroke 1 2 1 7 5 4 6 2 6 5 7 3 L L Fig. 14 Position for application of grease Table 9 Amount of grease units: g Stroke 40 50 63 80 100 P o s i t i o n f o r Bore g r e a s e At 100st 3 to 4 3 to 5 4 to 5 6 to 8 8 to 10 50st added 1 1 1.5 2 3 28 3-2-4. Mounting of seals 1) Rod seal, Cushion seal (Fig.14, ) Pay attention to the mounting direction of the seal.

LEJ-OM002xx

Motor output [W] / size [mm] 100 / 40 200 / 60 Type of Motor AC servo motor (100/200VAC) Type of Motor S2,S3 Incremental 17bit encoder (Resolution:131072 p/rev) Type of Motor S6,S7 Absolute 18bit encoder (Resolution:262144 p/rev) specification Encoder Electric Type of Motor T6,T7 [With LECSB-T/LECSS-T]Absolute 22bit encoder (Resolution: 4194304 p/rev) [With LECSC-T]Absolute 18bit encoder

Rated Vacuum Range: F (-100 to 100 kPa), Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: K (Operation Manual

Rated Vacuum Range: -100 to 100 kPa, Output Specification: NPN Open Collector 2 Outputs + Analog Voltage Output, Unit Specification: Unit Selection Function, Switches w/Unit Selection not Permitted for Use in Japan, Piping Specification: NPT 1/8, Lead Wire: Lead Wire w/Connector, 5-core, 2 m Lead Wire, Bracket: Panel Mount Adapter, Operation Manual: Operation Manual, Calibration Certificate

HRX-OM-S004

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Series 10-MGF ø40, ø63, ø100 Guide Table

R.

VXA21/22

Port A Port P Pilot Pressure Port P (N.O.) Model Pressure (MPa) 0.25 to 0.7 VXA31 4 VXA32 4 Option Material No.

HRX-OM-R026

R y 001 Year Symbol Remarks Month Symbol Remarks Serial no. 2013 R Repeated from A to Z in alphabetical order 1 O Repeated from O to Z in alphabetical order, with O for January and Z for December 2014 S 2 P --2015 T 3 Q Fig. 1-1 Position of product label HRSH Series 1.4Product Label 1-3 HRX-OM-R026 Chapter 1 Safety Instructions 1.5 Safety Measures 1.5.1 Safety Instructions for Use Follow

Electro-pneumatics Hybrid Regulator

Please check that each wire and cable is not broken. 6 Open the 3 (R) port. 7 Open the P2 port. 8 Input signal, and supply air to port 2 (A).

INFORMATION Modular Connection Type Residual Pressure Relief 3 Port Solenoid Valve For connecting to F.R.L. units AC25-A AC30-A AC40-A VP500 IN OUT VP700 Allows for space saving and reduced piping labor. Power consumption: 0.35 W (Without light) EXH Exam

A 67 G1/2 [3(R) port] (25.5) Type E 66.9 LOCK PUSH 5

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: C6H (ø6 One-touch Fitting, Straight Type), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: B (Panel Mount Adapter), Operation Manual: Y (w/o Operation Manual, w/o Calibration Certificate)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: None, Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: D (Panel Mount Adapter + Front Protection Cover), Operation Manual: K (Operation Manual, Calibration Certificate)

Output Specification: R (NPN Open Collector 2 Outputs + Analog Voltage Output), Unit Specification: P (Unit Selection Function, Initial value psi), Piping Specification: N01 (NPT 1/8), Lead Wire: J (Lead Wire w/Connector, 5-core, 2 m Lead Wire), Bracket: A2 (Bracket B, Horizontal Mounting)