Step Motor Controller (Servo/24 VDC) Incremental / Battery-Less Absolute Encoder compatible

The response will be slower because of this. 43 - 7.3 Return to origin parameter The "Return to origin parameter" is the setting data for the return to origin operation.

Series MLGP

45.5 41 51.5 49.5 57 80 40 43 71.5 45 74 41 70 49.5 84 48 78.5 61 84.5 100 50 53 83 55 85.5 51 81.5 60 95 58 90 71 96.5 11-4.

Digital Pressure Switch

mode 24 Default setting 24 F0 Units selection function 26 F1 Setting of OUT1 27 F2 Setting of OUT2 30 F3 Response time 30 F4 Display resolution 31 F5 Auto-preset function 32 F6 Fine adjustment of display value 34 F7 Power saving mode 35 F8 Security code 36 Special function setting 37 F90 Setting of all functions 37 F97 Copy function 39 F98 Check of output 41 F99 Reset to default settings 43

MHF2

M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port DE-E Open: 321 2058 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43 Auto Switch Mounting Groove Dimensions 2-3H9 +0.025 0 depth 3 2.2 18 5.5 18 5.5 4 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 74 12-3-19 20 Series MHF2 Dimensions MHF2-16D2 4H9

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

MA MB MC MD ME NB 4.5 7.5 9.5 12 16.5 MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 M3 x 0.5 M4 x 0.7 M6 x 1 7.5 11 15 20 25 6 7 10 12 15 9 12.5 16.5 20 24.5 22 34 43.5 58 73 28 37 54 71 80 14.5 19 28.5 35.5 44.5 -X M8 x 1.25 20M10 x 1.5 M12 x 1.25 Data RE 12.5 14 22.5 26 33 RF RG SA SB 4 6 12 15 20 SC 1.4 1.8 2.2 2.8 3.4 Model MIW8-8 MIW12-12 MIW20-20 MIW25-25 MIW32-32 8.5 8 10.5 11 13 33 43

Transfer

43 FC 13 17 17 FF 6 6 6 FH 12 16 16 TA 7 12 12 TT Max. 16.5 Max. 20 Max. 25 Applicable cylinder ML2B25 ML2B32 ML2B40 D-X 717 ML2B Series Dimensions Side support A MY-SA 2 x G F E 2 x H A B C D Side support B MY-SB 2 x J A B C D A 61 70 87 B 75 84 105 C D E F G H J Part no.

CM2

Refer to p.0-39 to 0-43 for Safety Instructions and common precautions. This cylinder eliminates any influences of copper ions or fluororesins on color CRTs. Copper materials have been nickel plated or replaced with non-copper materials to prevent the generation of copper ions. Handling Warning qDo not rotate the cover.

CNG

cover Aluminum alloy Rod seal B NBR White hard anodized 38 3 Cover Aluminum alloy Piston seal NBR White hard anodized 39 4 Intermediate cover Aluminum alloy Cylinder tube gasket NBR White hard anodized 40 Carbon steel 5 Piston rod Release piston seal NBR Hard chrome plated 41 6 Piston Aluminum alloy Rod seal C NBR Chromated 42 7 Taper ring Carbon steel Piston guide gasket NBR Heat treated 43

CXS

0.5 x 12.5 (Hexagon head bolt) M3 x 0.5 (Hexagon nut) 6 7 2-M5 x 0.8 with depth 4.5 (Piping port) IN 2-M3 x 0.5 (Through) 2-M3 x 0.5 (Through) S (13 + ST) 10 2-M3 x 0.5 with depth 4.5 (Opposite side: Same) 2-M5 x 0.8 depth with 4.5 (Piping port) (Opposite side: Same) 3 8 6 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model 10 15 23 55 68.5 CXS6-10 20 20 33 65 78.5 CXS6-20 30 25 43

Table of Contents

Series AS-FG Speed Controller with One-touch Fittin Stainless Series. 5 5 6 7 9 11 11 11 11 12 13 13 13 15 15 16 16 16 17 17 18 19 21 22 22 23 24 25 27 27 27 29 30 31 31 31 32 34 35 35 35 36 36 37 37 37 38 38 39 39 39 41 42 43 43 43 44 45 46 46 Specifications. How to Order . Construction. Dimensions . Series AS-FG Speed Controller with One-touch Fittings Stainless Series In-line Type.

