AMF

NBR JIS B2401G35 1 pc. u 4.6-30 Series AMF Dimensions: AMF150 to AMF350 M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G H 146 167 167 198 198 I 56 66 66 80 80 J 15 20 17 22 19 K 5 8 8 8 8 L 9 12 12 14 14 N 35 40 40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1/8, 1/4,3/8 1/4, 3/8 5.5 6 6 7 7 139 152 158 184

C76

-X C76F32B C76F40B Standard stroke (mm) 10, 25, 40, 50, 80, 100, 125, 160, 200, 250, 300 Bore size (mm) 32 40 Max. stroke (mm) Mounting bracket 1000 Trunnion Clevis Single knuckle joint Double knuckle joint Floating joint C76T32 C76C32 KJ10DA GKM10-20A JA25-10-150 C76T40 C76C40 KJ12DA GKM12-24A JA40-12-175 20Example of How to Order Data Accessory 1.

Floating Joint Light Weight Type for Light Load JC Series

x 1.5 M18 x 1.5 300 800 1250 3100 0.5 0.5 0.75 1 5 Semi-standard/Thread nominal size 0.5 0.5 0.5 0.75 0.75 0.75 1 1 300 800 800 1250 1250 1250 3100 3100 JC20-8-100 JC25-10-150 JC32-10-100 JC40-12-125 JC40-12-150 JC40-12-175 JC50-16-150 JC63-16-200 M8 x 1 M10 x 1.5 M10 x 1 M12 x 1.25 M12 x 1.5 M12 x 1.75 M16 x 1.5 M16 x 2 20 25 32 32/40 40 32/40 50 50/63 5 How to Order 14-150 JC 40 Thread

Series 10-, 21- AW-B Filter Regulator

54 54 66 30 41 50 50 70 30 38.4 38.4 47.5 63 66.4 74.3 74.3 80.3 26 29.4 37.3 37.3 43.3 44 44 44 44 44 72.4 85.6 91.7 93.2 175.5 11 10.5 10.5 8 6.5 91.4 121.9 153.9 155.9 242.6 25.5 24.8 28.9 30.4 42.2 40 53 70 75 95 5 3.5 1.5 1.2 3.2 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 3/4, 1 1/8 1/8 1/8 1/8 1/8 M28 x 1 M38 x 1.5 M42 x 1.5 M42 x 1.5 26 29.4 37.3 37.3 43.3 Note) The dimension of C is the

AMF

40 50 50 O 54 66 66 80 80 P 70 84 84 100 100 Q 26 28 28 34 34 R 4.5 5 5 5 5 S 1.6 2.0 2.0 2.3 2.3 1 8 1 4 3 8 , , 7.5 4 4 5 5 AMF150 5.5 6 6 7 7 139 152 158 184 190 13 13 16 16 19 55 66 72 92 98 63 76 76 90 90 63 76 76 90 90 10 10 10 10 10 1 4 3 8 , AMF250 1 2 3 8 1 2 , AMF350 3 4 14-20-46 6 Odor Removal Filter Series AMF Dimensions AMF450 to AMF850 Courtesy of Steven Engineering, Inc.-230

AMX-OM-Q015E

Inlet air temperature oC *Note1 -5 to 50 Ambient temperature oC *Note1 Outlet air atmospheric Standard Performance 93 135 224 308 400 75 140 230 -40 -60 pressure dew point oC *Note2 Inlet air flow rate L/min(ANR) Outlet air flow rate L/min(ANR) 75 110 170 240 300 50 100 150 Standard Performance conditions 18 25 54 68 100 25 40 80 Purge air flow rate L/min(ANR) *Note3 Inlet air pressure MPa

AMX-OM-Q018E

Inlet air temperature oC *Note1 -5 to 50 Ambient temperature oC *Note1 Standard Performance 93 135 224 308 400 75 140 230 Outlet air atmospheric -40 -60 *Note2 pressure dew point oC Inlet air flow rate L/min(ANR) Outlet air flow rate L/min(ANR) 75 110 170 240 300 50 100 150 Standard Performance conditions Purge air flow rate L/min(ANR) 18 25 54 68 100 25 40 80 *Note3 Inlet air pressure MPa

Air Cylinder

Size of set screw Tube bore Trunnion part number Size of set screw Qty. 32 V5032P M3X0.5X5L Flat point 4 40 V5040P M3X0.5X5L Flat point 4 50 V5050P M3X0.5X5L Flat point 4 63 V5063P M4X0.7X5L Flat point 4 80 V5080P M4X0.7X5L Flat point 4 100 V5100P M5X0.8X5L W point 8 125 V5125P M5X0.8X5L W point 8 5 Set screw Table 3 .

Clamp Cylinder

Consumable parts 3-3-1 Replacement parts 40 50 63 Seal kit number CK1A40-PS CK1A50-PS CK1A63-PS Rod seal Piston seal Contents of the seal kit Tube gasket 1pc. of each Grease pack part number: GR-S-010(10g) GR-S-020 (20g) C a u t i o n ~ The seal is not delivered in sealed packaging for independent storage, so it must be used within 1 year. 20 3-3-2.

3 Position Cylinder Series RZQ ø32, ø40, ø50, ø63 How to Order 100 M9BW RZQ 32 200 A Mounting bracket Number of auto switches Nil A Both ends tapped 2 pcs. Bore size B S Through-hole 1 pc. 32 32 mm L n Foot style "n" pcs. 40 40 mm F Rod side flange style

3 Position Cylinder Series RZQ 32, 40, 50, 63 How to Order RZQ 32 200 100 A M9BW Number of auto switches Mounting bracket Nil A B L F G D Both ends tapped 2 pcs.

