Digital Pressure Switch ( compatible)

Nil (Rear piping) L (Bottom piping) Bracket A A1 ZS-46-A1 Bracket C A3 ZS-46-E B ZS-46-B Panel mount adapter E ZS-35-B D ZS-46-D Panel mount adapter + Front protective cover F ZS-35-E -9No.PS-OMX0002-A Accessories/Part numbers If an option is required independently, order with the following part numbers. Items Part No.

4

D-G

Solenoid Valve (with M Connector) Conforming to ISO 15407-1 Series EVS1-01, 1-02

0.26kg Size 02 (3-position): 0.18kg Series EVS1-01/1-02 How to Order FG S EVS1 01 3 M0 Valve Thread type Size Nil F T 01 02 Rc Size 01 G Size 02 NPTF Passage symbol Port size (A) 4 (B) 2 Size 02 Size 01 Piping specifications Symbol Nil A01 A02 FG Without sub-plate 1 (P) 5 (R1) 3 (R2) Side-ported 1/8 (A) 4 (B) 2 Side-ported 1/4 FHG Number of solenoids 1 (P) 5 (R1) 3 (R2) Sealing type S D

Sine Rodless Cylinder Series REA

ZZ + Stroke Model B C D E(h8) I K L NA Q x R S TC x R W X ZZ REA50 REA63 0 86 32 53 30-0.033 32-0.039 58.2 25 110 55 M8 x 1.25 x 16 176 M12 x 1.25 x 7.5 60 60 180 100 38 66 72.2 26 122 69 0 M10 x 1.5 x 16 188 M14 x 1.5 x 11.5 70 70 192 Mounting nuts/2pcs. packaged with each cylinder d C H d B C Part No.

AR20-B to AR60-B

J Bracket (Option) AR20(K)-B to AR40(K)-06-B 2 x P1 Panel fitting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 73 Regulator Series

Series 10-VQD1000 4 Port Direct Operated Poppet Solenoid Valve

Series 10-VQD1000 [Option] 4 Port Direct Operated Poppet Solenoid Valve How to Order Valve Clean series Valve option Nil Standard (2 W) V Vacuum (2 W) U For large flow (3.2 W) W For large flow, Vacuum (3.2 W) Energy saving type Rated voltage 5 24 VDC 6 12 VDC Body type 2 Body ported (Single unit) 3 Body ported (Manifold) 5 Base mounted 10 V Q D 1 1 5 1 U 5 L M5 Electrical entry

Vacuum Pad with Ejector ZHP Series Pad Diameter: ø63, ø80 ZK2 ZQ Ejector and pad are integrated. ZR Space saving and reduced piping labor! Bellows type with groove ZB ZA Two-stage ejector ZX More efficient ejector 30% reduced 50% increased ZM Air Suction

7.3 D C B A PD port size Metric size: Rc1/8 Inch size: NPT1/8 Supply Port Dimensions [mm] Dimensions [mm] N C4 4.7 C6 4.7 N3 4.7 N7 7.3 A B C D E F ZHP63BM 26 45.8 63 68 12.5 33.8 ZHP80BM 28 57 80 85 18 41.8 ZHP63UM 26 63 66 5 20.3 ZHP80UM 26 80 83 5 20.3 Circuit Adapter Dimensions (by Mounting Style) [mm] G H J K L M ZHPmmmA-mmS 25.7 22.6 5 13 M8 ZHPmmmB-mmS 27.1 21.2 6 17 M10 ZHPmmmC-mmS

Large blow and

Suction air Discharge air Suction air U C C B Hose band V (mm) A 73 B 34 C 19 D 10 E 13.2 F 16.2 G 69.8 H 31 I J 35 K 27 L 4.5 M 35 N 18 O P 13 Q Rc1/8 R 28 Sa M3 x 0.5 Sb 5 T 300 U 150 V 190 Model ZH10--X185 ZH20--X185 4 1 M4 x 0.7 8 400 200 250 119.5 55 32 15 19.5 23.5 111 48 56 48 4.5 56.5 29 21.6 Rc1/4 44 ZH30 40--X185 Without bracket Air pressure supply (P) port Thread size: Q 45 45

HRX-OM-W032

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig. 3-13 Connection of RS-232C HRS Series 3.3 Installation 3-25 HRX-OM-W032 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly. Incorrect piping might cause leakage of supplied or drained fluid and wet surrounding area and facility.

