SFOD-OMT0010

(f) Input the step data No. 2 (INx). (g) Turn the "DRIVE" input ON. Step data No. 2 (OUTx output) will be output. (h) The AREA output will turn OFF. The BUSY output will turn ON and INP output will turn OFF. (The positioning operation will start). (i) The AREA output for step data No.2 will turnON (at 170mm from the origin point).

ARX Series

ARX21 mm Nil F Thread type G Pressure gauge Rc(PT) NPT G(PF) Nil N F ARX20Nmm ARX21Nmm P Port size Panel nut 1/8 1/4 01 02 Option combination numbers Panel nut is also included with B.

AMP

P-80 (YG)

® Fieldbus System Series EX600

D-sub connector (25 pins) Note1) 2) Spring type terminal block (32 pins) Note1) 2) DY EX600 Digital Output Unit Output type Number of outputs and connector Description PNP NPN Number of outputs 8 outputs 16 outputs 16 outputs Symbol Connector Symbol P N B E F M12 connector (5 pins) 4 pcs.

Series SJ2000/3000 D-sub Connector / Flat Ribbon Cable / PC Wiring Plug-in Connector Type

Plug-in Connector Type D-sub Connector / Flat Ribbon Cable / PC Wiring Series SJ2000/3000 How to Order P Connector type manifold SS5J 3 60 D F 1 U 05 Series SJ2000 SJ3000 (SJ2000/3000 mixed) DIN rail length specified 2 3 Nil 3 Standard length 3 stations 24 stations Specify a longer rail than the standard length.

ZB-OM00301

PVPD ZB0020-K1L(O)-P 1 3 1 3 35 - No.ZB-OM00301 // PV=PD ZZBZB31-K1D U / PVPD ZZB-SM5 ZB31-Q1L(O)E F D U / PVPD ZZB-SM5 ZB0030-K1L(O)E F D U 36 - No.ZB-OM00301 ZB1/2-K1 46 ZB3-K11 40 g ZB1-PS-A 5 ZB1-ZS-A Assy 14 1 2 3 4 5 6 7 8 9 10 11 12 g 16 22 28 34 41 47 53 60 66 72 79 85 ++ 5 40g 5 + 5g 5 + 41g 266g 37 - No.ZB-OM00301 0.3 N.C. / ZB03-K1/J1 (0.35MPa

IDX-OM-V024

C P J Unit: mm M N O L K H Power cable entry [IDFB60-11: Power cord with plug, length 110(2800)] Unit :inch (mm) Model Port Size A B C D E F G H J K L M N O P 12.1 29.3 23.8 6.3 15.9 26.8 2.8 13.0 27.7 14.0 5.0 IDFB60 R1 (307) (745) (605) (161) (405) (681) 3.7 (71) 1.8 (330) (704) (355) (126) 0.5 (94) (46) (12.5) 13.5 35.0 32.5 6.9 18.9 35.6 2.7 14.4 33.4 15.4 3.2 0.8 IDFB70 R1-1/2 (342)

Air Slide Table Series MXS

Bore size (Stroke (mm)) 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 10, 20, 30, 40, 50, 75, 100, 125 10, 20, 30, 40, 50, 75, 100, 125, 150 10, 20, 30, 40, 50, 75, 100, 125, 150 6 8 12 16 20 25 Functional option Standard With buffer With end lock Axial piping type With buffer and end lock With buffer, Axial piping type Nil F R (2) P FR (2) FP Adjuster option Note

MXQ

Option Combinations Functional option Nil F R P FR FP Adjuster option Adjuster option Nil Without adjuster Extension end adjuster Retraction end adjuster Double end adjuster Extension end absorber Retraction end absorber Double absorber Extension end metal stopper Retraction end metal stopper Double metal stopper Nil (3) (3) (3) AS AT A BS BT B CS CT C ASBT ASCT BSAT BSCT CSAT CSBT AS AT

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Compact Hydraulic Cylinder Double Acting/Double Rod Series CH
QWB ø 20, ø 32, ø 40, ø 50, ø 63, ø 80, ø 100

(mm) H I J K L B U Z A N O P S C D E F M Bore size (mm) 32 M10 x 1.5 60 4.5 14 8.5 65 31.5 14 82 5.5 9 depth 7 Rc 1/8 58.5 12 16 45 20 34 40 M10 x 1.5 69 5 14 8.5 67 35 14 84 5.5 9 depth 7 Rc 1/8 66 12 16 52 22 40 50 M12 x 1.75 86 7 18 11 76 41 19 98 6.6 11 depth 8 Rc 1/4 80 15 20 64 25 50 63 M12 x 1.75 103 7 18 11 80 47.5 19 102 9 14 depth 10.5 Rc 1/4 93 15 20 77 27 60 80 M16 x 2 132 6 22