ISO Standards C85 Series ø 8, ø 10, ø 12, ø 16, ø 20, ø 25 Air Cylinder: Standard Double Acting, Single Rod C85 C85W C85 C85K C85K C85R C75 C75W C75 C75K C75K C75R Single Acting, Spring Return/Extend Single Acting, Spring Return/Extend Single Acting, Spr

40, 50, 80, 100, 125, 160, 200, 250, 300 1000 25 Refer to pages 101 to 111 for cylinders with auto switches.

CG5

, Air cushion 50 to 1000mm/s 40 to 63 Piston speed 50 to 700mm/s 80, 100 Thread tolerance JIS class 2 +1.4 0 +1.5 0 +1.4 0 +1.5 0 Stroke length tolerance to 1000 mm, to 1200 mm 40 to 63 to 1000 mm, to 1500 mm 80, 100 2

Vacuum Pad: Ball Joint Type Vertical Vacuum Entry Without Buffer/Male Thread ZPT Series

Symbol 10 10 A8 M8 x 1 10 to 16 13 13 A10 M10 x 1 20 to 32 16 16 A14 M14 x 1 40, 50 20 20 25 25 Vacuum entry port 32 32 40 B5 M5 x 0.8 40 50 50 Material NBR N Pad type Silicone rubber S Ball joint type F Urethane rubber U FKM F Conductive NBR GN Conductive silicone rubber GS Note) Pads are exclusively ball joint type and are not interchangeable with other pads.

New

22 2.3 33 (8.5) 50 4 x 5.5 8 x 4.5 22 50 4 x 7 <36 40 84 40 36 22 40 5 36 7 4 x 5.5 8 x 4.5 22 14 20 60 70 12 1.6 Working Principle When the input signal rises, the air supply solenoid valve q turns ON, and the exhaust solenoid valve w turns OFF.

No more element replacement!

efficiency (%) 60 60 40 40 20 20 0 0 10 5 20 50 75 25 20 35 65 90 Particle diameter (m) Particle diameter (m) 3 Low Maintenance Filter Series FN1/FN4 Blocking Characteristics (Repeatability) P Fluid: Potable water P Supply pressure: 0.2 MPa P Flow rate: 20 l/min P Test dust: AC course test dust P Test method: Per SMC test method Filter part no.: FN1101N-10-Sl, FN4102N-20-Sl Element: END100

ZP3

Form w 1 Material e Buffer spec. r Buffer stroke t Vacuum inlet M5 x 0.8 Effective thread depth 4 3 40 22.5 1.2 11 6 46 25 14.5 10 56 29 20.5 04 A J K 3 40 22.5 1.8 11 6 46 25 14.5 10 56 29 20.5 06 08 N S U F GN GS HS 18 11 15 59 42.5 1.2 10 20 66.5 50 06 08 15 59 42.5 1.8 20 66.5 50 04 JB K ZP3 Y UM B5 3 41 23.5 11 6 47 26 14.5 10 57 30 20.5 JB K 15 60 43.5 10 20 67.5 57 J K 4 10 13 16 D

Clean Regulator/Fluororesin Type

Description Material Note 12 Fluorine coated Valve spring 1 14 15 16 Insert bushing Nut Collar New PFA New PFA New PFA 13 Fluorine coated Valve spring 2 883 SRF Series Dimensions/SRF10 Integrated fittings 23 Pilot port Rc, NPT 1/8 12 R 54 32 48 40 1 2 SMC 4 x 3.5 (Mounting hole) 23 IN OUT 26 32 5.5 (81) HEX.18 With nut 23 Pilot port Rc, NPT 1/8 12 R 48 32 40 1 2 SMC 4 x 3.5 (Mounting hole

Multi-channel Digital Sensor Monitor ( compatible)

Set the sub display (left) from the selection list on page 50. [dUAL] 2 value display/ [LinE] character string display is not selected Press the SET button to set. Press the SET button to set. Move to sub display (right) setting. Sub display (right) setting Set the sub display (right) from the selection list on page 50.

(Only 400 VAC type) Thermo-chiller Air-cooled 200 V/400 V Type Standard Type HRS090 Series

Pipe thread type Nil Rc F G (with Rc-G conversion tting) N NPT (with Rc-NPT conversion tting) Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) 40 3-phase 380 to 415 VAC (50/60 Hz) Specications Model HRS090-Al-20-l HRS090-Al-40-l Cooling method Air-cooled refrigeration Refrigerant R410A (HFC) Refrigerant charge kg 1.15 Control method PID control Ambient temperature1 C

Flow Sensor Series PFMV

P2: Nozzle internal pressure P1: Atmospheric pressure Nozzle Diameter Flow Characteristics (Vacuum) Nozzle Diameter Flow Characteristics (Positive pressure) 5.0 5.0 0.6 0.5 4.5 4.5 4.0 4.0 0.4 3.5 3.5 0.6 Flow rate [l/min] Flow rate [l/min] 3.0 3.0 0.3 2.5 2.5 0.5 2.0 2.0 1.5 1.5 0.4 0.2 1.0 1.0 0.3 0.5 0.5 0.1 0.2 0.1 0.0 0.0 80 60 40 20 0 0 50 100 150 200 250 300 P2 [kPa] P2 [kPa] Example