A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, PRE-SET, INSTRUMENTATION, IT2000/ITV2000 E/P REGULATOR, DB, IT2000 1/4 INCNPT VERSION, .77161 lb, ModelITV101 ITV103 ITV105 ITV201 ITV203 ITV205 ITV205------------

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, EA, IT4000 3/8 INCPT VERSION, 2.32157 lb

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, FB, IT4000 1/2 INCNPT VERSION, 1.42198 lb

A dedicated exhaust port (M5) is installed to remove air from the nozzle. The IT series comes with monitor signal output and shock/ vibration resistance., Operation Manual, E/P REGULATOR, INSTRUMENTATION, IT4000/ITV3000 E/P REGULATOR, EA, IT4000 3/8 INCPT VERSION, 1.42198 lb

Exhaust Cleaner for Clean Rooms AMP Series

hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7 10 8 8 10

Clamp Cylinder with Lock Series CLK1

locking can be selected Holding an unclamped state Prevents dislocation of home position due to weight of clamp arm Holding a clamped state Prevents work piece slippage and dropping due to work piece weight LOCK LOCK B A B A LOCK LOCK Clamped locking Unclamped locking Compact lock mechanism minimizes extension of length dimension Series CLK1 clamp cylinder with lock Extended dimension mm E

Manifold Regulator Modular Type ARM2500/3000 Series

Note Outlet pressure (MPa) 136413 ARM2500 ARM3000 Hexagon socket head cap screw (M5 x 70) 4 With flat washer 136313 IRV Hexagon socket head cap screw (M6 x 85) 4 With flat washer VEX SRH Option/Bracket Assembly SRP Individual IN type can be used as a single unit regulator.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

Speed Controller with One-touch Fittings Panel Mount Type Series AS



1F-3 In-line Type 1

2 e !1 No. q w e r t y u i o !0 !1 !2 Material Note Description Body A Handle Body B Needle Needle guide Lock nut Panel nut U seal Spacer Cassette Packing O-ring PBT PBT Brass Brass Brass Brass Brass HNBR PBT POM, Stainless steel NBR NBR Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Electroless nickel plated Note) !

Series 10-MGF ø40, ø63, ø100 Guide Table

Fittings & Tubing Air Cylinders Rotary Actuators V D C D C E F H A + Stroke B + Stroke GB GA T X PP (Rc, NPT, G): Relief port 2 x P (Rc, NPT, G) Port for extension Port for retraction When the cylinder is extended KA: T-slot for hexagon bolt 4 x M K KB KC 6-K (6 positions) 10 10 M12 x 1.75 M10 x 1.5 M8 x 1.25 M Bore size Standard stroke (mm) GB D A 170 140 10 10 38 38 36.5 E B F KC 11 11

Slit Valve

1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.

Guide Table Series MGF ø40, ø63, ø100 1

4 20Clear anodized Rod cover Magnet Magnetic material Aluminum alloy e !5 Chromated Piston Plug Carbon steel Aluminum alloy r !6 Data Electroless nickel plated Piston rod Element Resin Carbon steel t !7 Anodized Plate Snap ring Spring steel Aluminum alloy y !8 Anodized End plate Rod seal NBR Aluminum alloy u !

The base color of the new AC-A series is urban white, maintaining a clean, modern look.The E*00-A series will end production in March 2025. -- Please select the E*00-D series for new applications Piping adapter: M5 x 0.8, 1/8, 1/4, 3/8, 1/2, 3/4, 1" ; Easy maintenance; Detach equipment without removing piping; Assembles to FRL's by simply tightening screws

PFxx-OMU0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) 74 No.PF-OMU0002-D Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 75 No.PF-OMU0002-D Lead wire with M12 connector (ZS-37-A) Pin

PFxx-OMX0002

PF3A703H (For 3000 L/min) PF3A706H (For 6000 L/min) PF3A712H (For 12000 L/min) -95No.PF-OMX0002-B Dimensions Symbol Models A B D E F H K L N PF3A703H 130 45 79.1 55.3 22.5 25 35 60 30 4 x M4 x 0.7 depth 7 PF3A706H 170 60 94.1 70.3 30 68 45 80 40 4 x M5 x 0.8 depth 8 PF3A712H 200 70 104.1 80.3 35 85 50 100 50 4 x M6 x 1.0 depth 9 -96No.PF-OMX0002-B Lead wire with M12 connector (ZS-37-A) Pin

HRX-OM-W058

For option B, screws for breaker terminal are M5. (PE terminal :M4) Fig. 3-5 Power supply cable 3.3 Installation HRS-R Series 3-10 HRX-OM-W058 Chapter 3 Transport and Setting Up 4. Remove the screws (4pcs) on the backside. For option B Screws (x4) Screws (x4) Rear cover and screws are supplied as accessory. 5. Remove rear cover.

HRX-OM-X027

For option B, screws for breaker terminal are M5. (PE terminal :M4) Fig. 3-5 Power supply cable 3.3 Installation HRS-R Series 3-10 HRX-OM-X027 Chapter 3 Transport and Setting Up 4. Remove the screws (4pcs) on the backside. For option B Screws (x4) Screws (x4) Rear cover and screws are supplied as accessory. 5. Remove rear cover.

HRX-OM-Z002

Table 3-3 Power supply cable and earth leakage (Recommended) Earth leakage breaker Terminal Power supply voltage Rated Sensitivit block Recommended crimp terminal Cable qty. x size Model curre y of leak screw Specifications nt current diameter [A] [mA] 3 cores x 5.5 mm2 HRLE050--20 Single phase AC200 to 230V(50/60Hz) M5 R5.5-5 (3 cores x AWG10) 30 * including ground 3 phase 200VAC(50Hz) 3

PSxx-OMS0004CN

1.5 *3) *3)1 1 [] -3No.PS-OMS0004CN-D () () () () -4No.PS-OMS0004CN-D () * C3604+AI203(96)FKM () ZS-31-X175 X188 () NG NG -5No.PS-OMS0004CN-D * (Nm) R1/8 35 R1/4 812 (50N ) () * () 6 33 ( ) () 10 m DC(-)() FG -6No.PS-OMS0004CN-D * ( ) () CE -1060 * 2030 10 1% * -7No.PS-OMS0004CN-D 0 01 PSE57 / M12(3m) 0 (01MPa) L M12(3m) 3 (-100100kPa) N 4 (0500KPa) (1~5V) 01 R1/8(M5

Air Gripper for Collaborative Robots

E. Wiring examples to robot controllers add. 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL https://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2021 SMC Corporation All Rights Reserved 45 -