30

G P H A R E B Standard type Pneumatic: to 1 MPa (mm) Applicable cylinder bore size Maximum thread depth P Model Nominal size Pitch Allowable eccentricity U Maximum operating tensile and compressive force N Center of sphere R M A B D E F G H Weight kg JC20-8-125 JC30-10-125 JC40-14-150 JC63-18-150 30.5 34 38 47.5 0.03 0.05 0.12 0.23 300 800 1250 3100 13 17 22 27 8 9 13 15 0.5 0.5 0.75 1 7

Compressed Air Preparation Filter

Dimensions [mm] Auto drain (1.0 MPa) Auto drain (1.6 MPa) Drain guide B C D E F G Bracket related dimensions Model Port size A H I J K L M N O P AFF70D, AM70D, AMD70D 1, 1 1/2 391.5 379.5 382 31.5 144 136 68 23 40 124 82 48.4 90 18 9 16 10 2.6 AFF80D, AM80D, AMD80D 1 1/2 404 392 394.5 38 170 160 80 23 40 148 93.5 58.5 110 22 11 20 12 3.2 AFF90D, AM90D, AMD90D 1 1/2, 2 470 458 460.5 38 170

AME

G N NPT P . 14-20-57 3 4 1B Misc. 10 14 1 B 1 2 20 2B Caution Note) Refer to How to Order Bowl Assembly on page 14-20-59.

AMH

M Dimensions with mounting bracket Model Port size (Nominal size B) A B C D E F G S 6.0 , 2 1 H 463.5 I 180 J 30 K 15 L 24 N 120 O 184 P 220 Q 110 R 18 460.5 AMH850 1 2 13 42 348 220 57.5 220 10 Please refer to Made to Order Specifications of Series AMH on pages 14-20-55 to 14-20-57. 14-20-35

XSA Series

Exterior dimensions Grommet: G Face seal fitting / compression fitting Terminal part Flat terminal connector 250 Series Model A B Bs C D E F L M P [inch] Grommet: G Grommet: GS Conduit: C Fast on: F DIN terminal: D Terminal: T G H G H G H G H G H J G H J XSA1-2S 22 55 24 63 30 8.5 20 3 8 27 53.5 30 40 47.5 47.5 23 53.5 64.5 45.5 52.5 99.5 47.5 68.5 -2V 50 1/4 XSA2-2S 63 31.5 73.5 63 32.5

ML1C

OO PP QQ RR SS TT UU VV Model Applicable gasket ML1C25 ML1C32 ML1C40 10 14 37 24 8 27 20 8 C11.2 16.5 18 46 30 12 32 22 8 C11.2 17 23.5 12.5 10 53 40 34 26 C14 A B C D E F G H I J K L M N O P Q R S T U V W Y Z Model ML1C25 ML1C32 ML1C40 274 260 137 140 88 108 87 85.5 60 74 97 100 42.5 26 34 206 28 24 5.6 9 5.5 M5 x 0.8 8.5 M6 x 1 9.5 11 M8 x 1.25 322 306 161 160 108 131 101 99.5 64 92 118

Air Slide Table Series MXJ

) Fig. (1) Overhang: Ln (mm), Correction Value of Moment Center Position Distance: An (mm) Pitch moment Yaw moment Roll moment F F My L1 A1 L2 A2 A1 Mp W L1 A1 Mr Static moment Dynamic moment Graph (1) Load Mass: W W W MXJ4 A3 L3 L2 A2 0.10 L3 A3 Rubber stopper Mr Load mass W kg Mp 0.08 My Metal stopper W 0.06 W W 0.04 Mey Mep We 0.02 We L3 L2 A2 0.00 Collision speed V mm/s (Average speed

Speed Exhaust Controller Series ASV Size: M3, M5, 1/8, 1/4, 3/8

Exhaust port (EA) Supply port (P) Exhaust port (EB) Fig. Example of the interference with fittings Series AK Caution 1. Vibrations may generate due to operating conditions, etc., even if the specifications are in the range mentioned in the catalog. Please consult with SMC. Note) Use Series AS-F with -X214 for the throttle valve. 2.

VEX1

Body size Port size Port M5 01 Nil M5 01 1(P), 2(A), 3(R) M5 IR-A A Body ported 8 1 Without sub-plate M5 IR Base mounted B Position for port P1 8 1 IRV 3 VEX1 3 10 G 5 VEX VEX SRH Regulator valve Option Bracket Foot Pressure gauge Silencer for bleed port Dimensions of port P1 B F G SRP Type Precision regulator Operation Air operated type Manual knob type Fixed orifice SRF