High Power Cylinder:

to 700 200 to 700 200 to 1000 200 to 1000 Eff. thread length 15.5 19.5 19.5 21 Bore (mm) 20 25 32 40 H1 5 6 6 8 GB 47.5 49.5 51.5 51.5 GA 53.5 56.5 55 56 FZ 68 70 72 84 FW 38 44 50 60 FY 21 27 33 36 FX 51 53 55 66 FT 6 9 9 9 FD 7 7 7 9 F 16 16 19 21 E 14.5 18 18 20.5 D 10 12 12 16 C 40.5 45.5 51.5 61.5 B 32 36 44 53 A 18 22 22 24 Bore (mm) 20 25 32 40 S 192 193 195 201.5 Rc(PT)P 1/4 1/4

Compact Vacuum Unit Ejector/ Vacuum Pump System

1/8 One-touch tube fitting Inch size LN3 Elbow type 5/32 One-touch tube fitting 34 - Doc. no.

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

23.3 28.5 35 20.5 16 20 14.5 16 20 15 16 23.5 206 264 322 42 51 59 7 8 9 37.5 47 59.5 12 16 18.5 220 280 340 5.5 6.5 8 15.5 20 23.5 Rc1/16 Rc1/16 Rc1/8 13 13 23 11 12 14 Model QQ SS UU XX 16 16 24 MY1H25 MY1H32 MY1H40 26.5 40 47 6 11 12 18 32 35 WXX WX V V R D Hole Size for Centralized Piping on the Bottom (Machine the mounting side to the dimensions below.)

MHF2-E

Middle stroke 120 Long stroke 60 Lubrication Not required Action Double acting Note 2) Gripping force Effective gripping force per finger (N) 19 48 90 141 Short stroke 8 12 16 20 Opening/closing stroke (Both sides) (mm) Middle stroke 16 24 32 40 Long stroke 32 48 64 80 Short stroke 65 155 350 645 Note 3) Weight (g) Middle stroke 85 190 445 850 Long stroke 120 275 650 1,225 Note1) This is

ASP

Model L5 T2 25.6 28.2 25.6 28.2 28.2 32.6 32.6 34.7 13.2 15.2 13.2 15.2 15.2 18.5 18.5 21.7 42.2 44.7 43.9 46.4 51.3 54.1 64.2 66.3 17 18.7 17 18.7 18.7 20.8 20.8 21.8 1/4" 5/16" 1/4" 5/16" 5/16" 3/8" 3/8" 1/2" ASP330F-N01-07S ASP330F-N01-09S ASP430F-N02-07S ASP430F-N02-09S ASP530F-N03-09S ASP530F-N03-11S ASP630F-N04-11S ASP630F-N04-13S 38.6 33.9 11.8 1/2" NPT 1/8 8 14.2 10-32 UNF 35.1 10.5

Speed Controller with One-touch Fitting for Clean Room Series AS-FPQ/AS-FPG

(mm) Applicable cylinder bore size (mm) 4 6 8 10 12 AS-FPG AS-FPQ Clean performance Resin: PP Metal: Brass (electroless nickel plated) Resin: PP Metal: Stainless steel (SUS304) M5 x 0.8 6, 10, 16, 20 AS121FP-M5 R 1/8 20, 25, 32 AS221FP-01 R 1/4 20, 25, 32, 40 AS221FP-02 R 3/8 40, 50, 63 AS321FP-03 10-AS-F 10-AS-FG R 1/2 63, 80, 100 AS421FP-04 Resin: PBT, POM Metal: Brass (electroless nickel

Escapements Series MIW/MIS

Supply port 2-M5 x 0.8 FC FA FE FH GD GC GB FG FF EB EA D FB B MIS12-10 A C FD GA Model 72 92 112 86.5 106.5 126.5 33 43 53 38.5 48.5 58.5 48 38 28 165 135 105 185 155 125 MIS12-30 MIS12-20 18 19 9.5 6 (Effective depth 3) 4.5 8 -0.1 0 8 -0.1 0 10 M3 x 0.5 5 3.3 23 26 21 MIS20-30 MIS20-20 MIS20-10 52 42 32 11-0.1 0 11-0.1 0 29.5 35 25.5 13 12.5 10 (Effective depth 4) M5 x 0.8 6.5 28.5 7 5.1

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

M3 ,M5 ,U10/32 R NPT Nil ASN N AQ Model 4 6 8 10 12 5/32"1/4" 5/16"3/8" 1/2" Applicable tubing O.D. (mm) Effective area (mm 2) IN OUT OUT EXH.

VK300

Port size (A port) Rated voltage Option M5 M5 x 0.8 01 Rc 1 8 1 2 3 100 VAC, 50/60 Hz 200 VAC, 50/60 Hz 110 VAC, 50/60 Hz 220 VAC, 50/60 Hz Nil None With bracket (Not assembled) P, R port: M5 4 5 6 24 VDC 12 VDC F Thread type 7 240 VAC, 50/60 Hz 9 Other Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800

EtherNet/IP TM Compatible Fieldbus System

: Input unit is connected. 16 Output: SI unit (16 output) is connected. 32 Output: SI unit (32 output) is connected.

