High Vacuum Angle Valve C B L (mm) Grommet (G) A B C D E F G J K L M Model XLS-16-G XLS-16-C XLS-16-D XLS-16-T XLS-25-G XLS-25-C XLS-25-D XLS-25-T XLS-16-PG XLS-25-PG 104 25.5 113 41 40 38 30 35 17 23 Cabtire cable VCTF2 x 0.75, O.D.: 2.3 mm, Sheath O.D.: 6.6 mm 96 60 48 129 95 62 28 128.5 121.5 138.5 43 50 48 40 40 26 25.5 63 51 120.5 121.5 154.5 97 66 40 38 30 35 17 23 96 113 87 66.5 50 48 40 40 26
) Bore (in) MM KK A AA AB AE AH AL AO AT B BA C D DD E EA EE F G J S WF Y P LF SA XA ZA 150 (1.5) 5/8 7/16-20 3/4 2.02 3/8 2 3/16 1 3/16 1 7/16 1/8 1 1/8 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 3/8 1.26 1.1 1 1/4 1 1.71 2.36 3 5/8 6 5 5/8 6 1/16 200 (2) 5/8 7/16-20 3/4 2.6 3/8 2 11/16 1 7/16 1 9/16 1/8 1 1/8 1 1/8 3/8 9/16 5/16-24 2.5 0.3 3/8 3/8 1.26 1.06 1 3/4 1 1.71 2.4 3 5/8 6 5 5/8 6 3/16 250
n 4) 2 (n 4) 2 (n 4) 2 20 + 55 115 + 55 130 + 55 140 + 55 125 + 55 150 + 55 D-A59W n (n = 2, 4, 6, 8) Note 3) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) (n = 4, 8, 12, 16) Note 4) Different surfaces same surface 15 75 2 110 125 135 115 145 D-G5/K59 D-G5W D-K59W D-G59F D-G5BA D-G5NT D-B5/B64 (n 4) 2 15 + 50 (n 2) (n = 2,
Q8W Both ends tapped NC(D)Q8WA-(C)(M) Symbol Bore O1 R R R O1-Thread 056(9/16") 075(3/4") 106(1 1/16") 150(1 1/2") 200(2") 250(2 1/2") 300(3") 400(4") #4-40UNC 0.34 #6-32UNC 0.34 #6-32UNC 0.50 #10-24UNC 0.50 #10-24UNC 0.53 1/4-20UNC 0.65 1/4-20UNC 0.69 5/16-18UNC 0.84 Note) Fully threaded tap for 012 stroke Screw clearance hole front mount/NC(D)Q8WE 4-E Symbol Bore E B 056(9/16") 075(3/4"
32 3 16 1 4 5 16 3 8 9 16 -18 9 16 -18 3 4 7 8 1-12 1-12 -14 -16 1 2 28.6 22 28.6 9.6 26 Plug: KQ2P, KQP Fitting size d (inch) Part No.
17 14.5 12 16 13.5 17 14.5 12 16 13.5 17 14.5 16 12 14.5 17 13.5 16 12 55 Series SJ2000/3000 Dimensions SS5J3-60U (S, R, RS) Stations (Pitch) P = 10 23.6 12.8 [External pilot spec.] 15.4 15.6 3/5 3/5 2 2 2 2 2 2 2 30.6 32.1 46.2 54.5 1 1 58.2 4 4 4 4 4 4 4 D D D D One-touch fitting [1(P), 3/5(E) port] M5 x 0.8 [4(A), 2(B) port] Applicable tubing O.D: 8, 5/16" One-touch fitting 20.5 6.2 One-touch
) DeviceNet System OMRON Corp.: CompoBus/S (16 outputs) OMRON Corp.: CompoBus/S (8 outputs) CC-LINK Max.16 stations 16 Note) 16 stations D Note 3) Note 1) Refer to page 56 for details.
