ZSE3/ISE3

Detaching To detach a socket from connector, pull out lead wire while pressing the socket's hook with a stick having a thin tip (about. 1 mm). If the socket will be used again, first spread the hook outward. Pressure exceeding 0.5 MPa is being applied. (The pressure over rated pressure is being applied in case of positive pressure.) Reset the supply pressure less than 0.5 MPa.

Air Cylinder: Standard Type Double Acting, Single Rod Series CJ2 ø6, ø10, ø16 How to Order Bore size 6 6 mm Built-in Magnet Cylinder Model 10 10 mm Suffix the symbol “-A” (Rail mounting style) or 16 16 mm “-B” (Band mounting style) to the end of part Mo

When D-A9(V)/M9(V)/M9W(V) types are mounted on a 10 or 16 rail, order auto switch mounting brackets separately.

5.0 MPa Pilot Operated 2 Port Solenoid Valve Series VCH40

: No malfunction resulted in an impact test using a drop impact tester.

Series VXK21/22/23 Direct Operated 2 Port Solenoid Valve with Built-in Y-strainer For Air/Single Unit How to Order (Single Unit) Specifications 2 21 01 1 G 0 R 1 VXK AC 0 2 21 01 1 G 5 VXK DC Model Bracket Orifice size Refer to the Table (1) None Nil Fo

Refer to page 14 for ordering a coil only. DIN type is available with class B only. Refer to the Table (3) for the available combinations between each electrical option (S, L, Z) and rated voltage. Option S, Z are not available because a surge voltage suppressor is integrated into the AC/Class B, built-in full-wave rectifier type as a standard.

Speed Controller with One-touch Fitting Stainless Steel Series Elbow Type/Universal Type Series AS-FG

(2) Model d T Weight (g) H D1 D2 L1 L2 L3 L5 (1) A (2) D3 L4 Max.

AS

Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.

FHIA

N.C. and N.O. common A differential pressure indicator or a differential pressure indication switch can be selected, and mounted on all filter models. Differential pressure indicator Operating pressure20 kPa Once a value is displayed, it will continue to be displayed until reset, even if the pump is stopped.

5 Port Pilot Operated Solenoid Valve Series VFR2000 Rubber Seal, Plug-in/Non Plug-in How to Order Option Port size (P, A, B port) Thread type Electrical entry Rc Nil Nil Nil None Without sub-plate F: Plug-in type 01 1 8 F Z G With light/surge voltage supp

Series VFR2000 5 Port Pilot Operated Solenoid Valve Rubber Seal, Plug-in/Non Plug-in How to Order F: Plug-in type Electrical entry Option Port size (P, A, B port) Thread type Nil F G Rc Nil Z None Nil 01 Without sub-plate 1 8 1 4 With light/surge voltage suppressor 02 N NPT Piping (P, A, B, EA, EB port) T NPTF EA, EB port: Rc 1/8 Nil B Side ported Bottom ported Option SJ 1 00 01 F Plug-in

Space Saving Vacuum Ejector Series ZQ [Option] Note) CE compliant: For DC only.

Symbol Applicable tubing O.D. q Cannot be used for vacuum retention. w Use a release valve. (Without a release valve, a workpiece may not be released.) CE marked Manifold Without port Nil 0 2 3 5 Without fitting (M5 x 0.8) Note) CE compliant: For DC only.

PFxx-OMO0007CN

L/min) b(L/min) PF2A710 A 1 10 PF2A750 B 5 50 PF2A711 C 10 100 PF2A721 D 20 200 PF2A751 E 50 500 -37No.PF-OMO0007CN PF2A710/750 PF2A711/721/751 -38No.PF-OMO0007CN ()ZS-37-A (L )ZS-37-B ZS-29-T -39No.PF-OMO0007CN NPN(1 ) + (15 V) NPN(1 ) + (420 mA) PNP(1 ) + (15 V) PNP(1 ) + (420 mA) 10 PF2A7 NPN(1) + (15 V) PF2A7--28--X560 PNP(1) + (15 V) PF2A7--68--X560 NPN(1) + (420 mA) PF2A7--29

ZMA

Vacuum pressure switches There will be no change in performance if a pressure of approximately 0.5 MPa is applied momentarily (when releasing vacuum), but care should be taken that pressures of 0.2 MPa or more are not applied on a regular basis. Operating Environment Warning 1.

Thermo-chiller Series HRZ Fluorinated Fluid Type

Rated current (A) Alarm Communications 5/5 6/6 15/22 18/23 3/4 5/6 9/10 13/14 6/7 13/14 Rc 1/2 Stainless steel, EPDM, Copper brazing (Heat exchanger), Silicone, Brass 3-phase 200 VAC 50 Hz, 3-phase 200 to 208 VAC 60 Hz Allowable voltage fluctuation 10% 20 14 30 23 30 20 25 60 46 Refer to page 94.

Digital Flow Switch Series PFMB7 2-Color Display ® (200 L type only)

2-Color Display (200 L type only) Digital Flow Switch Series PFMB7 RoHS How to Order PFMB7 201 C8 A M Type Calibration certificate Note 1) Integrated display 7 None With calibration certificate Nil A Rated flow range (Flow rate range) Note 1) Certificate in both English and Japanese Made to Order 2 to 200 L/min 201 Flow adjustment valve Unit specifications Nil S None Yes Unit selection function

3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9BW Number of auto switches Mounting bracket Nil A B L F G D Both ends tapped 2 pcs.

® SEMI Thermo-chiller Series HRW Fluorinated Fluid Type

/200 to 208 VAC 10% Max. operating current (A) 26 Breaker capacity (A) 30 Communications Serial RS-485 (D-sub 9 pin) and Contact input/output (D-sub 25 pin) Dimensions Note 9) W15 in (380mm) x D26.2 in (665mm) x H33.9 in (860 mm) Weight Note 10) Approx. 220 lbs (100 kg) Approx. 198 lbs (90 kg) Safety standards UL, CE marking, SEMI (S2-0703, S8-1103, F47-0200), SEMATECH (S2-93, S8-95) Note

ZL112A

For other output options, 4 core lead wire is included. 4 A

New Concept Connector type manifold SV Series

VQC1100 10ms2ms: 200 million cycles VQC2100 20ms2ms: 200 million cycles VQC4100 17ms3ms: 100 million cycles SV VQC Refer to catalog for details.

Air Tank Series AT 1

Please keep it in a safe place.

Thermo-Chiller with a water-cooled refrigeration system.Features · With a high temperature stability of ±0.5°C due to a precise temperature control method that uses an expansion valve and a temperature sensor.· With a compact tank.· Power supply: Three-phase 200 V AC (50 Hz) / Three-phase 200 to 230 V AC (60 Hz).· Set temperature range: 5 to 35°C · Maximum ambient operating temperature: 45

The HRZ series thermo-chiller is a high performance device for circulating fluid with a constant temperature. Available in 3 temperature range designs so the best chiller can be selected for operating temperature needs.