DOC1003626

Name Alarm flag 1 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Name Alarm flag 2 Bit 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Bit Name Explanation 0 Abnormal low tank fluid level 1 Low tank fluid level 2 None 3 None 4 None 5 Fan failure Alarm flag 1 6 None 7 None 8 Abnormal rise of circulating fluid temperature 9 Circulating fluid temperature rise 10 Circulating fluid temperature drop 11 TEMP READY

VCC

(Equivalent tightening torque: T) 18.8 13.8 11.8 5.8 2.8 0.5 8.6 11 G1/4 (mm) Part no.

Applicable Tubing: ø 2 Connection Thread: M3, M5 Made to Order (Refer to page 193 for details.) Miniature Fittings M Series

0.5 M3 x 0.5 M3 x 0.5 Effective area: 0.6 mm2 Weight: 1.6 g Effective area: 0.6 mm2 Weight: 1.4 g Nipple: M-3N Plug: M-3P Width across flats 5 Width across flats 5 M3 x 0.5 M3 x 0.5 M3 x 0.5 Weight: 0.6 g Effective area: 0.9 mm2 Weight: 0.5 g R 1/8 Series Barb Fitting for Nylon Tubing, Soft Tubing: M-01A-4/-6 Effective area (mm2) 2.1 4.0 2.1 4.0 Weight (g) 6.4 6.6 6.5 6.7 Applicable tubing

Angle Seat Valve

Valve Flow-rate Characteristics Series VXB Conversion of flow coefficient: Av = 28 x 106 Kv = 24 x 106 Cv (11) Here, Kv factor : Value of the clean water flow rate represented by m3/h which runs through a valve at 5 to 40C, when the pressure differential is 1 bar.

Angle Seat Valve /

Solenoid Valve Flow Rate Characteristics VXB Series Conversion of flow coefficient: Av = 28 x 106 Kv = 24 x 106 Cv (11) Here, Kv factor : Value of the clean water flow rate (represented by m3/h) which runs through a valve at 5 to 40C when the pressure difference is 1 bar.

VDW Series

-1/8 (OUT port) 11 P = 22 11 1.5 4.5 6 32 6 54 ( 19.5) 11 9.5 11 9.5 4-M4 x 0.7 10 24 10 46 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes.

76

(per 1 m3 ) The amount of moisture at the intersection C the amount of moisture at the intersection H = the amount of condensed water 18.2 3.0 15.2 g/m3 11 Series IDF100FS/125FS/150FS Specific Product Precautions 1 Be sure to read before handling. Refer to page 14 for Safety Instructions, Handling Precautions for SMC Products (M-E03-3) for Air Preparation Equipment Precautions.

VEX1

2 1 4 11 4 1 2 1 8 1 4 1 4 3 8 1 2 1 2 3 4 There were not many appropriate large capacity 5 port valves of a closed center.

IDX-OM-W032

IEC 11-2 AC200V / 2A DC24V / 2A ( 20V / 3mA) 11-3 ON ON/OFF 3 3 5 () IDFA Series 11-1 11 1 IDX-OM-W032 11 T 11-4 1) 2) 3) 4) 1 2 3 PE L.N: PE: M3 6.5mm 2 :1.25mm :17 :17 11-5 3 5-2 IDFA55E/75E-23 IDFA Series 11-4 11 2 IDX-OM-W032 11 T 11-6 IDFA22E, 37E-23-T IDFA55E, 75E-23-T GFCI R GFCI R GFGI For Option R 1 2 3 L N PE L N 1 2 3 PE TB TB MC TDR MC CM C01

VDW Series, Compact Direct Operated 2/3 Port Solenoid Valve for Water and Air

-1/8 (OUT port) 11 P = 22 11 1.5 4.5 6 32 6 54 ( 19.5) 11 9.5 11 9.5 4-M4 x 0.7 10 24 10 46 When not equipped with bracket, the M3 threads at both ends (4 positions) can be used for other purposes.

