High Precision Stroke Reading Cylinder Non-rotating Piston Type CEP1 Series ø 12, ø 20 Note) CE-compliant: When connecting to a multi-counter (CEU5  -D, power supply voltage 24 VDC). Refer to the multi-counter operation manual for details. Note)

Consult with SMC regarding water resistant types with the above model numbers. 2 1 m type lead wire is only applicable to D-A93. Solid state auto switches marked with are produced upon receipt of order.

Rotary Table: High Precision Type Vane Style Series MSUA Size: 1, 3, 7, 20 How to Order Connection port location Side ported Nil Bearing type Axial ported E High precision type A Available with side ported Free mount type only, when equipped with auto s

D-LC05: Lead wire 0.5 m D-LC30: Lead wire 3 m D-LC50: Lead wire 5 m Rotation adjustment range Single vane: Both ends 5 each Vane type Auto switch S Single vane Nil Refer to the table below for the applicable auto switch model. Without auto switch (built-in magnet) Applicable Auto Switch/Refer to pages 761 to 809 for further information on auto swiches.

Lubricator Series AL10 to 60

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 14-2-63 Series AL10 to 60 Dimensions AL10 AL20 L D Bracket (Option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50/60 AL30/40 L D D L Port size Bracket (Option) Bracket (Option) G F G F Port size M K M K E J C B R

High Vacuum Slit Valve

one for C open and close) F D-sub connector (CDE-9PF05 : Hirose Electric Co.

Air Cylinder: Standard Double Acting, Single/Double Rod Series NCM

D-M9M and M9VM which lead wire length is 1 m are available from July, 2008. 2

Microspeed Cylinder: Double Acting/Single Rod Series CQ2X ø 32, ø 40, ø 50, ø 63, ø 80, ø 100 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Grease pack GR-L-005 (5g) GR-L-010 (10g) GR-L-150 (150g) 8

Microspeed Cylinder: Double Acting/Single Rod Series CUX ø 10, ø 16, ø 20, ø 25, ø 32 Dimensions and auto switch details are equivalent to those of the standard double acting single rod cylinder.

Port thread type (for 32) Nil TN TF Rc NPT G Action D Double acting M5 for 15 to 25.

Modular Type Lubricator Series AL

Note 3) Bowl assembly for AL30 to AL60 comes with a bowl guard (steel band material). 52 AL10 to 60 Dimensions AL10 AL20 L D Bracket (option) G F Port size K M A Port size C B R C J H OUT OUT IN OUT OUT IN B R P Min. clearance for maintenance Min. clearance for maintenance A AL50, 60 AL30, 40 L D D L Port size Bracket (option) Bracket (option) G F G F Port size M K M K E J C B R C B R H

Compact Electro-pneumatic Regulator Series ITV0000

D side 1 2 3 ...

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

4 Way 4 and 5 Port Rubber Seal Solenoid Pilot Valve Series SYJ3000 Interchangeable with the NVJ Series Low Power Consumption: 0.5W Base Mounted/Body Ported Configurations Manifolds with Built-in One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Features & Benefits .4-5 Q Q Preferred Option Program .6 Q Specifications Q Valve .8 Manifold .9 Q Q How

(N)CQ2

Order them separately referring to Mounting Bolt for C(D)Q2B on pages 156 and 157. Large bore Note 8) Air-hydro not available with non-rotating rod (K). Note 7) Note 7) Stroke standard (pneumatic) Long stroke 5 10 15 20 25 30 35 40 45 50 75 100 125 150 175 200 250 300 Bore 12 16 20 25 32 40 50 63 80 100 125 140 160 180 200 Note 7) Only CQ2 is available with 180 and 200 bores.

