Series 10-, 21- AW-B Filter Regulator

8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x 1.5 M42 x 1.5 M42 x 1.5 26 29.4 37.3 37.3 43.3 Note) The dimension of C is the length when the filter regulator knob is unlocked. 1082 A

Lubricator Series AL10 to 60

Body size 10 20 30 40 50 60 AV Thread type AU Metric thread (M5) Rc NPT G Nil AF N F AL20 Port size AR Body size Symbol Port size M5 1/8 1/4 3/8 1/2 3/4 1 10 20 30 40 50 60 (2) IR M5 01 02 03 04 06 10 Accessory When more than one specification is required, indicate in alphanumeric order. Note 2) For M5 and NPT thread types.

MQQ

1 !6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

AMP

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model Maximum flow capacity l/min (ANR) 1000 200 500 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 0.43 0.68 Weight kg Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less Ambient and fluid temperature 5 to 50C Filtration degree

D. P. Lube ALD600/900 Series

1 1 B P 1 4 1 2 2 1052 D.

MQQ

1 !6 !2 Material Note Component Parts No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !

AMPSeries

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

Exhaust Cleaner for Clean Rooms AMP Series

Thread type Rc NPT G Nil N F Port size Body size 4 Port size 3 Symbol 2 02 03 04 06 1/4 3/8 1/2 3/4 Models AMP220 AMP320 AMP420 Model 1000 (35) 200 (7) 500 (17.5) Max. flow capacity l/min (ANR)(SCFM) 1/2, 3/4 1/4, 3/8 3/8, 1/2 Port size (nominal size B) 1.15 (2.54) 0.43 (0.95) 0.68 (1.50) Weight kg (lb) Specifications Fluid Compressed air Element upstream pressure 0.1MPa or less (14.5 psi

VFRA3000, 4000 Series

They are all important notes for safety and must be followed in addition to International Standards (ISO/IEC)*1) , and other safety regulations. *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218-

Precision Cylinder Series MTS

Material Note 2 Clear anodized Aluminum alloy 1 8 15 Bumper Urethane 1 Clear anodized Aluminum alloy 1 12 to 40 16 Key 1 Aluminum alloy 1 Hard anodized Carbon steel 2 Aluminum alloy 1 Chromated 8: Nickel plated 17 C type snap ring for hole Carbon tool steel 1 Aluminum alloy 1 Chromated 12 to 40: Nickel plated 18 19 20 21 22 23 Magnet Plug 1 1 Stainless steel 8: Quenched 6 Spline rod 3 1 Carbon

AMD

AMD150 AMD250 AMD350 AMD450 AMD550 AMD650 AMD850 Model Note) 200 500 1000 2000 3500 6000 12000 Rated flow (l /min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note) Max. flow capacity at a pressure of 0.7 MPa. Max. flow varies depending on operating pressure.

Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 Port size (Nominal size B) 1/8, 1/4, 3/8 1/4, 3/8, 1/2 3/8, 1/2, 3/4 1/2, 3/4, 1 31/2, 1 1, 11/2 11/2, 2 Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Standing Style/Model Model AMD1000 Rated flow (l/min(ANR)) 8000 AMD800 24000 AMD900 40 Port size (Nominal size B) 2B Flange 2B

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

8 04 1 2 B 11 2B B 20 2B B Options Precautions Be sure to read before handling.

VHS20/30/40/50

Port size Body size Thread size Thread type Symbol N F Rc NPT G 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 An interface part is required if a spacer or spacer with bracket shown in the table below is attached to a modular FRL.

VER2000/4000

) ARX20 VER2000-A VER4000-A 1 2 Additional stations of solenoid valves 0 station Circuit (Basic unit: DXT334-X7 ) 1 2 VCHR Nil ITV 8 8 stations Ordering example DXT334-X711-04R-04U 1 pc.

Main Line Filter

PART NAME QTY AFF75A AFF125A AFF150A AFF220A 1 CASE 1 2 COVER 1 3 GASKET 1 AL-33S AL-34S AL-35S ELEMENT (for FILTRATION RATING Symbol Nil ) 1 EC700-003N EC800-003N EC900-003N 4 ELEMENT ( for FILTRATION RATING Symbol X13 ) 1 EC700-X30NX0 EC800-X30NX0 EC900-X30NX0 5 HEX.BOLT(M12) 12 6 SPRING WASHER 12 7 PLUG(1/4) 2 8 PLUG(1/4) 2 -6- FGX-OM-P003-A 3.Specifications 1How to Order Filtration rating

3/5 Port Solenoid Valve

Mounting Warning 1. Operation Manual (this document) In the case of diodes, the residual voltage is approximately 1 V. 4.

VFR5000 Series

Worn coil Low line voltage (1) 12 VFR5000OMA0001B REMEDY No.

Regulator Valve

When screwing the piping or fitting into the valve, tighten it as follows. 1) When using SMC's fitting, follow the procedures below to tighten it. Connection thread: M5 First, tighten by hand, then use a wrench appropriate for the hexagon flats of the body to tighten an additional 1/6 to 1/4 turn.

Square Tube Type Air Cylinder Series MB1

8 Rc(PT)1/4 Rc(PT)1/4 Rc(PT)3/8 Rc(PT)3/8 Rc(PT)1/2 Basic type, Foot type, Front flange type, Rear flange type Single clevis type, Double clevis type Mounting bracket Note) When there is no air cushion, the unit is equipped with rubber bumpers.