HRX-OM-Z002

Option . 6-1 6.1 OPTION LIST . 6-1 6.2 OPTION C [WITH INVERTER FOR COMPRESSOR] . 6-1 6.3 OPTION M [DEIONIZED WATER (PURE WATER) PIPING] . 6-1 6.4 OPTION P [WITH INVERTER FOR PUMP] . 6-2 Chapter 7 Alarm Notification and Troubleshooting . 7-1 7.1 ALARM NOTIFICATION . 7-1 7.2 ALARM SOUND STOP . 7-3 7.3 TROUBLESHOOTING . 7-4 7.3.1 Alarm details, causes, and troubleshooting . 7-4 7.3.2 How to

Air Suction Filter Series ZF Prevent from occurring vacuum equipment trouble due to ZA dust from vacuum pad ZX Port size ZR Air flow Filtration Series Features Page (μm) Applicable tubing O.D. (l/min(ANR)) ZM Screw-in for one-touch fittings ZMA ZQ ZFA 

Example: In case of 6 stations of air suction filter ZFA (single) ZFA100-01 6 pcs. (Brackets for 6 stations) ZZFA1-06 1 pc.

IDX-OM-W029

. i-5 i-2-7 . i-5 i-2-8 . i-6 i-2-9 . i-6 i-3 . i-7 i-4 . i-8 1 1-1 . 1-1 2 2-1 . 2-1 2-2 . 2-1 2-2-1 . 2-1 2-2-2 . 2-2 2-2-3 . 2-2 2-2-4 . 2-2 2-2-5 . 2-3 2-3 . 2-4 3 3-1 . 3-1 3-2 . 3-1 3-3 . 3-2 3-4 . 3-2 3-5 . 3-2 3-6 . 3-2 4 4-1 . 4-1 4-2 . 4-1 4-2-1 . 4-1 4-2-2 . 4-1 4-2-3 . 4-2 5 5-1 . 5-1 5-2 . 5-3 1 6 6-1 . 6-1 6-2 GWP . 6-2 6-3 . 6-2 6-

IDX-OM-W031

. 6 1 6 2 Refrigerant with GWP reference . 6 1 6 3 Dimensions . 6 2 6 4 Electrical Circuit . 6 3 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 4 Chapter 7 Option Specification C 7 1 Specification . 7 1 7 2 Precautions for the installation and handling of the product . 7 1 Chapter 8 Option Specification K 8 1 Safety instructions . 8 1 8 2 Specifications . 8 2 Chapter

Compact Rotary Actuator Series CRQ2

6 !7 @7 @6 t y e @4 !0 !2 @0 !1 @2 u @5 q @1 !9 !8 !4 !3 Component Parts Component Parts Description Material Description Material No. No.

CXWM/CXWL

6 !7 !8 !

CNG

K KA M MM NA PG PH PL S LC LD LS LH LT LX LZ X Y W XA XB 141 (149) 117 (125) 24 7 5 6 3 M8 x 1.25 1/8 21.5 2 65 4 6 25 3 50 62 15 10 3 12 151 (159) 127 (135) 29 7 5.5 8 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6 28 3 57 70 15 10 3 12 154 (162) 128 (136) 35.5 8 5.5 10 3.5 M10 x 1.25 1/8 26.5 2.5 73 4 6.6 28 3 60 74 16 10 3 12 169 (178) 142 (151) 44 8.5 6 14 4 M14 x 1.5 1/8 28 2.5 81 4 6.6 33 3 68

2 Finger, 3 Finger Rotary Actuated Air Gripper Series MHR2/MHR3 1

closing port M3 x 0.5 Finger opening port 10 M3 x 0.5 Finger opening port M3 x 0.5 Finger closing port 25 25 6-M3 x 0.5 thread depth 6 (A, B, C common view) 3-3 depth 6 +0.02 0 34 (A, B, C common view) 12h9 0 0.043 1.5 5 19.5 12 41.5 (45) 8 17 2 8 0 0.05 2 3.5 0 0.03 3.5 0 0.03 Open: 22 Closed: 14 2-M3 x 0.5 thread depth 6 (Thread for mounting attachment) 15 15 6 5 5 6 12-5-12 13 2 Finger

Rotary Table/Rack & Pinion Style Series MSQ

6 !7 !8 !1 @5 er w@4 MSQ R (With internal shock absorber) CRA1 @1 !2 !5 !4 !9 @6 u @3 @0 @2 @9 #0 !