Vacuum Gripper

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

Vacuum Gripper

ZP25U ZP 32 U ZPG32U-7A-X2 10 11 11 12 ZP32U ZP 10 C ZPG10C-7A-X2 7 7 7 7 ZP10C ZPT2-7A-X2 ZP 13 C ZPG13C-7A-X2 7 7 7 7 ZP13C ZP 16 C ZPG16C-7A-X2 7 7 7 8 ZP16C ZP 20 C ZPG20C-7A-X2 9 10 10 11 ZP20C ZPT3-7A-X2 ZP 25 C ZPG25C-7A-X2 10 10 10 11 ZP25C ZP 32 C ZPG32C-7A-X2 10 11 11 12 ZP32C ZP 10 B ZPG10B-7A-X2 7 7 7 8 ZP10B ZPT2-7A-X2 ZP 13 B ZPG13B-7A-X2 7 8 8 8 ZP13B ZP 16 B ZPG16B

Refrigerated Thermo-chiller

Example of the conventional measurement units (Reference) Unknown 6.0C 20C 26C 1.2 m3/h Fluorinated fluid Density : 1.80 x 103 kg/m3 : Unknown : 6.0C (6.0 K) : 20C (293.15 K) : 26C (299.15 K) : 20 l/min : Fluorinated fluid Density : 1.80 x 103 kg/m3 Heat generation amount Q Circulating fluid temperature difference T (= T2 T1) Circulating fluid outlet temperature T1 Circulating fluid return

Manually Operated Integral Fitting Type/Threaded Type Series LVH

LVD LVQ How to Order Manifold Base LQ1 LLH 2 A 05 11 S LVN Body class TL/TIL Tubing size for port P and L side connection Tubing size for port P and R side connection Body class 2 3 4 Symbol 2 3 4 Body class 2 to 4 Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Tubing size Plug Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 Body class 2 to 4 Tubing size Plug LQ3 6 1/4" 6 1/4" Base type 2 8

asilltr

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

2-Color Display ® Digital Flow Switch *1 Applicable fluid Dry air, N2, Ar, CO2

The process and suction status can then be compared. 8 Diagnosis (flow rate) 0: OFF 1: ON 14 Fixed output 0: OFF 1: ON 15 Diagnosis (error) 0: OFF 1: ON 16 to 31 Measured flow rate value Signed 16 bit Bit offset 31 30 29 28 27 26 25 24 23 22 21 20 19 18 17 16 Item Measured flow rate value (PD) Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Error Fixed Reservation Flow rate Reservation

Air Cylinder NCQ7 Series Compact Cylinder

Series NCQT Male Rod End NGOQTOOO-OOM Threaded Mounting Holes (Both Ends) NCOQTOAO'OOO f. 056 (s16") #a-32 07s (31) *10-32 106 (11/re") 5/rc-24 150 (11/r-) 3la-24 200 (2) 1/z-20 250 (21/z\ 1/z-20 300 (3) 5/e-18 ,100 (4') e/+-16 MThreaded r06 (r-rlr6") i50 (r.r/2) M-Threaded 25O (2-1f2'l 3(xr (3') 4OO {4') 150 (11/r) Series NCDQT Constnrction / Autn Suitch Capable Double Acting Spring Return

Process Pump

Note 2) When compressor discharge oil mist concentration is 30 mg/m3 (ANR). 11 Related Products Series PB Filter Regulator + Mist Separator Air Combination Model Specifications Model AC20D AC30D AC40D AC40D-06 AC20D AC30D AC40D-06 AC40D Model 1.5 MPa 1.0 MPa Proof pressure Series AC20D/30D/40D Filter regulator Component devices AW20 AW30 AW40 AW40-06 Max. operating pressure 0.05 to 0.85 MPa

VK3000

-(S)42 Manifold base Applicable base: In common for all types of VV5K3 models Mounting Screw Tightening Torques Mounting Screw Tightening Torques Caution Base mounted Caution Body ported VK3000-6-1A Manifold gasket Screw assembly VK3000-6-2A M3: 0.6 Nm M3: 0.6 Nm Note) Mounting direction is not flexible.

Electric Actuator Miniature Rod Type Miniature Slide table Type

Bearing 12 Bushing Oil impregnated sintered copper alloy 13 Soft wiper 14 Step motor (Servo / 24VDC) 11 - 3.