Compact Cylinder with Air Cushion Series RQ

50 12 Series RQ Auto Switches/Proper Mounting Positions and Height for Stroke End Detection 32 to 50 D-A7H D-A80H D-F7 D-J79 D-F7W D-J79W D-F7F D-F7NT D-F7BAL D-A7 D-A80 Approx.

VS7-6

Interface Speed Control Interface Regulator Bottom Piping 1.19-12 ISO Interface Solenoid Valve/SIZEw Metal Seal SeriesVS7-8 Single solenoid ( FG-S ) Double solenoid ( FG-D ) Reverse pressure (YZ-S) Reverse pressure (YZ-D) 2 position 3 position SV SY VS7-8-FPG-D Closed centre ( FHG-D ) Exhaust centre ( FJG-D ) Double pilot check ( FPG-D ) Pressure centre ( FIG-D ) SYJ VS7-8-FHG-D SX Option

180 ° Angular Type Air Gripper Rack & Pinion Type MHW2 Series ø 20, ø 25, ø 32, ø 40, ø 50

When auto switches D-M9/M9W/Y59 D-M9A D-Y7, Y7W are used A B L Auto Switch Hysteresis MHZ When auto switches D-M9V/M9WV/Y69 D-M9AV D-Y7V, Y7WV are used Auto switches have hysteresis similar to micro switches. Use the table below as a guide when adjusting auto switch positions, etc. MHF A B MHL L MHR MHK MHS Max.

3 Port Solenoid Valve/

Symbol M12 connector pin number Wiring specication G1/2 terminal number Wiring specication r w (32) (12) (11) q 12 11 (12) e w w (31) e (31) (11) r q 32 31 q e (32) r VP542(R)/742(R)-X536 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 1(P) 3(R) 1(P) 3(R) 1(P) Safety limit

3 Port Solenoid Valve/

M12 connector pin number G1/2 terminal number X X VP544(R)/744(R)-X538 Internal pilot External pilot External pilot/With check valve r (32) w (12) r (32) w (12) r (32) w (12) 2(A) 2(A) 2(A) (31) e (11) q (31) e (11) q (31) e (11) q 3(R) 3(R) 3(R) r (32) w (12) r (32) w (12) r (32) w (12) 3(R) (31) e (11) q 3(R) (31) e (11) q 3(R) (31) e (11) q 1(P) 1(P) 1(P) X X VP544(R)/744(R)-X555 Internal

1.1

Refer to page 12 for details.

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

High Purity Chemical Valve

LVD LVQ How to Order Manifold Base LQ1 LLC 2 A 02 11 S LVN Tubing size for P port and R side connection Body class Tubing size for P port and L side connection TL/TIL Body class Symbol Nil 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 L side, R side same

Rotary Table

Output Power Current Load Load Current Applicable voltage consumption voltage current leakage load drop D-M9N D-M9NV D-M9NW D-M9NWV NPN DC28V type or less At 10mA DC512 0.8V or 100A or Relay 10mA 40mA less less at PLC 24V or less or less IC circuit D-M9P D-M9PV D-M9PW D-M9PWV DC24V (4.5 to 28V) At 40mA 2V or less PNP type D-M9B D-M9BV D-M9BW D-M9BWV DC24V DC24V 2.5 to 4V 0.8mA or less (DC10

Air Pilot Operated

DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

A_HEC-OM-K001

I C o n s t a n t Function Sets integral time used for PID control/ M O D E < 1 5 0 s e c 5.5 How to operate 5-10 A_HEC-OM-K001-1.7 Chapter 5 Operation <6> D constant setting: Mode indication D Constant Default value: 0 sec. Setting range 0.0 to 99.9 sec. Indicated contents D constant (Derivative time) D Constant indicates that it is D constant setting mode.

5 Port Solenoid Valve SY Series

It is already built-in to the rectifier circuit. 50 60 110 VAC Hz [115 VAC Hz] 3 50 60 50 60 50 60 4 220 VAC Hz [230 VAC Hz] Electrical entry D With connector DIN terminal DC specifications of type D and DO is only available with 12 and 24 VDC.

MHL2

B C D E F G H 148 206 246 Model MHL2-40D MHL2-40D1 MHL2-40D2 80 138 178 188 246 286 288 406 486 116 174 214 348 466 546 72 130 170 12-4-13

VP300/500/700

) (D, Y) VS N.C.

Air Pilot Operated Series NVSA

DttEl{StOlts DIMENSIONS A I c D E F o H 1,1f a r.36 (34.5) 0.874 @.4 1.10 t?f .c, 0.51 02.9t 0./(!3 fl0.91 o.12 (10.7) 0.31 a.s, Mlmelers In Pargnlheseg A I c D E F o H 1.75 (44.4) 1.25 (31.7t 0.gi e5.3) 1.11 {28.9) 0.75 (1s.1)0.6t1 (16.

Electric Actuator with Integrated Guide Series LTF Series LTF Lead screw lead mm Mounting Series Guide type Motor type Model Page orientation Ground ball screw Rolled ball screw 6 10 6 10 LTF6 Page 60 to Horizontal 10 20 10 20 LTF8 Page 68 to Frame-type

P1 Control Circuit Power Supply Connector: CNP2 Accessory P2 Terminal name Function Function details P P C D Connect between P and D. (Connected at time of shipping.) If regeneration option is required for Model Selection, connect to this terminal.

LVQ

LVQ20 C A B D (Max.

ML2B

32 12 40 12 D-Z7/Z80 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

ML2B

32 12 40 12 D-Z7/Z80 6 D-Y59/Y69 D-Y7P/Y7PV D-Y7W/Y7WV 6 6 A B Since this is a guideline including hysteresis, not meant to be guaranteed.

KF

34.3 27.5 12 36 8 9 54 Plug: KFP Weight (g) 0.3 0.5 0.7 1.0 1.4 Applicable fitting (mm) Model L D KFP-04 KFP-06 KFP-08 KFP-10 KFP-12 12 12 12 13.5 14 6.5 8.5 10.4 13 15 4 6 8 10 12 15-2-51 Series KF Swivel Elbow: KFV H1 (width across flats) H2 (width across flats) H3 (width across flats) H4 (width across flats) Applicable tubing (mm) Effective area (mm 2) Connection thread R Weight (g) L2