High Vacuum L Type Valve

Dimensions Unit: mm Model A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114 30 40 11 XL*-OMI0011-E 7.

MONOSASHI-KUN

The cylinder section does not have a water resistant enclosure. 3-3 Allowable Kinetic Energy 3-3-1 Allowable Kinetic Energy (J) Bore size(mm) 12 20 32 40 50 63 Allowable Kinetic EnergyE 0.022 0.055 0.15 0.26 0.46 0.77 3-3-2 Mass of Cylinder Movable Parts (g) Cylinder stroke (mm) Bore size(mm) 25 50 75 100 125 150 175 200 250 300 400 500 12 28 33 38 43 48 53 20 70 84 98 112 126 140 154 168

AIR COMBINATION

155.9 42.5 42.5 188.9 151.6 156.1 171.6 22 Standard specifications Bracket mount Model P1 P2 A B C E F G J M N Q1 Q2 R S U V AC20C-A 1/8 126.4 87.6 23.5 41.6 40 23.4 30 43.2 24 33 5.5 12 3.5 29 1/81/4 AC25C-A 1/8 167.4 115.1 23.5 30 55.1 50 30.5 41 57.2 35 7 14 4 41 1/43/8 1/43/8 AC30C-A 1/8 167.4 115.1 27 30 55.1 50 30.5 41 57.2 35 7 14 4 41 AC40C-A 1/8 220.4 147.1 33.5 38.4 72.6 75

Fieldbus system PROFINET compatible SI Unit

Y Connector 75 11.3. Seal cap 77 11.4. Joint pack 79 12. Dimensions 80 12.1. The Modules Manifold 80 13. Troubleshooting 81 13.1. EX245-SPN1A/SPN2A/SPN3A 81 13.2. EX245-DX1 83 13.3. EX245-DY1 83 13.4. EX245-LA1/LB1 84 3 No.EX-OMW0011-B Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage.

XLG Series

Note3) We do not guarantee the quality if the seal material is changed by customer. 6 XL*-OMI0010-E Additional symbols of the seal materials Seal material EPDM Barrel Perfluoro R Kalrez R Chemraz R VMQ FKM for PLASMA ULTIC ARMOR R Combination No. 2101-80 70W 4079 SS592 SS630 SSE38 1232-70 3310-75 UA4640 Symbol -XN1 -XP1 -XQ1 -XR1 -XR2 -XR3 -XS1 -XT1 -XU1 Note1) Due to the different materials

MHZ

) are dimensions for the single acting type. 16 2-M4 x 0.7 thread depth 4.5 (Mounting thread) +0.025 0 3H9 depth 3 0.02 6.5 17H9 depth 2 +0.043 0 4-M4 x 0.7 thread depth 8 (Mounting thread) 5 0 -0.1 Prepared hole dia. 3.4 through (Mounting hole) Note) 30.6 47 24 22 0.02 11 31 (36) 0 -0.4 +2.2 0 45.2 (50.2) 15 When open 26.9 When closed 14.9 0.05 15 7.5 23.6 2-M4 x 0.7 thread depth 8 70 (75

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

PD PC Supply port 2-P FF FE EB EA D FC FA GA FG FB FD GD HA, HB GC GB C B A 87 117 105 135 165 125 155 185 215 270 250 310 Model MIS8-10 MIS8-20 MIS12-10 MIS12-20 MIS12-30 MIS20-10 MIS20-20 MIS20-30 MIS25-30 MIS25-50 MIS32-30 MIS32-50 59 79 72 92 112 86.5 106.5 126.5 144 184 165 205 28 38 33 43 53 38.5 48.5 58.5 71 91 85 105 6 (Effective depth 2.5) 19 20 30 28 38 48 32 42 52 55 75 64 84 16

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

port M5 x 0.8 Piping port 2-M5 x 0.8 33 32 10 J depth 1.5 3 5.5 5 12 9.5 +0.030 0 4 Section AA Mounting base side B D +0.030 0 depth 1.5 3 Q QL 11-/22-MXP12-25 Without magnet and switch rail 2-M2 x 0.4 depth 3 8 5.7 3.5 L 6-M4 x 0.7 depth 4.5 20 20 2-M3 x 0.5 depth 3.5 (mm) G H J K L M Q QL S V W Z Model 10 40 68 22 24 29 40 18 15 59 55 76 11-/22-MXP12-15 30 60 98 40 42 49 60 23 25 89 75

P-E00-1A Models to accommodate a wide variety of applications Electric Actuators CAT. E101 A

Guide type Without motor brake Without motor brake With motor brake With motor brake Without motor brake 50 Direct acting guide Series LXF 0.03 Ball screw 3 100 50 Series LXP 6 Ball bushing guide 100 Ball screw 0.03 50 5 100 Series LXS 50 10 High rigidity direct acting guide 100 Ball screw 0.03 50 5 100 5 Simplified Selection Flow Chart Series LX Standard stroke (mm) and 25 50 75

Speed Controller Adjustable by Flat Head Screwdriver with One-touch Fitting Series AS


1F-D Elbow Type/Universal Type 1

6 3.2, 4 6, 8, 10 8, 10 4 6 6 8 10 12 10, 12 Tubing O.D. 1/8", 5/32" 1/8" 3/16", 1/4" 1/4", 5/16" 3/8" 1/4" Inch size 5/32" 3/16" 5/16" 3/8" 1/2" 5/32" 5/16" 3/8" 3/16", 1/4" Controlled flow (Free flow) Flow rate (l/min (ANR)) 100 180 230 260 390 660 790 1580 1710 460 920 Effective area (mm 2) 1.5 2.7 3.5 4 6 7 10 12 14 24 26 Note) Flow rate values are measured at 0.5 MPa and 20C. 15-9-75