48

25 32 Size 16 25 32 Size 16 25 32 Size 16 25 32 CAT.NAS100-83 RodType AC Servo Motor (100/200 W) Basic type In-line motor type Series LEYmD Series LEY Stroke 30 to 400 30 to 500 Stroke 30 to 400 30 to 500 Size 25 32 Size 25 32 CAT.NAS100-83 SliderType Step Motor (Servo/24 VDC) Servo Motor (24 VDC) AC Servo Motor (100/200/400 W) Ball screw drive Belt drive Ball screw drive Series LEFS Series

Rotary Actuator

24.5 10.5 50.5 59 22 14 21 11 6 14 (13.5) (7.5) M5 M5 0.005 0.020 0 0.043 50 40 13 22 5 2 8 12 1.0 26 14 43 M5 34.5 14 64 75 24 15.5 25 16.5 8 16 (18) (10) M5 M5 0.005 0.020 0 0.052 63 45 15 30 6.5 4.5 9 20 1.5 31 20 56 M5 39.8 17 79.5 90 30 21 31.6 17.5 10 25 (16) (10) 10 Rotary Actuator Series CRB2 Vane Type Dimensions: 10 Double vane # Following figures show the intermediate rotation

ZB-OM00301

LN1 1/8 LN3 5/32 10 ZFAZFBZFC 11 10 - No.ZB-OM00301 / 1 01 1 / 02 2 S / 1 S 12 12 PV PD 2 PD PVPD 01 Rc1/8 M5 M50.8PVPD 01N NPT1/8 2 01F G1/8 M5 M50.8 M50.8 M-5P ZB03 ZB04 ZB05 ZB06 PV N.C.

Table of Contents - Tubing

Inch Sizes Metric Sizes * 1/4 3/8 1/2 5/8 4mm (5/32) 6mm 8mm (5/16) 10mm 12mm 0.7 11 13 15 04 06 08 10 12 Colors Color Red White Yellow Color Black Blue Green Natural Symbol B BU G N Symbol R W Y * * Coming soon Note: 4mm tubing is suitable for use with 5/32 SMC One-Touch fittings as are 8mm tubing and 5/16 fittings PEAPP08 8 (5/16) 5 38 PEAPP12 12 9 63.5 PEAPP66 6 4 31.8 PEAPP10 10 5 51

CLK1

Rod size (mm) Piston area (mm) Operating direction Bore size (mm) Auto switch model 0.3 0.4 0.5 0.6 32 40 50 63 241 322 402 482 OUT 804 D-C73, C76, C80 D-C73C, C80C Reed switch 12 32 207 276 346 415 IN 691 BMA2-032 BMA2-050 BMA2-063 BMA2-040 D-H7A1, H7A2, H7B, H7C D-H7NW, H7PW, H7BW D-H7LF, H7NF 378 504 630 756 OUT 1260 Solid state switch 16 40 318 424 530 636 IN 1060 588 784 980 1180 OUT

Digital Pressure Switch

M5 01 N01 C4H C6H N7H C4L C6L N7L Port size M5 x 0.8 R1/8 NPT1/8 4 mm One-touch fitting Straight type 6 mm 1/4 inch 5/32 inch 4 mm One-touch fitting Elbow type 6 mm 1/4 inch 5/32 inch Pressure-sensing part Silicon Materials in fluid contact Piping port (Common) PBT, CB156, heat resistant PPS, O-ring: HNBR C3604 part (Electroless nickel Piping port POM, SUS304, NBR, C3604 plating), SUS304,

 

71 53 B A 58 31 8 16 16 125 With flow rate adjustment 25 30 Breathing port Breathing port PB PB PA PA M5 x 0.8 x 5 Pilot port Rc1/8 (NPT1/8) Pilot port LVP50-16A1 N LVP50-16A2 Basic type, with flow rate adjustment LVP6 78 58 90 4 x 6.5 40 58 Max. 35 Adjustment knob 2 x 6 Pilot port 34 (45) Lock nut Breathing port M5 x 5 Pilot port PB Breathing port PA PB 27.5 LVP60-A2 150 PA (32) (26) 36.5

Speed Controller with Pilot Check Valve with One-touch Fitting Series ASP 1

Model L5 T2 17 18.7 17 18.7 18.7 20.8 20.8 21.8 25.6 28.2 25.6 28.2 28.2 32.6 32.6 34.7 42.2 44.7 43.9 46.4 51.3 54.1 64.2 66.3 13.2 15.2 13.2 15.2 15.2 18.5 18.5 21.7 1/4" 5/16" 1/4" 5/16" 5/16" 3/8" 3/8" 1/2" ASP330F-N01-07S ASP330F-N01-09S ASP430F-N02-07S ASP430F-N02-09S ASP530F-N03-09S ASP530F-N03-11S ASP630F-N04-11S ASP630F-N04-13S 10.5 35.1 39.5 33.9 11.8 1/2" 10-32 UNF NPT 1/8 8 14.2

HRX-OM-Q026

PV SV 16. Set communication speed (serial communication protocol) with [] key or [] key, and press [SEL] key to enter.

SFOD-OMT0009CN

No. 1 1 2 16 2 32 3 DC24V10% 3 DC30V 4 ON 5.1mA20%(DC24V ) 4 100mA 5 -COM+1.8V() (PNP) (PNP) No.