MHF2

M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port DE-E Open: 321 2058 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43 Auto Switch Mounting Groove Dimensions 2-3H9 +0.025 0 depth 3 2.2 18 5.5 18 5.5 4 4.6 3 2-M5 x 0.8 thread depth 5.5 Mounting thread Groove for auto switch mounting 20 74 12-3-19 20 Series MHF2 Dimensions MHF2-16D2 4H9

Low torque Metal seal type Rotary joint

1 2 3 4 2 1 8-5 x 0.8 10 counter bore depth 1.5 14 *5 27 6.5 3.5 6.5 3.5 15H8 (8) 20H8 (6) 1 2-M4 x 0.7 thread length 8 P.C.D.38 2 1 2 4 45 3 41 32 2-M3 x 0.5 thread length 8 P.C.D.29 3 Low torque Metal seal type Rotary jointSeries MQR * symbol indicates flange dimensions Dimensions/Standard Type, Flange Type MQR8-M5 MQR12-M5 0.03 7 M6 x thread length 10 4-M3 x 0.5 thread length 6 P.C.D.43

MGC

40.5 44 38.5 40.5 42 40 37 43 ( ): For long stroke 3.20-14

MHF2

0 depth 3 2-M5 x 0.8 thread depth 12 Mounting thread 6 79.5 5 M5 x 0.8 2-M5 x 0.8 thread depth 5.5 50 94 Mounting thread Finger closing port 26 74 10.6 E 20 20 24 33 E 0 -0.1 1.2 2-4.3 through (mounting hole) 27 29 1.2 29 M5 x 0.8 2-7.5 +0.1 0 Close: 0 Finger opening port E-E Open: 321 58 4-M5 x 0.8 thread depth 5.5 8-M4 x 0.7 thread depth 4 Attachment mounting thread Mounting thread 20 43

CRB1/Size: 10, 15, 20, 30

Weights (g) Vane style Double vane Single vane Model CRB1BW15-lS CRB1BW20-lS CRB1BW30-lS CRB1BW10-lD CRB1BW15-lD CRB1BW20-lD CRB1BW30-lD CRB1BW10-lS Rotation angle 90 180 270 180 270 180 270 180 90 90 90 270 90 100 90 100 90 100 90 100 Body of rotary actuator 26.3 26.0 25.7 49 48 105 103 198 50 106 203 193 42 43 57 60 121 144 223 243 Flange bracket ass'y 9 10 19 25 9 10 19 25 Auto switch

VQ5000

For replacement parts, refer to page 2-6-43. 2-6-9 Base Mounted 10 Series VQ5000 Kit (D-sub Connector kit) F . Simplification and labor savings for wiring work can be achieved by using a D-sub connector for the electrical connection.

Plug-in/Plug Lead: Single Unit

Flow Characteristics Series Number of solenoids Weight (kg) Model Port size 1 4/2 (P A/B) 4/2 5/3 (A/B EA/EB) Standard 1 W AC Low wattage 0.5 W b Cv b C[dm3/(s.bar)] C[dm3/(s.bar)] Cv 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 0 5 Single VQ51 0 12 35 or less 0.59 (0.67) 0.14 38 or less 2.9 38 or less 14 0.18 3.4 Metal seal 2 position 3 position VQ51 1 16 40 or less 0.58 (0.66) 0.33 43

AIR SLIDE TABLE

Model Thread size Tightening torque Nm MXQ6(A) M60.75 5 MXQ8(A,C) MXQ6B M60.75 5 MXQ12(A,C) MXQ8B M81 12.5 MXQ16(A) MXQ12B M101 25 MXQ20(A) MXQ16B M121 43 MXQ25(A) MXQ20B M141.5 69 Be careful not to hit the table with the wrench when adjusting the stroke adjuster.

Mechanically Jointed Rodless Cylinder Series MY2

4 #1@3@9 Section A-A A MY3A MY3B MY3M A $0 $1 #4 #5 #2 @1 $6 $3 Component Parts No. 29 30 31 32 33 34 35 36 37 38 39 40 41 42 43 44 45 46 47 48 49 55 56 57 No. 1 2 3 4 5 6 7 8 9 10 11 12 13 16 17 18 19 20 21 23 24 25 26 27 28 Description Magnet Magnet Seal magnet Rail End spacer Square nut Square nut Spring pin Parallel pin Note Hard anodized Hard anodized Hard anodized Hard anodized Hard

Precision Cylinder Series MTS ø8, ø12, ø16, ø20, ø25, ø32, ø40 Cylinder with ball spline MXH MXU MXS MXQ MXF MXW MXJ MXP MXY MTS

Refer to front matters 42 and 43 for Safety Instructions and pages 3 to 11 for Actuator and Auto Switch Precautions. Caution on Using End Lock Type Relation to Cushion Caution Operating Precautions Caution MXH 1. Do not use 3 position solenoid valves. Avoid use in combination with 3 position solenoid valves (especially closed center metal seal types).