Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 11. Note 2) A model with PD port (M3) is available as an option. Refer to page 11.

VQ7-6/7-8

(initial value) 1 (P) 5 (R1) 3 (R2) 3 position pressure center (A) 4 (B) 2 1 (P) 5 (R1) 3 (R2) 18 Series VQ7-8 DIN Connector Type 2 position/Single : VQ7-8-FG-S Single (reverse pressure) : VQ7-8-YZ-S 154 56 (71) 82.5 71.5 154 49 (64) 49 (64) 82.5 56 (71) 31 (42) 31 (42) 2-7.5 Mounting hole 16 (20) (port A) 16 (20) (port B) R1 R2 P Manual override A B PB (22) 16 16 (23) 12 (16) (11) 10 75

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

B 210.5 198 185.5 173 160.5 148 135.5 123 110.5 98 L dimension 53.3 50.1 46.9 43.8 40.6 37.4 34.3 31.1 28 24.8 Weight (g) A 19 18 17 16 15 14 13 12 11 10 No. 335.5 323 310.5 298 285.5 273 260.5 248 235.5 223 L dimension 84.9 81.7 78.6 75.4 72.2 69.1 65.9 62.7 59.6 56.4 Weight (g) Series For SY3000 (8) A 16 22 25 25 C 51 80.8 97 98 Model AN203-KM8 AN200-KM10 AN300-KM10 AN300-KM12 Effective

Vacuum Unit Ejector / Vacuum Pump System

Size Ejector System Vacuum Pump System Port Metric Inch Metric Inch PV 6 1/4 6 1/4 V 6, 8 1/4, 5/16 6, 8 1/4, 5/16 EXH (Port exhaust) 8 5/16 PE EXH Common Port open to atmosphere Note 1) PS 4 5/32 PD Note 2) M3 M3 : Not applicable Note 1) Piping for PE port is available as an option (M3). Refer to page 12. Note 2) A model with PD port (M3) is available as an potion. Refer to page 12.

EXxx-OMY0004

16 Date Signature (editor) Date Signature (test engineer) 108 No.EX##-OMY0004 22.

HRX-OM-M005

1.7.3 Disposal of product . 1-16 1.7.4 Battery . 1-16 1.8 Material Safety Data Sheet (MSDS) . 1-16 Chapter 2 Name of Each Section . 2-1 2.1 Name of Each Section . 2-1 Chapter 3 Transporting and Installation . 3-1 3.1 Transporting . 3-1 3.1.1 Transporting with forklift . 3-2 3.1.2 Transporting with caster . 3-3 3.2 Installation . 3-3 3.2.1 Installation conditions . 3-4 3.2.2 Installation

Vacuum gripper

Lifting force = Theoretical lifting force / t Theoretical lifting force (Theoretical lifting force = P x S x 0.1) Cup diameter (8 to 32) [N] Cup diameter [mm] 8 10 13 16 20 25 32 S: Cup area [cm2] 0.50 0.79 1.33 2.01 3.14 4.91 8.04 -85 4.2 6.6 11 17 26 41 68 -80 4.0 6.2 10 16 25 39 64 -75 3.7 5.8 10 15 23 36 60 -70 3.5 5.5 9.3 14 22 34 56 Vacuum pressure [kPa] -65 3.2 5.1 8.6 13 20 31 52

Digital Flow Switch (Manifold type)

Flow range: 0.5 to 4 L/min (symbol 04) Pressure: 0.3 MPa Piping bore size: 12 Flow range: 2 to 16 L/min (symbol 20) Pressure: 0.3 MPa Piping bore size: 12 Flow range: 5 to 40 L/min (symbol 40) Pressure: 0.3 MPa Piping bore size: 16 -60No.PF-OMW0004-B Analogue output Analogue output (Flow) (PF3W704/720/740) A B C Voltage output 1 V 1.5 V 5 V Current output 4 mA 6 mA 20 mA Rated flow [L/min

EXxx-OMY0006CN

EX245-FPS1/2/3 Table 16-1 1/2(XF1/2) No. SI Auto negotiation 1 LINK/ACT LED SI Table 16-2 PROFINET No.

Vacuum

Pad Type Nr'|0 x 1 ' 5/32" and 5/16" tube may be subsliluled tor 4mm and 8nm respeclively.

