3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

10 units.

Compact Electric Actuator Series LG1

15% +10% 15% Single phase 200 to 230VAC (50/60HZ ) For 100V Single phase 100 to 115VAC (50/60HZ ) R T 1MCCB Equipment Connection Example Noise filter External noise is prevented by the noise filter.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

Recommended Applicable Tubing Tubing material Clean series polyurethane tubing: Series 10 Tubing O.D. 4, 6, 8, 10, 12 Polyurethane tubing: Series TU, Nylon tubing: Series T and Soft nylon tubing: Series TS can also be used. However, the degree of clean performance will decline.

Turntable Cylinder Series MGT

7 18.5 13.3 20.3 12 8 22.5 2-R3 15.3 23.3 13.5 10 30 8 6+0.05 0 6 WB Z WA XX section T groove dimensions QQ section detail drawing Notch spring force adjustment bolt 4-OA through L 4-MM depth ML QQ section 22.5 4-OB counter bore depth OL B-NN depth NL XX section Z WA Q 45 RA X0.02 RB RC T VB U X PW VA H NL HB HA: T groove for hex. bolt XAH7depth XL DB 2-P GB GA GC 6+0.05depth 6 o PB K J

Ejector Valve Unit Series ZYY/ZYX 1

2 Aluminum Diffuser ZYY3000-NPA Non plug assembly t !3 Stainless steel Needle y Aluminum Spool u Resin Piston i 13-8-10 11 Ejector Valve Unit Series ZYY/ZYX Construction ZYX3000 EXH. ZX B B' A B ZR A B P1 A A' ZM !

Cylinder with Lock Series CLS

Graph 1 30 20 10 The movement time is the time that is necessary for the load to travel the total movement distance from the start without any intermediate stops. 2.

212

Description Material Note 1 Body PFA 2 Housing PVDF 3 Diaphragm FKM 4 Plate PVDF 5 Diaphragm PTFE 6 Housing PVDF 7 Diaphragm PTFE 8 Guide PPS 9 End plate PVDF 10 Spring Stainless steel Fluorine coated r t y o i u !

Speed Controller with One-touch Fittings

2 t AQ ASV AK VCHC ASR ASQ i q o !0 !1 i q o !0 !

PF2D

1 q t i 10 FKM O-ring PF2D540 o !0 u !0 !2ywr e 11 Stainless steel 304 Thread 12 PVC Lead wire !

Digital Gap Checker

Smallest settable increment 1 0.01 0.1 5 C O N T E N T S ISA3 Series 3-Color Display Digital Gap Checker ISA3 Series How to Order (Without Control Unit)Page 7 How to Order (With Control Unit) Page 8 SpecificationsPage 9 Supply Pressure Dependence CharacteristicsPage 10 Response TimePage 11 Relationship between Displayed Value and DistancePage 12 Nozzle ShapePage 12 Internal Circuit and Wiring

Steam Valve

121.5 138 161 20 24 24 130.5 148 171 8 10 12 55 63 74 Port size/Flange: 32F, 40F, 50F J (Valve open) Indicator (Option) Pilot port E 12(P1), 10(P2) Port size: refer to table below P1 P2 H H D B A 32 B C G F 4 x 2 x 18 mounting hole A Applicable flange 1(A), 2(B) Pilot port 12(P1), 10(P2) A B C D E F G H J Model VND50D-32F VND60D-40F VND70D-50F 8 10 12 50 40 32 1 8 1 4 1 4 130 150 180 211.5

CJ2Q

Sliding Resistance at the Low Friction Side Mounting Bracket Part No. 0.08 Bore size (mm) 16 Mounting bracket 10 10 0.07 Foot CJ-L010B CJ-L016B 16 Sliding resistance* (MPa) Flange CJ-F010B CJ-F016B 0.06 T bracket* CJ-T016B * T bracket is used with double clevis (D). CJ-T010B 0.05 Auto Switch Mounting Bracket Part No. (Band mounting) 0.04 Bore size (mm) 10 16 Bracket part No.

AC Servo Motor Driver (MECHATROLINK-II type)

65536 H 30 1875 LEFS40 A 20 1250 B 10 625 LEFB25 S 54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 26 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control

IDX-OM-U022

ON OFF 2 3 4 6 1 2 4 8 5 10 0.5 ON:SEC OFF:MIN 0.5 IDFA100F150F 4 4 4.2 IDX-OM-U022 5. 5.1 3 ON OFF (R) OFFON 3 2 R T 5.2 60cm 1 5.2 5.2 10% 5.2 IDFA100F150F 5 1 5.1 IDX-OM-U022 5. ( ) ( ) 60cm 1 10% 3 ( ) 60cm 1 2 INOUT INOUT () IDFA100F150F 5 2 5.1 IDX-OM-U022 5. 5.2 1-3 5.1 3.7 OFF () ON OFF ON IDFA100F150F 5 3 5.2 IDX-OM-U022 5. 5.3 R () OFF OFF OFF ON

A

M E N S I O N S AD S E R I E S A U I T O D R A I N S S Y M B O L S H O W T O O R D E R A U T O D R A I N S E R I E S AD AD402-02 (1/4) PT AD402-03 (3/8) PT AD402-04 (1/2) PT AD600-06 (3/4) PT AD600-10 (1) PT H O W T O O R D E R A U T O D R A I N S E R I E S NAD NAD402-N02 (1/4) NPT NAD402-N03 (3/8) NPT NAD402-N04 (1/2) NPT NAD600-N06 (3/4) NPT NAD600-N10 (1) NPT FOR FURTHER TECHNICAL DETAILS

AC Servo Motor Driver (MECHATROLINK-III type)

65536 H 30 1875 LEFS40 A 20 1250 B 10 625 LEFB25 S 54 3375 LEFB32 S LEFB40 S LEJB40 T 27 131072 3375 LEJB63 T 42 2625 H 24 1500 LEJS40 A 16 1000 LEJ B 8 500 65536 H 30 1875 A 20 1250 LEJS63 B 10 625 *The travel distance of the actuator per 1 pulse should be 1 [m/pulse]. 25 - 4.5 Positioning Completed Width This signal indicates that servomotor movement has been completed during position control

PSxx-OMM0006CN

DC1224 V10 DC1224 V10 9 DC(+) DC(-) / / 10 ( ) 11 / 5 m / 12 1015 10 "-M" (kPaMPa) ( ) "-M" 13 SI kPa,MPa -57No.PS-OMM0006CN-E No. 14 15 , 16 FUNC 17 4 m 4 m FUNC 18 10 10 () 19 () ( ) () / -58No.PS-OMM0006CN-E , 80 mA 7F.S.(3.5F.S.) 1 1F.S. 1 -59No.PS-OMM0006CN-E (M8(3 )62 ) ZSE40A() ZSE40AF() ISE40A() 0-101.3 kPa -100.0100.0kPa -0.1001.000 MPa 10.0-105.0 kPa -105.0105.0kPa

ZMA

10 8 5 4 ZZMA Stations 04 ZQ 10 10 8 6 ZZMA Stations 04B Effective area of external silencer is 160 mm2.

Pneumatic Positioner IP300/IP3100

I I L aterial I t NIL NBB (Buna) I S Copper Free Extarnal I TFPM (Viton) High Tamperature tP300 42 0 -T-T | l t l Supply & Output Preasure Gauge I t00 no gauge Operution 01 2kgllcrf r bsingte Acring 02 3 kgf/cm'z 03 10kg /cnf 04 4 kgf/cm'?