Step Motor Driver （ Pulse input type ）

20 30 20 30 ORIG ACC / DEC 1000 1000 1000 Creep speed 20 30 20 30 20 30 ORIG sensor 0 0 0 ORIG SW Dir 0 0 0 Undefined parameter21 0 0 0 103 - Appendix 1.6 LEP series setting value LEPY Step data default Model LEPY6 LEPY10 Lead [mm] 4 8 5 10 No. 0 0 Movement MOD ABS ABS Speed 150 300 200 350 Position 0.00 0.00 Acceleration 3000 3000 Step data default Deceleration 3000 3000 Pushing force 100

Series CQ2

Bore size mm (in) Bore size Operating range Operating range l (mm) 180 200 15 (0.6) 15 (0.6) 9 Series CQ2 Compact Cylinder Solid State Auto Switches/Direct Mounting Type D-Y59 , D-Y69 , D-Y7P (V) A B A B Auto Switch Specifications D-Y5, D-Y6, D-Y7P, D-Y7PV (with indicator light) D-Y7PV D-Y59B D-Y59A D-Y69A D-Y7P D-Y69B Auto switch model no.

DOC1023126

Specification Table Battery-less absolute encoder type (Step motor 24 VDC) Model EQY25 EQY32 Storoke [mm] 30 to 400 30 to 500 Work load[kg] *1 Horizontal 8 26 40 70 30 50 90 100 Vertical 2 8 16 30 3 13 26 46 Pushing force [N] Note2),3),4) 36 to 76 63 to 122 126 to 238 232 to 452 50 to 118 80 to 189 156 to 370 296 to 707 to 300 30 to 900 18 to 700 9 to 450 5 to 225 30 to 900 24 to 800 12 to

Stainless Steel One-touch Fittings Series KG

A Weight (g) L1 L2 M D Q Part No.

Series 10-/11-/12, 21-/22- CXS Dual Rod Cylinder

Auto Switch Proper Mounting Position (Detection at Stroke End) Electrical entry direction: Inward Electrical entry direction: Outward D B A C B D-Z7Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BA Bore size (mm) A C 16.5 (15) 23.5 (22) 34 (32.5) 46 (44.5) 46 (44.5) 56 (54.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 18 25 35.5 48 48 58 D 2 5 2 4.5 6.5 6.5 C 10.5 17.5 28 40 40 50 D

Compact 5-Port Solenoid Valve

D D B 2 B 2 B 2 B 2 B 2 1 P P 1 Series Part no.

MHF2

(V), D-F9P(V), D-F9B(V) Auto Switch Specifications Grommet D-F9, D-F9V (with indicator light) In-line D-F9P D-F9N Perpendicular D-F9BV D-F9NV Perpendicular D-F9B Perpendicular D-F9PV Auto switch symbol In-line In-line Electrical entry 3-wire 2-wire Wiring method PNP NPN Output method IC circuit, Relay, PLC 24VDC relay, PLC Applicable load 5, 12, 24VDC (4.5 to 28VDC) Power supply 10mA or

Step Motor Controller

Refer to page 30 for the noise filter set. Refer to the LECA Operation Manual for installation.

Valve for Water and Chemical Base Fluids (2/3 Port Air Operated Valve)

VCC12(D)-00 38.80.1 230.1 Leakage detection port 16.50.1 1.2 to 2 hole 3.8 hole Pilot port IN port 4 hole 1.2 hole R0.2 30 R0.2 OUT port 210.05 M26 x 1.5 21.60.05 240.05 200.05 C1 30 30 2.5 8.5 330.1 40.80.1 450.1 Recommended surface roughness of inner surface where the valve is inserted is Rz6.3.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

Operating Range (mm) Bore size Auto switch model 25 32 40 D-M9/M9V D-M9W/M9WV D-M9A/M9AV 5.0 5.5 5.5 D-A9/A9V 7.0 10.0 9.0 Note) Values which include hysteresis are for guideline purposes only, they are not a guarantee (assuming approximately 30% dispersion) and may change substantially depending on the ambient environment. Auto Switch Mounting Bracket/Part No.

