ZMA Description q w e r t y Note Body Valve cover Adapter plate Cover Tension bolt Flow adjustment screw AMJ Misc. ZMA-HCB Electroless nickel plated Replacement Parts No. Description u i o !0 !1 !2 Part no.
Series: SS5Y3 (SY3000 Manifold), Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢, Version A), SI Unit Common, End Plate: 5 (Negative Common, 7/8" Connector), I/O Unit Stations: None, Valve Stations: 6 Stations, P,E Port, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), P, E Port Size: ø8 One-touch Fitting, Mounting: D
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, SOL, VALVE, VG/VGA VALVE, JA, VG BODY PT 1/2, 2.51925 lb
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, SOL, VALVE, VG/VGA VALVE, JA, VG BODY PT 1/2, 2.41038 lb
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, SOL, VALVE, VG/VGA VALVE, JA, VG BODY PT 1/2, 2.48966 lb
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, SOL, VALVE, VG/VGA VALVE, JA, VG BODY PT 1/2, 2.38571 lb
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, SOL, VALVE, VG/VGA VALVE, JA, VG BODY PT 1/2, 1.87000 lb
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, SOL, VALVE, VG/VGA VALVE, JA, VG BODY PT 1/2, 2.42508 lb
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, SOL, VALVE, VG/VGA VALVE, JA, VG BODY PT 1/2, 2.53531 lb
This is a legacy product. Please contact us for the latest version.sales@ocaire.com, VALVE, SOL, VALVE, VG/VGA VALVE, JA, VG BODY PT 1/2, 2.44712 lb
Series: SS5Y3 (SY3000 Manifold), Model: 10S (Side-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 5 Stations, Input Block Type, Common Spec: C (Positive Common, M8, 4 Inputs), Valve Stations: 8 Stations, P,E Port Location, SUP/EXH Assembly: E (Port Location D Side, Internal Pilot, Built-in Silencer), A, B Port Size: N7 (ø1/4" One-touch Fitting)
Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 1 Station, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 4 Stations, P,E Port, SUP/EXH Assembly: U (Port Location U Side, Internal Pilot), A, B Port Size: C8 (ø8 One-touch Fitting)
Model: 10S (Side Ported), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 4 Stations, Input Block Type, Common Spec: E (Negative Common, M12, 4 Inputs), Valve Stations: 8 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), A, B Port Size: N7 (ø1/4" One-touch Fitting)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: None, Input Block Type, Common Spec: A (Positive Common, M12, 2 Inputs), Valve Stations: 12 Stations, P,E Port, SUP/EXH Block Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø5/16" One-touch Fitting)
Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 2 (Positive Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø3/8" One-touch Fitting)
Model: 12S6 (Top-Ported, Serial Interface, EX600), SI Unit Specification: Q (DeviceNetâ„¢), SI Unit Common, End Plate: 4 (Negative Common, M12 Connector), I/O Unit Stations: None, Valve Stations: 16 Stations, P,E Port, SUP/EXH Assembly: B (Port Location Both Sides, Internal Pilot), P,E Port Size: N (ø3/8" One-touch Fitting)
Model: 12S (Top-Ported, Serial Interface), SI Unit Specification: Q (DeviceNetâ„¢), Input Block Stations: 2 Stations, Input Block Type, Common Spec: B (Positive Common, M12, 4 Inputs), Valve Stations: 10 Stations, P,E Port, SUP/EXH Block Assembly: C (Port Location U Side, Internal Pilot, Built-in Silencer), P, E Port Size: N (ø3/8" One-touch Fitting)
Dimensions Meter-out type Meter-in type F E D B A C J G K H L B Model A MIN. MAX. MIN. MAX.
The product should be operated after thoroughly reading the manual and understanding its contents. 530 Slit Valve XGT Series Construction i u w q !2 t !0 y r !1 OPEN o e CLOSE OPEN For 200 mm wafer For 300 mm wafer XGT22 XGT31 XGT22 (200 mm wafer type) Component Parts XLA No.
~~===rr-N"~e-_ ~~ =4It PNP, and analog output.