Micro Mist Separator Series AMD Model Series AMD can separate and Model AMD450 AMD550 AMD650 AMD850 AMD150 AMD250 AMD350 remove aerosol state oil mist in Rated flow (l/min (ANR))(1) 2000 3500 6000 12000 200 500 1000 compressed air and remove Port size

size B) A B C D E F G S 6 11/2 , 2 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMD850 13 42 348 220 57.5 220 10 AMD850SAM, #7 4.6-12 Series AMD Precautions Dimensions: AMD801/901/800/900/1000 AMD801/901 Be sure to read before handling.

Soft Start-up Valve AV2000/3000/4000/5000

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PP PA 1(P) 2 2(A) 1 1/2 PP = approx.

3M/SMseries

Pod NVF3000 NVF5000 Supply SUP Cylindet cYL.1, CYL.2 A , B Exhaust EXH.1, EXH.2 Rl, R2 Symbol (SirEle solenoid) l c 1 : c Y L . 1 l IC2:CYL.2 lEl :EXH.r I {E2:EXH.2] Lubricant 1.

Mist Separator Series AM Model Series AM can separate and Model AM850 AM250 AM350 AM450 AM550 AM650 AM150 remove oil mist in compressed air Rated flow 750 1500 2200 3500 6000 12000 300 (1) (l/min (ANR)) which is difficult to remove by Port size ordin

3 8 1 2 , AM350 3 4 Related poroducts 1 2 3 4 , AM450 1 2 , 1 1 1, 1 AM550 AM650 3 4 AM450SAM, #4 AM550SAM, #5 AM650SAM, #6 AM150SAM, #1 AM250SAM, #2 AM350SAM, #3 4.6-4 Series AM Dimensions: AM850 Accessory D: With auto drain (N.O.) for AMD850 Options T: With element service indicator Dimensions with mounting bracket Mdel Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180

VMx-OMP0001

1.41.6Nm 8 2 VR2110 3 01.0MPa 0.250.8MPa 0.560s (*) 10 (%) F.S. oC( -560 3/ (s C (dm 0.6 [1 (P) 2 (A) ] 0.5 [2 (A) 3 (R) ] bar) ) b 0.2 [1 (P) 2 (A) ] 0.15 [2 (A) 3 (R) ] Rc, NPT, G1/8 ON Delay 480g (*) 4 4 V R 2 1 1 0 01 01 Rc 1/8 N01 NPT 1/8 F01 F01 2 G 1/8 9 5 VR 1 ON Delay 0.560 () () 1 ON OFF 6 (1) 2 0.5MPa 2 10 (2) VR2110 3 )0.25MPa A 60sec (), (S) 0.8MPa 40sec

Micro Mist Separator with Prefilter AMH Model Model AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Series AMH can separate and (1) remove aerosol state oil mist in 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) compressed air and remove Po

It should be used as prefilter of compressed air for precision instruments or clean room required for higher clean air. (1) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min(ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , Weight (kg) 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Note 1) Max. flow capacity at a pressure of 0.7MPa

VZA200/400

1 3 Port Air Operated Valve Series VZA200/400 Specifications SA Fluid Air 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VZA2 2, 2 4 1 2 1 2 VZA4 2, 4 4 1 2 1 2 VA Operating pressure range (MPa) 0.1 to 1.0 0.15 to 1.0 VZA2 2, 2 4 0.1 to 1.0 0.15 to 1.0 SA Pilot pressure range (MPa) Impact/Vibration resistance (m/s2) Note) 150/50 VA Operating pressure Pilot pressure Note) Impact resistance: No malfunction from

99

How to Order Elements EJ T S 701 002 Element seal T PTFE Element classification EJ HEPO 2 Element size symbol Filtration accuracy (Filtration efficiency 99%) 701 801 901 For FGH100 For FGH200 For FGH300 002 004 006 013 2 m 4 m 6 m 13 m 70 HEPO 2 Element for FGH Series EJ Series Construction EJ701S, 801S, 901S FGD FGE FGG Reinforcement material FGA FGC FGF FGH FGH Filter media FQ1 FN EB ES

AKH/AKB Series Check Valve with One-touch Fitting

Port size NPT Model Model 10-32 UNF M5 3/8 1/8 1/4 1/2 3/8 1/8 1/4 1/2 AKH04 AKH06 AKH08 AKH10 AKH12 AKH03 AKH07 AKH09 AKH11 AKH13 4 6 8 10 12 5/32" 1/4" 5/16" 3/8" 1/2" From one-touch fitting to male thread B Bushing Type AKB 01 A 01 S With sealant (standard) Body size Port size 01 1/8 01 1/8 Thread type 02 1/4 02 1/4 03 3/8 Nil R 03 3/8 04 1/2 N NPT 04 1/2 Check valve free flow direction

VF1000-OMP0001

) ) ) ) PE 1) 1) 1) 1) 2) 2) 2) 2) PE PE (AMC ) 3 3 3 3 (A,B) (N.C.)N.O.3 3 B (CYL.1) A (CYL. 2) N.C.

