Super Compact Direct Acting 2/3 Port Solenoid Valve Series S070

(Stacking base) Dimensions / Single unit (Base Mounted) 7 11 28 3 Specifications Poppet Valve construction Air, Inert gas Fluid Vacuum (1.33 x 102Pa) to max. operating press. (Refer to flow characteristics table below.)

Pressure Relief 3 Port Valve with Locking Holes VHS20/30/40/50

Port size Body size Thread size Port thread Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

Vacuum Ejector with Solid State Timer, Series ZMA

Ejector stations Port & silencer position 1 station 01 Right side Left side Both sides R L S 10 stations (Max.) 10 Note) Left and right as viewed with the VAC port in front Thread type Common exhaust port size 1/2 3/4 ZZMA dedicated silencer (ZZM-SA) 04 06 S Rc NPTF G Nil T F When placing an order, include the single type ejector models to be manifolded together with the manifold part

(g) Flow rate( /min (ANR))Effective area (mm2)Flow rate( /min (ANR))Effective area (mm2)AS1000-M5M5 x 0.8901.4801.26, 10, 16, 20, 2533

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: None (0°), Thread: R, Port Size: U10/32 (U10-32UNF), Width Across Flats: 9mm, Tubing: 01 (ø1/8")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 1 (Meter-in), Indicator Direction: None (0°), Thread: R, Port Size: U10/32 (U10-32UNF), Width Across Flats: 9mm, Tubing: 01 (ø1/8")

Body Size: 1 (M5 x 0.8, 10-32UNF), Type: 2 (Elbow), Control Type: 0 (Meter-out), Indicator Direction: 1 (180°), Thread: R, Port Size: U10/32 (U10-32UNF), Width Across Flats: 9mm, Tubing: 01 (ø1/8")

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa); Sub-atmospheric : 100mm Hg absolute to 10 psig (-88kPa to 0.07MPa)], Material: S (Body: 316L SS Secondary Remelt; Poppet: 316L SS; Diaphragm: Elgiloy™; Nozzle: 316L SS), Surface Finish: X [5 μin. (0.13 μm)], Range Options: Standard, Ports: 2PW [2 Ports (1-In; 2-Out)], Connections, Inlet: FV4 (1/4 Inch Face Seal, Female), Connections

Number of Ports: 3 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: None, Indicator: Z (w/Miniature Indicator)

Number of Ports: 2 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller), Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: None, Indicator: None

Number of Ports: 3 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: S (Hard Steel Roller), Indicator: None

Number of Ports: 2 Port, Piping Direct., Plunger Length: 3 (Bottom Ported, Short), Body Option: Side Mounting, Port Size: M5 (M5 x 0.8, Bottom Ported Only), Actuator Type: 01 (Roller Lever), Suffix: None, Indicator: None

Parallel Seal Type Slit Valve

Opening window size: 50 x 336 mm Valve type 1Insert type (Without body) 2Cassette type (Standard) 3Cassette type (Half MESC) Number of axes and seal type: One axis bellows Applicable water size: For 300mm wafer Table 1.

Vacuum Pad with Ejector

A Mounting part (1) Fixed PD port 3 Guideline of PD port 1 PD port 2 tightening torque 3 to 5 [N-m] (5) Recommended One-touch fitting to be mounted at the PD port is the KQ2S06-01[]S or KQ2S07-34[]S. One-touch fitting may interfere with the top surface of the pad depending on the fitting dimensions.

S Couplers

Tube deformation ratio at the minimum bending radius = L D 2d 1 x 100 Mandrel Here, : Deformation ratio (%) d : Tube O.D.

Water Separator Series AMG Please refer to page 14-20-62 for specific product precautions. 1

Made to Order Specifications (For details, refer to page 14-20-55.) 01 B 06 B 1 8 3 4 1B 02 03 10 14 B 1 4 B 3 8 04 B 1 2 Note) Refer to How to Order Bowl Assembly on page 14-20-59. 1 B 1 2 20 2B Caution Accessory/Option Combinations Available Not available Depends on model Be sure to read before handling.

Size: 01(Size 26mm), Stations: 2 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -

Size: 01(Size 26mm), Stations: 2 Stations, A, B Port: Side, 3/8, Port Thread: NPTF, SI Unit: Serial Kit for DeviceNet™, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: -, X Option: -, CE Compliant: -

Size: 01(Size 26mm), Stations: 3 Stations, A, B Port: Side, 3/8, Port Thread: F [G (ISO1179-1 G Threads)], SI Unit: AS-i, 4 In/Out, 2 Power Supply Systems, End Plate: w/o SI Unit/End Plate, SI Unit COM: -COM, Number of Input Blocks: w/o Input Block, Type of Input Block: w/o Input Block, Input Block COM: PNP or w/o SI Unit/Input Block, Silencer: None, X Option: X1, CE Compliant: -