Flow sensor PF-OMK0004-F Characteristics data Analogue output characteristics (Non-linear output) -20No. PF-OMK0004-F Pressure loss Nozzle diameter and flow characteristics (Approximate values) Refer to catalog for details. -21No. PF-OMK0004-F Dimensions (in mm) PFMV5 PFMV5 + L-type bracket Mount on one side Mount on both sides -22No. PF-OMK0004-F Revision history A: Revise contents partly several.
S 32 R S3 B 200 N S 2 A2 Motor type Size Motor mounting Symbol Type Output(W) Size Compatible driver Nil In-line 25 32 40 S2 100 25 LECSA-S1 R Right side parallel AC servo motor S3 200 32 LECSA-S3 Incremental L Left side parallel S4 400 40 LECSA2-S4 encoder Lead[mm] LECSB2-T5 Symbol LEKFS25 LEKFS32 LEKFS40 LECSC2-T5 T6 100 25 LECSN2-T5H 20 24 30 LECSS2-T5 A 12 16 20 LECSB2-T7 B 6 8 10 AC
Bore size Port thread type 12 16 20 25 32 40 50 63 12 mm 16 mm 20 mm 25 mm 32 mm 40 mm 50 mm 63 mm 12 to 25 M thread Rc NPT G Nil Body Option Manufacturable Range FN MF M N F Bore size Nil TN TF 32 to 63 12, 16 20 to 63 Clamp stroke Arms are assembled at the time of shipment.
(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w
(Ms) | ieries I{VZ 3-port dirct operated I solenoidvahre I NVZ100 | -EEffi rfl|/h afirF I P F P F II I 3-pod pilot operated I solenoid valrre I NVZ300 I @ Internal dlot type I T di**t* | ,oli*,n,* oiJ I K4 q I l-f " " ' n * | {im#h I P F P F II I I tlffi;lI l&*;" 3-port pilotoperated I solenoad Yalve I NVZSOO I @ Inlerml dlol type I "t" ^"" I ilF a{Zl;lh I exrllar pirot ty"pi I l " i I w
Rod end nut 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 Clevis pin 50 Standard Locking release bolt (N type only) 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 63 Single knuckle joint 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 80 Double knuckle joint (with pin) Option 100 25, 50, 75, 100, 125, 150,
Special tool F Special tool part number list Applicable bore size (mm) 6, 10, 15, 20 25, 32, 40 50 63 Part no. CYRZ-V CYRZ-W CYRZ-X CYRZ-Y 12REA Warning 1. Do not disassemble the product because it may damage the air cushion mechanism. Contact SMC when disassembly or maintenance is necessary . 169
Indicated contents F i n e C o n t r o l o f Sets the fine adjusting value to calibrate the internal temp. sensor.
Bst resPonss Posilron Solid state switch o o.F^)F O-F/LF D-F/NTL o @ Lalch type diaqnoslc outpul Diagnostic outpul OUT 2 J . Solid slate and Reed switches are nterchangeable {Reed swilch} {So id slate swlich} D.F79 D-J79 +.-D-A7 D J79C Series RSDO Auto switch hysteresis "onO", ** (oN) f ' = =mPBasic wiring 3 wire system PNP 2 wire system 3 wire syslem NPN : t c=_ . ---'-+-Ikti#?
Bst resPonss Posilron Solid state switch o o.F^)F O-F/LF D-F/NTL o @ Lalch type diaqnoslc outpul Diagnostic outpul OUT 2 J . Solid slate and Reed switches are nterchangeable {Reed swilch} {So id slate swlich} D.F79 D-J79 +.-D-A7 D J79C Series RSDO Auto switch hysteresis "onO", ** (oN) f ' = =mPBasic wiring 3 wire system PNP 2 wire system 3 wire syslem NPN : t c=_ . ---'-+-Ikti#?
Actuator effective torque STa (S is 10 times or more) (Example) (Example) F: Pressing force (N) Friction coefficient Accelerating torque calculation Ta = I (Nm) Static torque calculation Weight m F = mg Ts = F x l (Nm) I : Moment of inertia Static torque calculation Movement Refer to page 11.
220-01 220-01-F 220-02 220-02-F 320-03 (02) 320-03-F (02) 420-04 420-04-F 121F-M3 131F-M3 121F-M5 (U10, 32) 131F-M5 (U10, 32) 221F-01 231F-01 2211F-01-06 221F-02 231F-02 321F-03 (02) 331F-03 (02) 421F-04 431F-04 1000F 2000F 2050F 3000F 4000F 1001F 2001F 2051F 3001F 4001F 230F 330F 430F 530F 630F 330F 430F 530F 630F Manifold regulator 4-, 5-port solenoid valve VQ Directional control valves
F H Port size G E E Center of F.R.L. body Center of F.R.L. body B B C D A Part no. Note) Port size A B D E30003-A 3/8 31.8 30 30 E40004-A 1/2 31.8 36 36 Seal A (Spacer width) Note) in part numbers indicates a pipe thread type. No indication is necessary for Rc; however, indicate N for NPT, and F for G. Separate interfaces are required for modular unit. Part no.
N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.
F When mounting the work to the rod end, clamp the end across flat for tightening so that not Model no. A [Tightening torque] L[]ZB[]3 8 14 Across f l at 13 21 L[]ZB[]5 10 22 Across f l at 21 33 Model no. B C D E L[]ZB[]5 M 10 x 1. 25 x 12 deep [24.5Nm ] L[]ZB[]3 M 6 x 1. 0 x 8 deep [5.2Nm ] Model no. [Tightening torque] apply rotating force to the rod.
30 40 0.02 25 times heat transfer area As compared to shell and bare tube, the flower fin tube has 25 times the heat transfer area.
12 22.1 4.3 8 25 28 33 14 26.2 Note) Reference dimensions Inch Size D1 D2 D3 D4 L1 L2 L3 MAX.
Component parts Cable length 1.5 m 3 m 5 m 8 m VVZS3000-21A-1 VVZS3000-21A-2 VVZS3000-21A-3 VVZS3000-21A-4 Plug MIL standard Number of terminals: 25 Cable: 25 cores x 0.3 mm2 Applicable base VV5Z3-45F For details, refer to page 3-3-8.
N] F=-q x PA+w x PC F=q x PA+(e-q) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.
Series ZSE60F/ISE60 Confirmation of atmospheric pressure of load lock Special fitting types are used in semiconductor production equipment (metal gasket seal fittings) Leak rate: 1 x 10 -10Pa. m3/s ZSE/ ISE60(F)-A2 ZSE/ ISE60(F)-B2 URJ 1/ 4 TSJ 1/ 4 ZSE50F ISE50 ZSE60F ISE60 Model Standard thread type Special fittings for the semiconductor industry (metal gasket seal fittings) Variations