Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: B (Body: Brass; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL,

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port

ZISE20B.eng

Operation light (OUT2) URL http://www.smcworld.com Lever Brown Black White Gray Blue 5 4 3 2 1 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 OUT1 OUT2 FUNC DC(-) Lead wire (Brown) button button Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation

ZISE20B-L.eng

Operation light (OUT2) URL http://www.smcworld.com Lever Brown Black White Gray Blue 5 4 3 2 1 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 OUT1 NC NC DC(-) Lead wire (Brown) button button Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation

PSxx-OME0003CN

(IN15 V) A A PSE200/PSE300 (ZS-28-C) M() 37104-3101-000FL Tyco Electronics() 3-1473562-4 () XN2A-1430 () -9No.PS-OME0003CN-F PSE200 PSE300 15V 1 k () -10No.PS-OME0003CN-F (A/D ) () 20 2030 -11No.PS-OME0003CN-F PSE530 PSE531 PSE532 PSE533 01 MPa 0-101 kPa 0101 kPa -101101 kPa -0.10 MPa 10.10 kPa -10.10 kPa 1.5 MPa 500 kPa DC1224 V10%(p-p)10%() 15 mA () DC15 V() DC0.61 V() 1 k (25

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: B (Body: Brass; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port,

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL,

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: B (Body: Brass; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 5PC [5 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 4-Gauge Port In, 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL,

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4P [4 Ports (1-In; 2-Out; 4-Gauge Port In; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: V15 [-30 in.Hg to 15 psig (-0.1 to 0.1 MPa)], Gauge Port, Inlet: V15 [-30 in.Hg to 15 psig

Series VQ1000 10- Base Mounted 21- Plug-in Unit

Note 4) M5 fittings for M5 thread are attached without being incorporated.

ZISE20A.eng

Operation light (OUT2) 5 4 3 2 1 Brown Black White Gray Blue URL http://www.smcworld.com Lead wire (Brown) OUT1 OUT2 FUNC DC(-) Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 button button Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2017 SMC Corporation

ZISE20.eng

URL http://www.smcworld.com Lead wire (Brown) OUT1 Black 4 NC 3 NC 2 DC(-) Blue 1 Akihabara UDX 15F, 4-14-1, Sotokanda, Chiyoda-ku, Tokyo 101-0021, JAPAN Phone: +81 3-5207-8249 Fax: +81 3-5298-5362 Note: Specifications are subject to change without prior notice and any obligation on the part of the manufacturer. 2015 SMC Corporation All Rights Reserved PS-OMS0008-A

VFR2000-OMM0001

SSR )AC 1) (C-R )OFF 2)() ZNR 1V -10 -5No.VFR2000-OMM0001 5 5 5 5 1.5~2 1) 2)1 ()ISO VG32 MSDS 3)2 ()ISO VG32 M5 1/61/4 1.5Nm Rc Rc1/8 79 Rc1/4 1214 -6No.VFR2000-OMM0001 5 5 5 5 ( ( ( ( ) ) ) ) 5m 3 30 () 1 VG32 2 ()ISO VG32 -7No.VFR2000-OMM0001 G : DC +(+)(-) E T D Y :DIN +-No.1 No.2 T :68mm E :2.32.8mm D :68mm Y :4.57mm AB+ B+COM -COM ET :1.25-31.25-3S1.25Y-3N 1.25-31.25-3S1.25Y

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: S (Body: 316 SS; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 3P [3 Ports (1-In; 2-Out; 5-Gauge Port Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL, 5PC), Gauge Port, Inlet: No Gauge Port, Gauge

Delivery Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: B (Body: Brass; Poppet: 316 SS; Diaphragm: 316 SS), Ports: 4PL [4 Ports (1-In; 2-Out; 3-Extra Bottom Port Out; 5-Gauge Port Out)], Connections, Inlet: 4T (1/4 Inch Compression), Connections, Outlet: 4T (1/4 Inch Compression), Gauge Port, Extra Bottom Outlet: 0 (No Pressure Gauge, Connections: 1/4 Inch NPT for Port 4PL,

Operating Pressure: 01 [0.5 to 10 psig (0.0034 to 0.07 MPa)], Material: S (Body: Brass; Nozzle: 316 SS; Diaphragm: 316 SS), Ports: 2P [2 Ports (1-In; 2-Out)], Connections, Inlet: 4 (NPT 1/4 Inch), Connections, Outlet: 4 (NPT 1/4 Inch), Gauge Port, Inlet 3: No Gauge Port, Gauge Port, Inlet 4: No Gauge Port, Pressure Gauge Unit: psig/bar (or None in Case of no Gauge), Seat Material: Viton®