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NPT, G) ,'" r .r "'" ',.. 1-::' : H I-::' r-Q Q , .J w =i" ~ I ~ ~ K F H -NJ ..!L M Stroke S + Stroke ZZ + Stroke (mmJ oS~((lr.;~ r;ilMg9 ' .:a6ra'~~ FT FZ 'AL QIl B E F FD FX FY G J 11 Ii. DC 0 " : '(mm~ .

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

2 q @0 u !8 !7 MSQAA (High precision type) !9 e r Component Parts Description Material Description Material No. q w e r t y u i o !0 !1 !2 !3 !4 No.

CJ5-S

3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No. CG5SR CG5SV Rod cover Stainless steel 304 Water resistant scraper Head cover Stainless steel 304 i Rod seal Cylinder tube Stainless steel 304 o NBR FKM Piston seal Piston rod Stainless steel 304 !0 Valve seal Bumper Urethane !1 Valve retainer gasket Rod end nut Stainless steel 304 !

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 20 25 32 40 0.02 RHC 50 63 80 100 0.01 MK(2) 0 0 10 20 30 40 60 50 70 80 90 100 RS Q G Bore size mm RS H A (Measurement based on JIS B8377) RZQ MI W S CEP1 Stable operation possible even at a low speed of 5 mm/s (Measurement based on JIS B 8377) Sliding

MVGQ

RS Q G RS H A RZQ MI W S CEP1 Fig. (4) CE1 CE2 Fig. (5) Fig. (6) The speed controller that is located on the side of the selector plates () direction controls the speed.

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

Series LVM is a compact, direct acting, 2/3 port solenoid valve for chemicals. The unique construction reduces residual liquid to a minimum. Superior resistance to chemicals requires less maintenance. Service life (based on SMC test conditions) is 10 million cycles or more.Orifice diameter: 1.1mm, Available with power-saving circuit, 2 port N.C. or N.O. types; 3 port Universal type, Diaphragm

MHZ

3 u q @3 @4 t r !4 y Single acting/Normally closed MHR !9 @0 @1 MHK MHS MHC Double acting/With fingers closed MHT MHY MHW MRHQ Component Parts Misc. Material No. Description Note Material No. Description Note Aluminum alloy Chloroprene rubber CR Hard anodized q Body DStainless steel Fluoro rubber FKM Dust cover w !

Escapements Series MIW/MIS ø8, ø12, ø20, ø25, ø32 1

6 e (1 pc.) @4 10-11-10 10 Series MIW/MIS Escapements Construction: Single Finger Type (MIS) 8 12, 20 i e u q !3 y w o t RE A B !2 w r !0 !1 REC CX CY 25, 32 Option w @0 !1 !7 !8 !5 !9 MQQ M RHC !6 MK(2) (32 only) RS Q G Scraper Stroke adjuster RS H A No. Description Material Note Component Parts RZQ No. Description Material Note Hard anodized Piston seal NBR Aluminium alloy Body !