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Problem Possible cause Investigation method Countermeasure "M" in the part number means that the unit cannot be changed. : The unit change function is not Improper model selection (Selection of model "without unit conversion function") Check if there is a "-M" at the end of the part number printed on the product 13 The unit cannot be changed. available in Japan due to a new measurement law

-22No.PS-OMG0001CN-H , (2030 ) -23No.PS-OMG0001CN-H PSE300 ( ) No.1 ON ON OFF Yes No No.2 OFF ON No.1 OFF No.3 No.4 No.5 No.6 No.7 -24No.PS-OMG0001CN-H No.8 Yes No No.9 No.9 No.10 No.11 No.12 No.13 No.14 No.15 No.16 -25No.PS-OMG0001CN-H No.

No.PF-OMO0005-F PRODUCT NAME Digital Flow Switch MODEL / Series / Product Number PFMB7201 Contents Safety Instructions 2 Model Indication and How to Order 10 Summary of Product parts 13 Definition and terminology 14 Mounting and Installation 16 Installation 16 Piping 19 Wiring 21 Outline of Settings [Measurement mode] 25 Flow Setting (set value only) of OUT1 OUT2 [3 step setting mode] 26

No.PF-OMO0004CN-E // PFMB7201 2 10 13 14 16 16 19 21 [] 25 OU1OUT2 {3 ] 26 28 [] 28 28 F0 29 F1 OUT1 31 F2 OUT2 39 F3 44 F10 45 F13 46 F20 47 F22 48 F30 49 F31 50 F80 OFF 51 F81 52 F90 53 F98 55 F99 56 57 61 62 64 65 65 68 71 -1No.PF-OMO0004CN-E (ISO/IEC)(JIS) *1) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic

No.PF-OMO0007CN / / PF2A7## 2 10 12 13 15 15 16 17 19 20 21 22 25 F_1 26 F_2 () 27 F_3 28 30 31 32 32 34 35 35 37 38 40 -1No.PF-OMO0007CN (ISO/IEC)(JIS) 1) 2) 1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (

No.PF-OMN0012-H PRODUCT NAME Digital Flow Switch (Remote type monitor unit) MODEL / Series / Product Number PF3W3## Table of Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product parts 12 Definition and terminology 13 Mounting and Installation 15 Installation 15 Wiring 16 Flow Setting 21 Function Setting 24 Default settings 25 F0 Selection of sensor 26 F1 Setting

No.LFE*-OMY0008 / / / / / / / / LFE# SMC SMC SMC SMC 2 11 13 14 16 18 19 21 24 26 26 F1 OUT1 28 F2 OUT2 36 F3 40 F10 41 F20 45 F22 46 F30 47 F32 48 F33 50 F34 51 F80 52 F81 53 F82 54 F90 55 F98 56 F99 57 58 60 61 64 66 67 70 71 1 No.LFE*-OMY0008 (ISO/IEC) (JIS) 1 2 1) ISO 4414:Pneumatic fluid power -General rules relating to systems.

Doc.No.LFE*-OMZ0013 Product Name Flow Monitor Model/ Series/ Product Number LFE0### SMC Corporation Contents Safety Instructions 2 Model Indication and How to Order 9 Summary of Product Parts 10 Definition and Terminology 11 Mounting and Installation 13 Installation 13 Wiring 14 Setting the Detected Flow Rate 17 Function Setting 19 Default Setting 19 F 0 Selection of sensor 21 F 1 Setting

Dynamic viscosity [m2/s] Viscosity [Pas] Density [kg/m3] Formulas below can be used for common units 1cP = 1mPas = 10-3Pas 1cSt = 1mm2/s = 10-6m2/s 13 Working Principle 1. When air is supplied, it passes through the switching valve and enters drive chamber B. 2.

PAB-OM-B005-A PRODUCT NAME Process Pump MODEL / Series / Product Number PAX112 Series Contents Safety Instructions -P.2 to 3 Names and functions of parts P.4 Precautions P.5 to 10 Applicable Fluids P.11 Specifications P.12 Performance Curve P.13 to 14 Working Principle P.15 Maintenance Parts P.16 Piping and Operation P.16 Dimensions P.17 1 Safety Instructions These safety instructions are

Note 2) Operation is possible with a valve with small Cv value when the operation cycle is small. 13 How to Order 14 8.

Sensor mounting (leakage sensor) -P.13 1 Safety Instructions These safety instructions are intended to prevent hazardous situations and/or equipment damage. These instructions indicate the level of potential hazard with the labels of Caution, Warning or Danger.

Length (mm) Peak pressure (compared with existing product) 8 2000 2 times 10 1300 2.5 times 13 800 3 times In SMC test conditions. Refer to page 5 for the relation between the upstream piping and peak pressure. Oscillation may occur when supply air is insufficient. Upstream piping I.D. Must be larger than 8. Be careful that pressure drop does not occur. 2 4.

O O O 12 13 14 8 VN-OMP0002 Revision history 1st printing : Py 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021 JAPAN Tel: + 81 3 5207 8249 Fax: +81 3 5298 5362 URL http://www.smcworld.com Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2011 SMC Corporation All Rights Reserved VN-OMP0002

XL-OMY0001 L // XLA-2 2 11 4 , 2.2 5 , , , , 33 7 4. 9 5 11 6. 13 7 14 1 XL-OMY0001 *1) *2) (ISO/IEC) (JIS) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements) ISO 10218: Manipulating

(Refer to Section 6 Parts Replacement Procedure (pages 10 to 13) for details.) Piping Caution Maintenance Warning Caution 4 XL-OMO0001-A 2. Product Specific Precautions 2 Common Precautions 2 Be sure to read before handling Maintenance Parts Caution The bonnet assembly should also be replaced when changing the seal material.

No.XL-OMY0002 L // XLD XL-OMY0002 2 11 4 , 2. 2 5 , , , , 33 7 4 9 5 11 6 12 7 13 8 14 9 15 10 16 1 XL-OMY0002 *1) (ISO/IEC)(JIS) *2) *1) ISO 4414: Pneumatic fluid power -General rules relating to systems ISO 4413: Hydraulic fluid power -General rules relating to systems IEC 60204-1: Safety of machinery -Electrical equipment of machines (Part 1: General requirements

(Use dust-free gloves.) 13 XL*-OMJ0005-C Step 5 O-ring Bellows holder Wipe off any dust from the valve seal O-ring and the Bellows holder surface.

XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.

External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation XMH KF(NW),CF KF(NW) KF(NW),CF KF(NW) Flange type XYH KF(NW) KF(NW) KF(NW) Main material Body: SCS13 (SUS304), Bellows: SUS316L,, Main part: SUS304 and FKM (standard sealing material) Operation torque 0.1 or more 0.15 or more 0.35 or more 0.5 or more Number of handle rotations 5 7 10 13