MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 B1 17 19 22 27 27 C 54 68 86 104 124 B 24 28 32 39 50 BY 7 8 9 9 12 AL 19.5 23.5 27 32 32 BX 9 6.5 8 10 11 ET A 22 26 30 35 35 BS 42 50 54 64 63 K 5.5 5.5 6 7 7 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Standard stroke (mm) 5, 10 5, 10 5, 10, 15, 20 5, 10, 15, 20 5, 10, 15, 20 M5 x 0.8

MHC2

Axial Ported (With M3 port) [M] DMHCA2-6SM 20M3 x 0.5 Piping port End boss assembly 7.8 20 0.013 0.035 8f8 4 5 10 33 12 The specifications and dimensions not given above are identical with those of the standard type.

MHC2

Axial Ported (With M3 port) [M] DMHCA2-6SM 20M3 x 0.5 Piping port End boss assembly 7.8 20 0.013 0.035 8f8 4 5 10 33 12 The specifications and dimensions not given above are identical with those of the standard type.

VZS

For details, refer to pages 3-7-19 and 3-7-20.

42

Cable length is 0.6 m.

NVZ1000//3000/5000 4,5 Port Solenoid Valve/Rubber Seal Type

,zo-oL : M type plug connector/Nvztl2o-OM a a : f-l With indicator light and surge voltage supoessor. o NVZ1000 Type 2O Manifold.,/ Top Ported. inch(mm) Grommet/Nw4A-20(G ) (H ) Erampl6 pnsumalic circ!

Title not found

,zo-oL : M type plug connector/Nvztl2o-OM a a : f-l With indicator light and surge voltage supoessor. o NVZ1000 Type 2O Manifold.,/ Top Ported. inch(mm) Grommet/Nw4A-20(G ) (H ) Erampl6 pnsumalic circ!

MRQ

(mm) (mm) Stroke 15 20 30 40 50 75 10 25 5 100 20 30 20 15 15 17.5 25 Y 12.5 15 17.5 20 Q 20 20 30 20 68 70.5 68 68 68 70.5 80.5 83 75.5 E 70.5 MRQFS40SMRQ40, #3 (Flange only) 1.5-15 Series MRQ Made to Order Specifications -X1 to X5 Consult SMC for the detailed specifications, dimensions and delivery.

AC Servo Motor Driver (CC-Link Type)

/speed specifying system selection 0h PC31 LMPL Software limit 0 10STM m PC32 LMPH 0 10STM m PC33 LMNL Software limit PC34 LMNH (3) [I/O setting parameters (No.

51

However, please contact SMC for water-resistant products of 20 and 25. 2 1 m type lead wire is only applicable to D-A93. Lead wire length symbols: 0.5 m Nil (Example) M9NW 1 m M (Example) M9NWM 3 m L (Example) M9NWL 5 m Z (Example) M9NWZ None N (Example) H7CN Solid state auto switches marked with are produced upon receipt of order.

7

) Grommet 3 m 2-wire Solid state auto switch CKG1 24 VDC 2-color indicator 5 m 2-wire (34) Relay, PLC Pre-wired connector 0.3 m 2-wire (14) 3 m Grommet 2-wire 5 m 2-color indicator Pre-wired connector 24 VDC 2-wire (14) 0.3 m Reed auto switch DC/AC magnetic field CKP1 3 m 24 VDC 100 VAC 1-color indicator Grommet 2-wire 5 m DNote 1) Refer to page 433 when ordering the auto switch mounting

Series PF2W Digital Flow Switch For Water Refer to www. poweraire .com for details of products compatible with overseas standards.

How to Order Integrated Display Type PF2W7 20 03 27 M Flow rate range Thread type 0.5 to 4 l/min 2 to 16 l/min 5 to 40 l/min 10 to 100 l/min 04 20 40 11 Unit specification Nil N F Rc NPT G Nil M With unit switching function Fixed SI unit Note) Port size Lead wire (Refer to page 35.)

HRX-OM-R005

0.5 50 Pump head[m] Availavel area 0.4 40 Outlet60Hz 0.3 30 Outlet50Hz 0.2 20 0.1 10 Return port Availavel area 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS060--20-(BJM)) 9.7 Required facility water flow (For water-cooled type) 30 Facility water flow rate[L/min] 25 20 15 10 5 0 0 10 20 30 40 50 Facility water inlet temperature[] *The amount of the facility water

RSH

RSH80 RSH80 RSH80 200 200 RSH63 RSH63 RSH63 RSH50 RSH50 RSH50 0.9 Operating pressure : P (MPa) 100 100 0.8 0.7 0 0 10 20 30 40 10 20 30 40 Load speed : u (m/min) m=0.1 0.6 Load speed : u (m/min) m=0 0.5 0.4 Graphe Graphr Bore size 20, 32/ m =0 Bore size 20, 32/ m =0.1 0.3 0.2 0.1 80 80 1000 2000 3000 4000 5000 0 32 Lateral load: W (N) 70 70 60 60 50 50 Weight : W (kg) Weight : W (kg) 32 40

Digital Flow Switches

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

Speed Controller with One-touch Fitting

Symbol Specifications -X12 Lubricant: Vaseline -X21 Grease-free (Seal: Fluorine-coated) + Restrictor (Without check valve) -X214 Restrictor (Without check valve) 10Clean Series 565 A AS Series Needle Valve/Flow Rate Characteristics AS2201F-G02-m, AS2211F-G02-m AS2301F-G02-m, AS2311F-G02-m AS2201F-02-mPA, AS2211F-02-mPA AS2201F-G01-m, AS2211F-G01-m AS2301F-G01-m, AS2311F-G01-m AS2201F-01-mPA

High Vacuum Angle Valve, XL Series

Closing of both valves By removing pressure from actuation port S (10) and actuation port M (7) on model XLD, or turning OFF initial exhaust solenoid valve (25) and main exhaust solenoid valve (26) on model XLDV, the force of spring S (16) and spring M (12) cause valve S (18) and valve M (13) to contact their respective valve seats and seals, thereby sealing them. 20 XLD-63-80 Initial exhaust

OMR0031

Specifications LAT3-10 Stroke 10 mm, Resolution 30 m LAT3-20 Stroke 20 mm, Resolution 30 m Card Motor 8 options LAT3-30 Stroke 30 mm, Resolution 30 m (Refer to the table Product LAT3M-50 Stroke 50 mm, Resolution 5 m Number on the right) LAT3F-10 Stroke 10 mm, Resolution 1.25 m LAT3F-20 Stroke 20 mm, Resolution 1.25 m LAT3F-30 Stroke 30 mm, Resolution 1.25 m LAT3F-50 Stroke 50 mm, Resolution

Digital Flow Switches, Series PF2A, Series PF2W

MULTI COUNTER:CEU5 UP M/C COUNT PRESET FUNC. LEFT RIGHT DOWN SEL.

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

CBAIB63SCBA13, #2 CBAIB80SCBA14, #2 CBAIB100SCBA15, #2 f ZZ Bore (mm) e Stroke range (mm) h l 40 50 63 80 100 1/4 stroke 154 43 59 20 to 500 11.2 1/4 stroke 167 52 66 20 to 600 11.2 1/4 stroke 178 52 66 20 to 600 11.2 1/4 stroke 213 65 80 20 to 750 12.5 1/4 stroke 224 65 81 20 to 750 14 3.4-16 End Lock Cylinder Series CBA1 Dimensions: With Mounting Bracket -H -R -W N L Axial foot: CBA1L Bore