IDX-OM-W010

. 6 1 6 2 Refrigerant with GWP reference . 6 1 6 3 Dimensions . 6 3 6 4 Electrical Circuit . 6 5 6 5 Compressed Air and Refrigerant Circuit / Operation Principles . 6 7 Chapter 7 Specification for Option A 7 1 Safety instructions . 7 1 7 2 Specifications . 7 1 7 3 Air piping . 7 1 7 4 Air flow capacity . 7 1 7 5 Compressed Air and Refrigerant Circuit / Operation Principles . 7 2 Chapter

Parallel Type Air Gripper Series MHZ

6 6 6 6 6 4 4 4 4 4 4 Double acting 3.3 (0.74) 6.1 (1.37) Normally open 1.9 (0.43) Single acting Normally closed 3.7 (0.83) Single acting type, normally open Note 1) Values based on pressure of 0.5MPa, gripping point L = 20mm, at center of stroke.

MXH Series Compact Slide

Magnet holder 6 Brass 9 No.

Pin Clamp Cylinders

198 19.9 199 20.0 200 19.5 10 7.5 20 14 10.5 25 20 13 27 4 4.5 9.2 6 5.5 12.6 6 8 17.2 145 14.6 146 14.7 147 14.8 148 14.9 149 15.0 150 10.5 105 10.6 106 10.7 107 10.8 108 10.9 109 11.0 110 14.5 D11 7.5 20 15 10.5 25 4 4.5 9.8 6 6 13.3 -X 533 C(L)KQG32 Series Dimensions CLKQGl32 (Clamping height LOW type) The figures below indicate the CLKQGB32-lRCL-X2081.

Plug-in Unit

PW 0 0 0 1 1 1 9 9 9 PW LRUN 2 2 2 8 8 8 3 3 3 7 7 7 4 4 4 6 6 6 SD RD LERR. 5 5 5 L RUN SD RD x10 x1 24V 0V +24V 24G DA DB FG DG L ERR.

NCQ8

#10-24UNC2-3/8 2-1/2 2-5/8 2-3/4 2-7/8 3 3-1/8 3-3/8 3-5/8 3-7/8 4-1/8 4-5/8 5-1/8 5-5/8 6-1/8 1/4-20UNC2-5/8 2-3/4 2-7/8 3 3-1/8 3-1/4 3-3/8 3-5/8 3-7/8 4-1/8 4-3/8 4-7/8 5-3/8 5-7/8 6-3/8 #4-40UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC1-7/8 2 2-1/8 2-1/4 2-3/8 2-1/2 2-5/8 2-7/8 3-1/8 3-3/8 3-5/8 4-1/8 4-5/8 5-1/8 5-5/8 #6-32UNC2-1/8

SFOD-OMT0009CN

10.5 [5m ] L E C P *B* (a) (b) 2 A B-1 L 1 A A-1 (b) 6 A B-1 B B-2 1 1.5m 5 A A-1 B A-2 3 3 3m B B-2 COM-A/COM B-3 4 B A-2 COM-B/A-3 5 5m (c) COM-A/COM B-3 Shield COM-B/ A-3 Vcc B-4 12 GND A-4 13 Vcc B-4 A B-5 7 GND A-4 A A-5 6 A B-5 B B-6 9 A A-5 S B A-6 8 (d) B B-6 3 B A-6 (a) + B-1 4 A-1 5 + B-3 1 2 A-3 (a) (8) (14.2) B1 A1 (b) 2 1 (17.7) (14) (18) (10.2) 6

Filter Regulator

Note 4) -10- 6.

MQQ

Please contact SMC for further details. 10-5-6 6 Series MQQ/MQM Specific Product Precautions 3 Be sure to read before handling.

Shock Absorbers and Rate Controls

N/A 6. +0. 6. +0.t3/0 6.02 38.1 6.0 8.3 5.9 t0.0 861 .S !

Base Mounted Type, VQ5000 Series, 5 Port Metal Seal/Rubber Seal Solenoid Valve

A void A void A void A void A void A B A B A B A B A B A A A B A B A B A A A A 6 7 8 9 10 11 12 13 14 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 15 0 0 1 2 3 4 5 SC type OMRON SYSBUS wire system compatible SD type Sharp Satellite I/O link system compatible Terminal block (LED) nomenclature ADDRESS NO. STATION NO.