Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 6, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.15～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 10, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 20, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 40, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Cylinder (Tube) Inner Diameter(φ): 10, Stroke(mm): 50, Cylinder Operation Method: [Double Acting] Double Acting, Rod Operation Method: Single Rods, Main Body Shape: Guided, Additional Function: Standard, Environment, Applications: Clean Room, End Locking: No, Valves: No, Operating Pressure(MPa): 0.1～0.7, Cushion: Rubber cushion, Specification: Clean Series (relief type), Port thread type:

Regulator Unit Combination: Filter Regulator, Port Size: Rc1/8, Filter Rating: 5μm, Maximum Operating Pressure(MPa): 1, Case Material: [Metal] Metal, Case Guard: No, Exhaust Structure: Relief type, Flow Direction: [Standard Flow (Left to Right)] Left to right, Drain Cock: [Not Provided] No, Pressure Gauge: [With Standard Pressure Gauge] Round-shaped pressure gauge (with color zone), Size

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Standard, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Yes, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1 1/4, Control Side Connection Type: Rc, Control Side, Connection Diameter: 1 1/4, Pressure Gauge

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1 1/4, Control Side Connection Type: Rc, Control Side, Connection Diameter: 1 1/4,

Regulator, Pressure Boosting Valve: Regulator, Regulator Type: Precision Control, Shape: Standard, Operating Environment: Standard, Compatible Fluid: Air, Exhaust Mechanism (Air Bleed): [Included] Relief, Reverse Flow Function (Relief): No, Supply Side Connection Type: Rc, Supply Side, Connection Diameter: 1 1/4, Control Side Connection Type: Rc, Control Side, Connection Diameter: 1 1/4,

Maintenance part name: Finger, Cylinder inner diameter(ø): 12, Stroke(mm): 12, Finger option: Basic type

Maintenance part name: Finger, Cylinder inner diameter(ø): 12, Stroke(mm): 12, Finger option: Top/bottom surface tap

Maintenance part name: Finger, Cylinder inner diameter(ø): 12, Stroke(mm): 12, Finger option: Whole surface tap

Connection Type: Related Components, Related Components, Shapes, Types: [Nuts] Nut, Material: [Copper] Brass, Surface Treatment: Nickel Plating, Applicable Pipe Fitting Size(mm): 12, Sealant: -, Suitable operating environment: Standard

Type: One-Touch Coupling Related Parts, Fitting Type: Other shapes, Tube Size 1(φ): -, Application: Standard/Mini, Shape: [Others] Other, Compatible Fluid: Air, Tube Material: -, Number of Connection Tubes(piece): 12, Connector Type: Cover, Options: -

Type: One-Touch Coupling Related Parts, Fitting Type: Other shapes, Tube Size 1(φ): -, Application: Standard/Mini, Shape: [Others] Other, Compatible Fluid: Air, Tube Material: -, Number of Connection Tubes(piece): 12, Connector Type: Cover, Options: -

Fluid: air/inert gas, Operating pressure range: 0.15 - 1.0MPa, Effective area mm 2 (Cv): 2 position metal seal 36.0 (2.0); 2 position rubber seal 39.6 (2.2) 3 position metal seal 19.8 - 36.0 (1.1 - 2.0); 3 position rubber seal 21.6 - 39.6 (1.2 - 2.2), Coil rated voltage: 12, 24VDC; 100, 110, 200, 220VAC, Response time (ms) standard 1W: metal seal 12 or less to 55 or less; rubber seal 15 or

The LES series electric slide table actuator uses a compactly-integrated, recirculating linear guide for high rigidity and high precision. When the LES is ordered with the controller, initial data of the actuator is preset in the controller allowing start-up in a short time with the in.easy modein.. Two types of built-in motors * are available. The series can be top or bottom mounted. In