Modular Design with Uniform Body Style V1 V2 AC20-V-D 1/8, 1/4 1/8 1/8 169.6 87.6 48.5 41.6 60 21 2 30 43.2 24 33 5.5 11.5 3.5 29 38 AC30-V-D 1/4, 3/8 1/8 1/4 224.6 115.4 55 30 55.1 80 26.5 3.5 41 57.2 35 7 14 6 42.5 42.5 AC40-V-D 1/4, 3/8, 1/2 1/8 3/8 295.6 147.1 69.7 38.4 72.6 110 35.5 50 75.2 40 55 9 18 7 50 65 AC40-06-V-D 3/4 1/8 1/2 315.6 149.1 71.7 38.4 77.6 110 35.5 50 80.2 40 55 9 18 7 50 65 AC50-V-D 3/4, 1 1/8 1/
6 3.5 22.5 25 11 9.5 0.5 11 9.5 2.5 11 9.5 27 7 5.5 3.5 [1] 7 5.5 24.5 6.5 5 33 DNote 1) [ ]: Denotes the dimensions of the D-A93.
Note) D: Max. diameter 7 8.4 12.7 15.3 13.2 15.2 13 M5 x 0.8 3.2 2.7 15.4 R 1 8 10
Digital unit Analog unit 1 2 3 4 5 6 7 8 Valve stations I/O unit stations 1 2 Note) Serial transmission kit VV5QC11-08C6SD6Q2N2 1 set Manifold base part number VQC1100N-51 2 sets Valve part number (Stations 1 to 2) VQC1200N-51 5 sets Valve part number (Stations 3 to 7) VVQ1000-10A-1 1 set Blanking plate number (Station 8) EX600-DXPD 1 set I/O unit part number (Station 1) EX600-
1 !0 @1 r t e u y @0 q @2 @4 @8 @9 !3 !8 !7 #0 @6 o @3 w @7 !5 @5 !4 REBR15 Component Parts No. Description Body No.
M3 x 0.5 4.5 M5 x 0.8 26 68 8 80 9 38 4 REAR15 18 21 25 18 54.5 4.3 M4 x 0.7 6 M5 x 0.8 32 84 7 98 14 53 5 REAR20 17 20.5 40 22 64 5.6 M4 x 0.7 7 Rc 1/8 38 95 7 107 11 62 5 REAR25 20 21.5 40 28 72 5.6 M5 x 0.8 6.5 Rc 1/8 43 105 7 117 15 70 6 REAR32 26 24 50 35 79 7 M6 x 1 8.5 Rc 1/8 54 116 7 130 13 76 7 REAR40 34 26 60 40 93 7 M6 x 1 11 Rc 1/4 64 134 7 148 15 90 8 10-2-22 22 Sine Rodless
Monthly check . 7-4 7.2.3 Inspection every 3 months . 7-5 7.2.4 Inspection during winter season . 7-7 7.3 Consumables . 7-7 7.4 Operation Stop for an Extended Period of Time . 7-8 7.4.1 Discharge of the circulating fluid . 7-8 7.4.2 Discharge of the facility water (Water-cooled type) . 7-9 Chapter 8 Documents . 8-1 8.1 Specifications . 8-1 8.1.1 HRSH100/150/200/250/300-A-20. 8-1 8.1.2 HRSH100
6.1 Option M [DI water (Pure water) piping] . 6-1 6.1.1 Option M [DI water (Pure water) piping] . 6-1 6.2 Option J [Automatic fluid filling] . 6-2 6.2.1 Option J [Automatic fluid filling] . 6-2 Chapter 7 Alarm indication and trouble shooting . 7-1 7.1 Alarm Display . 7-1 7.2 Alarm buzzer stop . 7-3 7.3 Troubleshooting . 7-4 7.3.1 Alarm contents, causes and remodies . 7-4 7.3.2 How to release
Combination 4 Types Combination of Applicable Chart C59 -X6 -X16 -X16 -X16 C62 C8 C10 -X6 C30 -X10 C61 A2 A24 A24 C11 C60 C32 A1 A2 A13 A14 A15 A14 Chart 1, 2, 7 Chart 1, 2, 3, 8 Chart 1, 3, 9 Chart 2, 3, 7, 8 Chart 2, 3, 8, 9 Chart 2, 7 Combination is available only when all the conditions are fulfilled in above combination chart.
Combination 4 Types Combination of Applicable Chart C59 -X6 -X16 -X16 -X16 C62 C8 C10 -X6 C30 -X10 C61 A2 A24 A24 C11 C60 C32 A1 A2 A13 A14 A15 A14 Chart 1, 2, 7 Chart 1, 2, 3, 8 Chart 1, 3, 9 Chart 2, 3, 7, 8 Chart 2, 3, 8, 9 Chart 2, 7 Combination is available only when all the conditions are fulfilled in above combination chart.