Note 3) Includes the number of blanking plate assemblies. t Kit type Symbol Protocol Number of outputs Communication connector S Kit (Serial transmission kit (for Output)) SD0 SQA SQB SNA SNB SNC SND SVA SVB SDA SDB SFA SFB SEA SEB Without SI unit 32 16 32 16 32 16 32 16 32 16 32 16 32 16 M12 DeviceNet SI unit M12 PROFIBUS DP D-sub Note 1) M12 CC-Link M12 Note 1) D-sub S kit: IP40 specification
1 D side VS4 16 stations 16 Max. 16 stations.
12, 16)2 D-A59W 1 60 70 85 110 115 120 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 2 (Different surfaces, same surface) 1 80 85 90 95 100 n 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 90 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 100 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 60 65 70 75 85 D-Y69 D-Y7PV D-Y7WV n 60 +
) WF + Stroke D across falts D across falts R 6-AB (Hole) LD + Stroke SL + Stroke R TA AO D C B AL AH AE AB AA A KK Bore size (in) MM DD WF S K G EE EA E ZM SL LD P Y 150 (1.5") 5/8 1.43 1/8 7/16 9/16 3/8 1 1/8 1 1 3/16 2 3/16 3/8 2.02 3/4 7/16-20 1/4-28 1 1 1/4 0.28 1.26 3/8 0.3 2 5.78 5.78 3.78 2.36 1.71 200 (2") 5/8 1.84 1/8 9/16 9/16 3/8 1 1/8 1 1 7/16 2 11/16 3/8 2.6 3/4 7/16-20 5/16
D across flats D across flats NCA D-X Stroke A Stroke B SN + Stroke (A + B) 4-NT Depth ND 20LD + Stroke (A + B) Data ZZ + Stroke (A + B) Bore size (in) MM KK A AA B C D DD E EA EE G K R WF Y LD P PC ZZ SN 150 (1.5") 5/8 7/16-20 3/4 2.02 1 1/8 3/8 9/16 1/4-28 2 0.3 3/8 1.26 9/32 1.43 1 1.71 7.44 2.36 1.30 9.44 5.56 200 (2") 5/8 7/16-20 3/4 2.60 1 1/8 3/8 9/16 5/16-24 2 1/2 0.3 3/8 1.26 11
13 14 1 ZPY16CT 16 17 Dimensions of D, E are the same.
8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 n = 4, 8, 12, 16 1 60 110 85 115 120 70 120 130 2 (Different sides or Same side) D-F5 D-J5 D-F5 W D-J59W D-F5BAL D-F59F 110 115 120 95 90 (n4) 2 110 + 55 (n4) 2 (n4) 2 115 + 55 (n4) 2 120 + 55 (n4) 2 (n4) 2 90 + 55 130 + 55 95 + 55 n = 4, 8, 12, 16 n (Same side) n = 4, 8, 12, 16 n = 4, 8, 12, 16
(different surfaces/same surface) 120 120 130 140 D-F5W, J59W D-F5BA D-F59F D-F5NT 15 140 + 55 (n 4) 2 (n 4) 2 (n 4) 2 (n 4) 2 15 + 55 (n 2) 2 120 + 55 120 + 55 130 + 55 "n" pcs. (same surface) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 4, 8, 12, 16 )Note 2) (n = 2, 4, 6, 8 )Note 1) (n = 4, 8, 12, 16 )Note 2) Different surfaces 90 90 120 15 2 pcs. "n" pcs. 2 pcs.
Size Order no. 20 16 LE-D-2-7 25 LE-D-2-2 32, 40 LE-D-2-3 Replacement Parts/Grease Pack Applied portion Order no.
, 12, 16) (n = 4, 8, 12, 16) 15 90 100 110 120 1 2 (Different surfaces and same surface) 1 25 110 120 130 140 D-F5NT 25 + 55 (n 2) (n 4) 120 + 55 (n 4) 130 + 55 (n 4) 140 + 55 (n 4) 110 + 55 2 2 2 2 2 n (Same surface) (n = 2, 4, 6, 8) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) (n = 4, 8, 12, 16) Different surfaces 15 D-B5D-G5D-G5
16 32 16 32 16 32 16 M12 DeviceNet 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) 2 to 12 stations (24) 2 to 8 stations (16) VFS M12 PROFIBUS DP VFR D-sub Note 4) M12 CC-Link VQ7 M12 EtherCAT IP67 compliant
Technical data 595 Series CQSS Proper Auto Switch Mounting Position (Detection at stroke end) Non-rotating rod a) b) Mounting 16 to 25 12 a) b) Mounting D-A9 D-A9V Hs Hs D-M9 D-M9W D-M9AL D-M9V D-M9WV D-M9AVL Hs Hs Proper Auto Switch Mounting Position Auto switch model Bore size (mm) A B W B W A B A Hs Hs B A D-A9V D-M9V/M9WV/M9AVL D-M9/M9W D-A9 12 16 20 25 5.5 4.5 19.5 5.5 17 5.5 4.5 1.5