7.5

side D D D D Max. 14.5 (SJ3000-00-P) (SJ2260) (SJ3260) (SJ2260) SOL.b SOL.b SOL.b SOL.b 15 D side U side (12) (12) (12) (12) With manual operation of the pressure adjustment screw (14) SOL.a (14) SOL.a (14) SOL.a (14) SOL.a 22.5 90.5 22.9 56.2 Note) Reduces supply pressure from the D side of manifold.

High Vacuum Angle Valve, XL Series

25C 113 40 38 30 17.1 35 25.5 23 96 129 128.5 121.5 138.5 50 48 40 26.2 28 25.5 40 XLS-25D XLS-25T 120.5 121.5 154.5 63 97 51 66 30 High Vacuum Angle Valve Series XLS Dimensions (mm) 1in=25.4mm XLS/With control power supply Grommet (G) H G 41 D 72 530 10 E J B C F A A (mm) E A 40 50 B 113 138.5 C 121 147 D 38 48 30 40 F 17.1 26.2 G 87 89.5 H 110 115 J 66.5 Model XLS-16-P G XLS-25-P G 69

VFR

U side mounting D U 1 2 8 stations Option D side 3 4 3 4 Max: 8 stations Refer to page 3-5-8.

LEF-OM002xx

30 to 930 20 to 620 10 to 300 801900 Speed range [mm/s] 30 to 780 20 to 520 10 to 250 9011000 30 to 660 20 to 440 10 to 220 10011100 Actuator specification 30 to 570 20 to 380 10 to 190 11011200 20 to 500 30 to 500 10 to 250 1000 Driver type LECPA Note2) Stroke 30 to 500 20 to 440 10 to 220 Speed 10011100 range [mm/s] 30 to 500 20 to 380 10 to 190 11011200 3,000 Max.acceleration/deceleration

Line filter

How to Order AFF D 30 03 B (1) Symbol Details Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Without mounting option a Mounting B With bracket Nil Without auto drain Options C N.C. (Normally close) Drain port is closed when pressure is not supplied. b Float type auto drain D N.O.

Mist Separator

How to Order AM D 30 03 B (1) Symbol Details Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Without mounting option a Mounting B With bracket Nil Without auto drain Options C N.C. (Normally close) Drain port is closed when pressure is not supplied. b Float type auto drain D N.O.

Micro Mist Separator

How to Order AMD D 30 03 B (1) Symbol Details Body size 20 30 40 Nil Rc Thread type N NPT F G 01 1/8 02 1/4 Port size 03 3/8 04 1/2 Nil Without mounting option a Mounting B With bracket Nil Without auto drain Options C N.C. (Normally close) Drain port is closed when pressure is not supplied. b Float type auto drain D N.O.

3 Port Solenoid Valve Metal Seal Series VZ200 1

Model VV3Z2-20 VV3Z2-30 VV3Z2-50 -S50 Part no.

Compact Cylinder with Air Cushion and Lock Series RLQ

D-A79W 14 14 16 9.5 13 9.5 9.5 11.5 D-F7/F7V D-J79/J79C D-F7W/F7WV D-J79W D-F7BAL/F7BAVL D-F7NTL/F79F D-M9/M9V D-M9W/M9WV D-M9AL/M9AVL 5.5 5 5.5 7 6 6 6 6.5 D-A7/A7H D-A73C D-A80/A80H D-A80C 12 11 10 12 The operating ranges are provided as guidelines including hysteresis and are not guaranteed values (assuming approximately 30% variations).

Series SYJ3000/5000/7000 4, 5 Port Solenoid Valve Rubber Seal

SYJ3000-22-1 SY114-lll Note white white white Body Piston plate End cover Piston Spool Ass'y y u q w e r t VQZ VQD How to Order Pilot Valve Assembly How to Order Connector Assembly VZS VFS : SY100-30-4ASY114 5 G DC VS : SY100-30-1A100V AC Voltage VS7 24V DC 12V DC 6V DC 5V DC 3V DC 100V AC50/60Hz 200V AC50/60Hz 110V AC50/60Hz [115V AC50/60Hz] 5 6 V S R 1 2 : SY100-30-2A200V AC : SY100-30-