MHZ

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 17H9 depth 2 +0.043 0 4-M4 x 0.7 thread depth 8 (Mounting thread) 5 0 -0.1 Prepared hole dia. 3.4 through (Mounting hole) Note) 30.6 47 24 22 0.02 11 31 (36) 0 -0.4 +2.2 0 45.2 (50.2) 15 When open 26.9 When closed 14.9 0.05 15 7.5 23.6 2-M4 x 0.7 thread depth 8 70 (75

Lubrication Equipment

assembly of AL3000 to AL6000 includes bowl guard (material: SPCE). 1.17-5 Lubricator/Modular style AL1000 to 6000 Dimensions AL1000/2000 AL3000/4000 AC AV AU AF AR IR VEX AW AL5000/6000 AMR AWM AWD ITV VBA VE VY G AL Model Port size A B C D M P R F G H J K L Bracket mounting dimensions Q 25 40 53 70 70 90 95 27 40 56 73 73 50 80 95 120 120 120 120 81.5 122 142 177 177 254 268 25 40 53 70 75

Tamper Proof and Flat Head Screw

Flow direction symbols on body Flow Rate and Effective Area Meter-out type Meter-in type ASD230F ASD330F ASD430F ASD530F ASD630F Model 6 8 10, 12 10 12 4, 6 8, 10 1/8 5/32 3/16 1/4 6, 8 6 Metric sizes Symbol JIS symbol 1/4 5/16 3/8 Tubing O.D. 3/16 1/4 Inch sizes 1/4 5/16 3/8 3/8 19.8 flow Flow rate l/min (ANR) {Nl/min} 1200 1300 175 295 350 600 9.1 700 75 500 Controlled (Free) Effective

3 Port Air Operated Valve Series SYJA300 1

M5 x 0.8 SYJA514-01 0.32 0.46 1.1 0.32 0.41 1.2 75 (Without subplate 45) Rc 1/8 N.C. Base mounted (with sub-plate) 0.34 0.48 1.2 0.33 0.37 1.3 N.O. SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O.

Pressure Relief 3 Port Valve With Locking Holes

Dimensions (1) Single action type VHS40~50 VHS30 VHS20 Unit (mm) Model Standard Specifications P1 P2 A B C D E F G H I J K L M VHS20 1/8, 1/4 1/8 66.4 22.3 40 37.5 14 46.6 33.6 28 43 24 4.5 14.8 9 VHS30 1/4, 3/8 1/4 80.3 29.4 53 49 19 52 38 30 49 30 4.5 19 9 VHS40 1/4, 3/8, 1/2 3/8 104.9 38.5 70 63 22 58 44 36 63 38 5.5 24 10 VHS40-06 3/4 1/2 110.4 42 75 63 22 58 44 44 63 43 5.5 26 10 VHS50

Electro-Pneumatic Positioner

D. 9 to 11:P368010-27 At accessory H: (with external scale plate) 100 44 46 IP8100-01 (With terminal box) OUT2.Rc1/4 110 38 192 251 110 40 35 58 218 OUT1.Rc1/4 SUP.Rc1/4 23.5 43 23.5 38 39 11 9 39 OUT2 MPa 0% 50 42 20 162 117 25% MPa 65 A 15 122 ELECTORO PNEUMATIC IP8100 P O S I T I O N E R DA 50% 22.5 75% 100% 125 View A 12 168 8 2 x M8 x 1.25 depth12 Female thread for side mounting 2 x

/ 87 mm, Width: 1.18 in / 30 mm, Height: 2.95 in / 75 mm, Net Weight: .49 lbs. / .22 Kg Series Configured Datasheet.

Thomas Oil-less Diaphragm Vacuum Pump Flow Rate: 8.2 LPM , 8.2 LPM, Max Vacuum: 23.3 in HgV / -790 mbar , 23.3 in HgV / -790 mbar, Voltage (DC): 12, DC Motor Type: Low Cost, Item Dimensions: Length: 3.43 in / 87 mm Width: 1.18 in / 30 mm Height: 2.95 in / 75 mm , Length: 3.43 in / 87 mm, Width: 1.18 in / 30 mm, Height: 2.95 in / 75 mm, Net Weight: .49

Thomas Oil-less Diaphragm Compressor Flow Rate: 7.8 LPM , 7.8 LPM, Max Pressure: 14.5 PSIG / 1000 bar , 14.5 PSIG / 1000 bar, Voltage (DC): 24, DC Motor Type: Standard, Item Dimensions: Length: 3.43 in / 87 mm Width: 1.18 in / 30 mm Height: 2.95 in / 75 mm , Length: 3.43 in / 87 mm, Width: 1.18 in / 30 mm, Height: 2.95 in / 75 mm, Net Weight: .49 lbs.

Thomas Oil-less Diaphragm Vacuum Pump Flow Rate: 11 LPM , 11 LPM, Max Vacuum: 23.3 in HgV / -790 mbar , 23.3 in HgV / -790 mbar, Voltage (DC): 12, DC Motor Type: BLDC, Item Dimensions: Length: 3.43 in / 87 mm Width: 1.18 in / 30 mm Height: 2.95 in / 75 mm , Length: 3.43 in / 87 mm, Width: 1.18 in / 30 mm, Height: 2.95 in / 75 mm, Net Weight: .49 lbs. /