Compact Rotary Actuator Series CRQ2

Description Qty. 4 4 4 4 1 1 1 1 Seal Seal Seal Seal 11 11 11 11 1 1 1 1 Gasket Gasket Gasket Gasket Parts included in seal kit 12 12 12 12 1 1 1 1 Gasket Gasket Gasket Gasket 16 16 16 16 Wear ring Wear ring Wear ring Wear ring 4 4 4 4 17 17 17 17 Piston seal Piston seal Piston seal Piston seal 4 4 4 4 26 26 26 26 Seal washer Seal washer Seal washer Seal washer 2 2 2 2 A set includes all

High Purity Chemical Valve

Inch sizes (1/8), (3/16), 1/4 Lock nut Locks the adjustment knob position.

mlu

CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when

AHC System Series MA

> MHZ Tool adapter A210 D 16 MHZ2 Y69A N Transportable mass MHF Transportable mass 3 kg 2 Cylinder bore MHL For MA2 With adapter 10 mm 16 mm 10 16 MHR Finger position MHK Standard Narrow type Nil N MHS Auto switch type Nil Without auto switch MHC D-Y69A (3-wire) Y69A Solid state auto switch Lead wire: Right angle entry Lead wire length: 0.5 m MHT D-Y69B (2-wire) Y69B MHY Auto switch additional

EtherNet/IP TM Compatible Fieldbus System

: Input unit is connected. 16 Output: SI unit (16 output) is connected. 32 Output: SI unit (32 output) is connected.

MLGP

199 36 46 41 40 50 63 115 128 131 15 21 16 174 196 199 32 42 37 132 149 152 52 62 57 152 169 172 40 50 63 7 Low Profile Guide Cylinder with Lock Series MLGP Dimensions/80, 100 MLGPM, MLGPL 6H7 depth 10 WA Z WB b a 6H7 c d 7 e T-slot dimensions 5 10 6H7 X X 0.02 Section XX detail Bore size (mm) 80 100 e 22.5 30 d 8 10 c 12 13.5 b 20.3 23.3 a 13.3 15.3 4-YY depth YL Bottom view Section XX Extension

MLGP

199 36 46 41 40 50 63 115 128 131 15 21 16 174 196 199 32 42 37 132 149 152 52 62 57 152 169 172 40 50 63 7 Low Profile Guide Cylinder with Lock Series MLGP Dimensions/80, 100 MLGPM, MLGPL 6H7 depth 10 WA Z WB b a 6H7 c d 7 e T-slot dimensions 5 10 6H7 X X 0.02 Section XX detail Bore size (mm) 80 100 e 22.5 30 d 8 10 c 12 13.5 b 20.3 23.3 a 13.3 15.3 4-YY depth YL Bottom view Section XX Extension

VFS

16 14 16 17 14 16 17 9.0 9.0 9.0 VFS600 0.30 0.15 0.15 0.30 0.15 0.15 0.25 0.25 0.25 0.32 0.17 0.20 0.30 0.23 0.25 15 16 17 15 16 17 14 16 16 14 16 17 14 16 18 9.0 9.0 9.0 3.7 3.7 3.9 3.7 3.7 3.9 4.0 4.1 4.1 3.8 3.8 4.2 3.7 3.9 4.6 0.30 0.15 0.13 0.30 0.15 0.13 0.24 0.24 0.23 0.25 0.18 0.13 0.31 0.22 0.22 3 8 4.1 4.5 4.7 4.1 4.5 4.7 4.1 4.1 4.1 3.5 4.1 4.1 3.8 4.1 4.3 Single 1 2 3 4 VFS5100

Angular Style Air Gripper Series MHC2/MHCA2/MHCM2

Max. screw-in depthl mm Model MHC2-10 MHC2-16 MHC2-20 MHC2-25 5 8 10 12 MHC2-10 MHC2-16 MHC2-20 MHC2-25 0.31 0.59 1.4 2.8 M2.5 x 0.45 M3 x 0.5 M4 x 0.7 M5 x 0.8 MHZ MHF MHL MHR MHK MHS MHC MHT MHY MHW -X MRHQ MA D641

MLU

CD-MU02 Z 142.5 159 171 205.5 LX RR 8.5 10 11 16 LD LU 11 14 15 20 LC 16 18 20 28 Z LB 27 31 36 46 LB 27 31 36 46 LX RR 8 10 10 16 LA 35.5 41 47 62 ZZ 151 169 182 221.5 L 52.5 59 67 81 LA 35 41 46 62 LD LU 13 14 17 23 ZZ L 52.5 59 67 81 Model MLU25 MLU32 MLU40 MLU50 Model MLU25 MLU32 MLU40 MLU50 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 +0.4 +0.2 The L, Z and ZZ dimensions are reference dimensions when