SMC Corporation of America
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Search Results "E600L-10-D"

Selection of Dip Switch 10. Driving 45 10-1. Setting of Origin Direction 10-2. Adjustment of Air Balance 11. Error Messages & Countermeasures 46 11-1. Controller 11-2. Brake Units Life Span 12. Appendix 50 12-1.

The mounting position D-M9V D-M9WV D-M9AV D-M9 D-M9W D-M9A D-P3DWA Common Model A B E G A B E G L A B E G L D F H MHM-16D 9.1 9.1 4.6 5.6 8.1 12.8 11 MHM-16D1 *1 *1 *1 32.6 20.6 16.1 MHM-16D2 9.1 9.1 4.6 2.1 MHM-25D 14.6 14.6 10.1 4.6 7.1 17.5 17 MHM-25D1 *1 *1 *1 43.6 31.6 27.1 MHM-25D2 14.6 14.6 10.1 9.5 4.6 2.6 2.8 14.3 6 4 MHM-32D 19 19 14.5 3.8 6.3 22.5 23 MHM-32D1 *1 *1 *1 51.8 39.8

set unit Note 1) Accumulated pulse flow rate exchange value (Pulse width: 50 ms) Note 1) 0.1 l/pulse 0.5 l/pulse 1 l/pulse 2 l/pulse 5 l/pulse l/min, CFM x 10-2 l, ft3 x 10-2 l/min, CFM x 10-1 l, ft3 x 10-1 Display units Real-time flow rate Accumulated flow Note 1, 2) 0 to 9 l, 0 to 9 ft3 x 10-2 0 to 9 l, 0 to 9 ft3 x 10-1 Accumulated flow range Note 1) Power supply voltage Current consumption

ID 0 1 2 1 063 1ABS() 3 1 ) 2INC() 4 H 2 065500 mm/s 5 L 6 3 7 2 4 2147483647 0.01mm 8 1 9 0 ID1 10 H 2 065500 mm/s2 11 L 12 H 2 065500 mm/s2 13 L 14 1 030 10% 15 1 030 10% 16 1 0255 mm/s 17 1 030 10% 18 H 2 065500 0.01mm 19 L ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ) 0 12 36 - / Bit No.

10.4 56 20.3 32.2 21.9 15.7 15.8 25.2 14.8 6.8 VR1210F-06 6 12.8 12.8 53.2 35.6 25.2 16.8 16.8 23.0 22.5 VR1210F-08 8 15.2 15.2 60.4 8.1 38.2 28.2 18.7 18.7 24.0 VR1220F-06 6 12.8 12.8 59 7.4 37.7 25.2 16.8 16.8 27.2 23.9 19.8 VR1220F-08 8 15.2 15.2 65 8.2 39.7 28.2 18.7 18.7 31.9 VR1220F-10 10 18.5 18.5 71.6 9.8 25.8 44.8 31 20.8 20.8 43.2 Inch sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4

-04 14.8 6.8 6 12.8 12.8 53.2 35.6 25.2 16.8 16.8 23.0 VR1210F-06 22.5 8 15.2 15.2 60.4 8.1 38.2 28.2 18.7 18.7 24.0 VR1210F-08 6 12.8 12.8 59 7.4 37.7 25.2 16.8 16.8 27.2 VR1220F-06 23.9 19.8 8 15.2 15.2 65 8.2 39.7 28.2 18.7 18.7 31.9 VR1220F-08 10 18.5 18.5 71.6 9.8 25.8 44.8 31 20.8 20.8 43.2 VR1220F-10 Inch sizes Weight g Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 1/8" 11.4 8.4 52 6.2 19.4

(inch) " Model Connection thread 5 32 " 1 4 " 5 16 " 3 8 Male connector KSH 10-32 UNF 1 8 NPT NPT 1 4 K NPT 3 8 M Male elbow KSL 10-32 UNF H NPT 1 8 NPT 1 4 D NPT 3 8 MS T VMG Precautions Be sure to read before handling.

(Valve) SYJ300-10-1A .1 pc. (Blank plate ass'y) SS3YJ3-42R-03-C4 .1 pc. (Manifold base) SYJ314R-5G .2 pcs. (Valve) SYJ300-10-2A .1 pc.