LB B-phase pulse detector (Differential line driver) 17 LBR Z-phase pulse detector (Differential line driver) 8 LZ 18 LZR Control common 11 LG Analog monitor 1 4 MO1 1 LG Servo system controller Analog monitor 2 14 MO2 SSCNET III optical cable Note 5) CN1A (Option) Plate SD 2 m or less SW1 CN1B SW2 Note 7) 1 2 Note 1) PE LECSS Note 6) (Axis 2) CN1A SW1 CN1B SW2 Note 7) 1 2 SSCNET III optical
To order connector cable only Conventional type Connector dimensions (Ground) 4 (Orange) Manual override Brown: 1Blue: 3 + B 9 A 1 3 Black: 4 Interface 33.9 L 35 10 Cable length (L) Part no. Pilot valve (10-SY114) Adapter plate 300mm V100-49-1-2 V100-49-1-1 500mm 1000mm 2000mm 5000mm V100-49-1-3 V100-49-1-4 V100-49-1-7 22 33.9 14 704
8 / 3 S 6 3 7 0 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 6 1 . 1 ) 5 . 9 2 ( 4 2 . 1 ) 5 . 1 3 ( 7 3 6 1 . 1 ) 5 . 9 2 ( 8 3 . 1 ) 5 3 ( 1 9 . 0 ) 3 2 ( 8 2 . 0 ) 7 ( 4 / 1 S 5 3 1 1 T R K 1 1 / 6 1 ) 6 4 . 7 1 ( 9 8 . 0 ) 7 . 2 2 ( 7 6 . 0 ) 7 1 ( 0 1 . 1 ) 8 2 ( 2 3 8 / 3 S 6 3 1 1 T R K 4 2 . 1 ) 5 . 1 3 ( 4 4 . 1 ) 5 . 6 3 ( 1 4 8 / 3 2 / 1 S 7 3 1 1 T R K 7/8 ) 3 2 . 2 2 ( 0 4 . 1 ) 5 . 5 3 (
Precautions Lead wire Oil resistant vinyl heavy-duty cord, 3.4, 0.2 mm2, 2 cores (Brown, Blue), 0.5 m Note 1) Regarding the common specifications of the solid state switches, refer to page 10-20-7. Note 2) Regarding the lead wire length, refer to page 10-20-7. 1. Confirm that the connector is appropriately tightened.
Precautions Lead wire Oil resistant vinyl heavy-duty cord, 3.4, 0.2 mm2, 2 cores (Brown, Blue), 0.5 m Note 1) Regarding the common specifications of the solid state switches, refer to page 9-15-7. Note 2) Regarding the lead wire length, refer to page 9-15-7. 1. Confirm that the connector is appropriately tightened.
8 5 16 18.5 6 1 2 1 2 3 8 21 7 Tube Cap: KQ2C Applicable tubing O.D.
6.1 Before returning the product . 6-1 Chapter 7 Appendix . 7-1 7.1 Outline Dimensions . 7-1 7.1.1 Liquid Tank .7-1 7.1.2 Controller.7-1 TOC-2 A_HEC-OM-J004-4 Table of Contents 7.2 Specifications . 7-2 7.3 Specifications of Connectors . 7-5 7.3.1 Connection of Liquid Tank and Controller . 7-5 7.3.2 Connection of Power Supply Cable . 7-6 7.3.3 Connector for External Equipment. 7-7 7.4 Communication
13.5 10.5 13.5 11 17.5 14.5 11.5 7 1 8 15.5 2.5 1 4 1 8 10 6 5 32 16 3 1 4 10 Applicable tubing 1 8 1 4 7 3 16 16 3.5 9 1 8 14.29 12.7 9 1 4 3 8 1 4 17 4.6 11 17.46 16 1 8 15.5 20.5 12 14.29 1 4 3 8 5 16 18.5 6 9 13.5 17.46 16 Connection thread 1 4 19 17.46 22 28 3 8 1 2 3 8 21 7 16 14 22 22.23 30 22.5 24 28.5 30 1 4 33 9 3 8 1 2 22.23 22 9.6 30 1 2 17 25 28 Reference dimensions after Uni
(Not applicable to Gateway Unit) Connector type manifold Connector Wiring Diagram (Mixed wiring) 6 A 4 A 3 A 1 A 5 B 2 B Output The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing manifold configuration. 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 5 6 7 8 9 10 All kits use multi-pin connectors