HRX-OM-T002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-17 Connection of RS-232C HRS090 Series 3.3Installation 3-27 HRX-OMT002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Series 12-REA Sine rodless cylinder

I NB NB T N K W N S + Stroke F F NA R ZZ + Stroke 43 35 29 22 20.5 27.8 D Model Port size K NN B L MM x J N NA H 16 15 10 I 46 36 30 NB 19 17 17 T S 11 9 8 G ZZ 10 8 8 R 60 50 50 W 16 16 13 F 40 40 30 X 12-REA40 12-REA32 12-REA25 Rc, NPT, G 1/8 Rc, NPT, G 1/8 Rc, NPT, G 1/4 70 60 46 M26 x 1.5 M26 x 1.5 M32 x 2.0 21 17 15 50 40 34 19 15 13 150 124 111 182 156 137 92 80 70 M5 x 0.8 x 8 M6 x

D. P. Lube (Unit) Series ALD(U)600/900

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

Direct Operated Precision Regulator Series ARP20/30/40  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

VCHR 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVX c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Direct Operated Precision Regulator ARP20/30/40 Series  Sensitivity: Within 0.2% F.S.  Expanded lineup  ARJ 3 types of set pressure and the body size AR425  Energy saving, Air consumption: allow more freedom in designing a circuit. to 935 80% reduct

SRF 12 2 1 2 1 2 1 1 ITV 2 1 2 1 2 1 2 1 2 1 L 2 2 1 L L L IC AFM AF ARP AFM AF ARP 10 ITVH c Control a clamping force by precise pressure control. d Release residual pressure with the backflow function. Residual pressure circuit Also exhausts residual pressure completely. Sensitivity within 0.2% F.S. allows more precise pressure adjustment. Repeatability within 1% F.S.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

8 22 8 15 80 18 M6 x 1 20 40 36 M26 x 1.5 124 13 10 70 41 41.6 3 16 11 29 10 16 92 23 M6 x 1 26 50 46 M32 x 2 150 13 TF TN Nil P (Piping port) ZZ X W TT Model 12-REA25 12-REA32 12-REA40 50 Rc1/8 30 NPT1/8 137 G1/8 17 50 Rc1/8 40 NPT1/8 156 G1/8 19 60 Rc1/4 40 NPT1/4 182 G1/4 22 12-REA50/63 0 L0.2 33 B 2 x 4 x V Effective thread depth 16 2 x P (Piping port) 14 14 8 (R) D X Q Q 14.5 22 I 2

EX245-FPS1_2_3_eng

Red ON Power source From US2 Installation Pin allocation of M12 4-pins (D-code) Socket for EX245-FPS3 The operation manual is intended for those who have knowledge of machinery using pneumatic equipment, and have sufficient knowledge of assembly, operation and maintenance of such equipment. Only those persons are allowed to perform assembly, operation and maintenance.

PFxx-OMO0007CN

NPN(1 )+ (15 V) PF2A7--29--X560 NPN(1 )+ (420 mA) 22 PF2A7--68--X560 PNP(1 )+ (15 V) PF2A7--69--X560 PNP(1 )+ (420 mA) / ZS-37-A () 3 m 100 g ZS-37-B (L ) 3 m 100 g ZS-29-T 4 (312 ) 40 g -11No.PF-OMO0007CN (IN ) 1 DC(+) 2 OUT2 3 DC(-) (OUT ) 4 OUT1 INOUT (UP) (SET) (DOWN) LED (OUT1) (OUT2) (OUT1) LED (OUT1) OUT1 ON (OUT2) OUT2 ON (UP) ON/OFF (SET) (DOWN) ON/OFF -12No.PF-OMO0007CN D

XMH/XYH Series

Dimensions XMH series / Angled Valve C D L1 L2 A Fn Fc C (Fc) (CF Flange) (KF Flange) H J H B G A Unit:mm Table 5 Model A B C D Fn Fc G H J P.C.D L1 L2 XMH-16 40 100.5 38 1 30 34 17 35 18 P.C.D 27 6x4.4 XMH-25 50 114 48 1 40 26 41 21.5 XMH-40 65 162.5 66 2 55 70 41 57 30 P.C.D 58.7 6x6.6 XMH-50 70 179.5 79 2 75 52 70 35 XYH series / Straight Valve D G C C B H Fn J (KF Flange) 45 Unit: mm