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

24 24 24 24VDC VDC VDC VDC Class Class Class Class2 2 2 2 UL UL UL UL Listing Listing Listing Listing ( ( ( ( ) ) ) ) D D D D ( ( ( ( ) ) ) ) ! 0~55 -8- NOx 0.1ppm a.0~55 b.35~65%RH c. d. e. f. g. h. i.() j. k. l. m. n. (IDF )(AF/AFF )(AFM/AM , -9- 4 4 4 4-2. 2. 2. 2. 4-2-1. D D 4-2-2.

D-F6N D-F6P D-F6B Wiring type 3-wire type 2-wire type Output type NPN PNP Applicable load IC circuit / relay / PLC 24 VDC relay / PLC Power supply voltage 5/12/24 VDC (4.5 to 28 VDC) Current consumption 10 mA or less Load voltage 28 VDC or less 24 VDC (10 to 28 VDC) Load current 40 mA or less 2.5 to 40 mA Internal voltage drop 0.8 V or less at 10 mA load current (2 V or less at 40 mA load

Solid state auto switch: D-M9B, D-M9N B E Model Auto switch operating range Stroke Stroke A 40 50 150 100 75 100 10 20 30 125 75 20 30 125 150 10 40 50 13-/22-MXS6 0.4 0.4 0.4 11.6 17.5 9.6 9.6 9.6 21.6 27.6 1.5 10 13-/22-MXS8 4.9 0.1 0.9 8.9 16.9 41.9 14.9 9.9 10.9 18.9 26.9 51.9 1.5 11.6 13-/22-MXS12 74.4 32.4 22.4 12.4 14.4 24.4 22.4 12.4 2.4 4.4 14.4 35.4 64.4 2.5 45.4 15.6 13-/22

be mounted. 14-10-2 E-P HYREG Series VY1 Standard Specifications 02 03 04 04 06 10 02 03 04 VY1A0 0 1-M5 VY1B0 0 1M 0 5 1 VY110 0 10 0 1 2 VY120 0 10 0 1 2 VY130 0 1VY140 0 1VY150 0 1VY170 0 11 1 0 2 VY190 0 11 2 4 0 Model VY1D00-M5 10 M5 01 M5 Port M5 01 02 01 02 02 03 20 04 02 03 04 04 06 10 12 14 P Port size Rc 11 2 1 1 8 1 8 1 4 1 8 1 4 1 4 3 8 1 2 1 4 3 8 1 2 1 2 3 4 1 1 1 4 A M5 M5

10 28.4 (Mounting holes) 3.5 25 2.5 5 5 10 22 16.4 10 3.2 222 4 (Mounting holes) Manual override (Non-locking) M3 0.5 (Pilot port) M3 0.5 (Pilot port) A B 11 17.5 1(Bleed port) 1.5 A B 1.5 1.5 5-M3 0.5 (Piping port) 33 36 Manual override (Non-locking) B P R R 7 7 36 2 35 7 13.5 28.5 15 A 21 R2 P R1 13 1(Bleed port) 11 10 4 15 10 10 5-M5 0.8 (Piping port) 14 14 15 (Bracket) 2 Position double

Leakage 1 x 10 -10Pam3/s 1 x 10 -10Pam3/s 1 x 10 -5Pam3/s VCR compliant Swagelok compliant 1 x 10 -5Pam3/s Confirmation of the atmospheric pressure of a load lock chamber Applicable Fluid Examples VCR and Swagelok are registered trademarks of Swagelok Company.

) Note 10) Note 10) Note 10) Note 10) Note 10) use pressure within the specification range.

: 45 oC 12 12 10 10 Cooling capacity [kW] Cooling capacity [kW] 8 8 6 6 4 4 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [oC] Circulating fluid temperature [oC] 50Hz 60Hz Fig. 9-5 Cooling capacity(HRS090-A-20/40/46) 9.4.2 HRS090-W-20/40/46: Facility water temperature 32 oC : Facility water temperature 40 oC 12 14 12 10 10 Cooling capacity [kW] Cooling capacity

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-15 Connection of RS-232C HRS Series 3.3Installation 3-27 HRX-OM-S004 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Combinations such as C-FV, D-FHV, J-ST are not possible.) : Not available F H R S U T V Symbol Auto drain specifications Nil Auto drain 3 Symbol Nil Description C D J Drain cock (Without auto-drain) N.C. auto drain N.O. auto drain C D 3 Refer to Auto Drain Specifications/Option Combinations.