AR Series Modular Type Regulator

Assembly of a piston and a seal (KSYP-13). 454 Regulator AR10-A to AR40-A Series Dimensions AR10-A to AR40-06-A 2 x P1 (Port size) J A AC-A AF-A B C AF-A OUT IN H AR-A AR-A V AL-A Q AW-A (Pressure gauge port size) Pressure gauge (Option) 2 x P2 AC-B R S AF-A F AF-A U D Bracket (Option) AR -A -B N J M T AL-A AW -A -B Panel fitting dimensions AW Y AG W E AV IN OUT AF Z Plate thickness AR10-

Compact Low Friction Cylinder Series MQQ ø10, ø16, ø20, ø25, ø30, ø40

M5 x 0.8 2 x 4-OA effective depth RA 2 x 4-OB Depth of counterbore RB F Q Y I 4-N through 0.2 D E M L B + Stroke K 0.2 A + Stroke M E 25, 30, 40 H effective thread depth C 2-Rc1/8 (NPT1/8, G1/8) F Q Y 2 x 4-OB Depth of counterbore RB 2 x 4-OA effective depth RA J I 4-N through 0.2 D W E M K L B + Stroke 0.2 A + Stroke M E (mm) Bore size (mm) Stroke range (mm) Note) A OA B C D E F H RB I J

Pressure Relief 3 Port Valve with Locking Holes

) Exhaust (OUTEXH) Model IN, OUT EXH C(dm3/s-bar) b Cv C(dm3/s-bar) b Cv VHS20 1/8 1/8 4.0 0.41 1.1 3.7 0.42 1.1 1/4 5.8 0.31 1.4 3.8 0.42 1.1 6 VHS30 1/4 1/4 8.8 0.44 2.4 8.0 0.46 2.3 3/8 14.1 0.28 3.5 7.8 0.46 2.2 1/4 9.5 0.49 2.8 13.3 0.47 3.6 VHS40 3/8 17.2 0.47 4.8 13.6 0.47 3.7 3/8 1/2 26.7 0.29 6.3 13.4 0.43 3.7 -6- 4.

VQ1000V-OMV0001

5.0XC Q = [dm 3/min(ANR)] S [mm 2] P1 [MPa] P2 [MPa] t = [] ) ) ) DIN ) DIN 0.40.6Nm No.VQ1000V-OMV0001 9 - 1) 2) 1) 1) 2) OFF DC 3% AC 8% 3 Assy Assy 1) OFF DC 3% AC 8% 2) 3) 1 1-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 1-2) 1-3) 10 No.VQ1000V-OMV0001 2 2-1) 2-2) 2-3) 2-4) Assy 3R 1set 200cc (at 0.5MPa) 3-1) VQ1000 : 0.250.35Nm VQ2000 : 0.50.7Nm 3-2) 4 11 No.VQ1000V-OMV0001

Air Preparation Equipment Degrees of quality Max. particle diameter ( µ m) Min. pressure dew point ( ° C) Max. oil density (mg/m 3 ) International Standard ISO 8573-1: 1991 Degrees of Quality Japanese Industrial Standard JIS B 8392-1: 2000 Degrees of Qual

Selection of air quality by purpose For these cases, degree of quality is 15 4 +3 5 specified as 1, 4, and 2 respectively. 40 5 +7 25 Refer to Guide (1). Refer to Guide (2). Refer to Guide (3). Refer to below piping system chart. Refer to Guide (4) page 14-14-4.

Speed Controller for Low Speed Operation with One-touch Fitting Series AS-FM Elbow Type/Universal Type (Resin Body) 1

How to Order 2 2 0 0 01 M AS Option Body size None With seal Nil S 1 2 2 Meter-out Meter-in M5 standard 1/8, 1/4 standard Type Direct cylinder elbow type Control type M5 and U10/32 are not available with seal.

AFF

(3 pcs. each) AI-2S 2BJIS 10KFF 3BJIS 10KFF 4BJIS 10KFF Model AFF2B AFF4B AFF8B AFF11B AFF22B AFF37B AFF75B AFF75A AFF125A AFF150A AFF220A Model Note) Rated flow (l/min (ANR)) 300 750 1500 2200 3500 6000 12000 12000 22000 28000 42000 AFFB AFFA , , , , , , , , , , , flange 3B flange 4B flange 4B 2B 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 2 3 4 Port size (Nominal size B) 3 4 2 11 2 1 1 1 2 1

High Speed Pilot Operated

Flow Rate Characteristics Operating Frequency Port size Valve flow rate characteristics 70 Ambient and fluid temperatures (Upper limit) [C] 1, 5, 3 (P , EA, EB) 4, 2 (A, B) 1 R 4/2 (P R A/B) 4/2 R 5/3 (A/B R E) Model 60 C [dm3/(sbar)] b C [dm3/(sbar)] b DXT1215 1/8 1/8 1.3 0.37 1.3 0.23 50 Calculation of effective area S and sonic conductance C: S = 5.0 x C 40 30 20 10 0 0 200 Operating

AMH

AMH250 AMH350 AMH450 AMH550 AMH650 AMH850 AMH150 Model Note) 500 1000 2000 3500 6000 12000 200 Rated flow (l/min (ANR)) Port size (Nominal size B) 1 8 1 4 3 8 1 4 3 8 1 2 3 8 1 2 3 4 1 1 2 3 4 1 3 4 1 1 1 2 1 2 1 2 , , , , , , , , , , , 0.38 0.55 0.9 1.4 2.1 4.2 10.5 Weight (kg) Note) Max. flow capacity at pressure of 0.7 MPa. It varies depending on operating pressure.

Booster Relay Series IL100

x 6.6 2 10 62 21 5 105 2 52 OUT SIG IN OUT SIG 3 x Rc1/4 60 IL211 14.5 Panel fitting dimension 58 45 Panel 35 Max. 4 2 x 6.6 2 52 10 137 62 31 21 5 SIG OUT IN1 OUT1 SIG 2 IN2 OUT2 OUT 5 x Rc1/4 60 IL220 14.5 Panel fitting dimension 2 x 6.6 45 58 Panel 35 Max. 4 2 18 57 10 130 2 OUT IN1 SIG 30 15 4 x Rc1/4 IN2 60 58