MHx-OMZ0003

D-M9N-5 ( ) D-M9N-5 3 NPN IC PLC DC51224V(4.528V) 10mA DC28V 40mA 10mA 0.8V (40mA 2V ) DC24V 100A ON CE RoHS D-M9N-5 M2.54L 15 - 5. 5-1. 1. () 2. 3. 4. 1. 5-2. 1. 2. 3. 4. Nm JMHZ2-16D M3x0.5 0.59 16 - M6x23 6.3Nm M4x10 1.0Nm 17 - P165-2. M3x7 0.59Nm 18 - (0.7mm) 19 - 5-3.

Fieldbus system (SI unit – PROFIBUS DP compatible)

Correspondence between output data and valve manifold : Output numbers are assigned to stations from side D to U of manifold in order. (See manual of each valve manifold for the directions of side D and U) : Standard manifold is wired in double. Output numbers are assigned to side A and B alternatively. In case of single solenoid valve, output on side B is free.

Clean Exhaust Filter

Hold the end of the tubing and insert it all the way in. 840 Clean Exhaust Filter SFE Series Dimensions SFE11 Gasket M5 9 4 25 SFE42/52/53/73 Dimensions (mm) C A Model A B C D SFE42 10 62 16.5 R1/8 SFE52 10 71 20.5 R1/8 SFE53 17 75 20.5 R1/4 SFE73 17 84 24 R1/4 D B SFE3A 4 13.5 59 SFE4B/5C/7D AN A C Dimensions (mm) AMC Model A B C SFE4B 6 73 16.5 SFE5C 8 84 20.5 SFE7D 10 94 24 B AMV AMP SFE

Table of Contents

Specific Product Precautions. 126 127 127 128 129 130 131 131 131 134 135 136 138 139 139 139 143 146 148 150 151 152 152 153 154 155 156

VG342

Push type (Non-locking) Unrestricted 150/50 Shock/Vibration resistance (m/s2) (2) Terminal no. 2 () Manual override Mounting orientation 48 VDC In the case of indicator light assembly Terminal no. 1 (+) 1.1 kg Weight For grommet type Note 1) Based on dynamic performance test JIS B 8374-1981.

Miniature Guide Rod Cylinder Series MGJ

D-X Individual -X 261

SMC CORPORATION OF JAPAN

Current models and models scheduled for release in 1999 include; ECC-PNAL-6MR-A, ECC-PNAL-10MR-A, ECC-PNAL-10MR-D, ECC-PNAL-10MT-D, ECC-PNAL-20MR-A, ECCPNAL-20MR-D, and ECC-PNAL-20MT-D. 1.1.2 Product Conguration Check the contents of the ECC-PNAL-PCS/WIN-E box against this list to conrm that the following accessories are supplied.

1 D. P. Lube (Unit) Series ALD(U)600/900 F.R.L. Standard Specifications  Centralized control of multi-point (1) D.P . Lube D.P . Lube Unit Model name lubrication AV ALDU600 ALDU900 ALD900 ALD600 Model  Low oil consumption volume 1 1 1 4 1 4 3 4

Lube Unit Mounting thread M12 Float switch mounting position J (Bracket mounting dimensions) Panel (Option) Bracket (Option) A B C D E F G H J K L M N P Q R S Model Port size ALDU600-06 ALDU600-10 ALDU900-12 ALDU900-14 ALDU900-20 43 10 57 51 16 67 77 85 90 100 283 296 424 424 476 4 3 135 345 460 145 90 150 480 20 430 470 175 87.5 30 62.5 1 1 1 2 615 615 682 419.2 209 4 1 250 125 33.2 33.2

Series DXT474

Push-locking slotted type [D] Disconnection To remove the socket from the connector, pull out lead wire while depressing the hook of the socket with a fine screwdriver. If the socket is to be re-used, reposition the hook again. Caution Gently operate locking manual override types B, D using a small screw driver.

Series SY100 3 Port Solenoid Valve Rubber Seal

Lead wire Hook Caution Plug Connector Lead Wire Length Gently operate locking manual override styles B, D using small screwdriver. [Torque: 0.1Nm or less] Standard length is 300mm, but the following lengths are also available.

Electro

4 60 PSI (4kg|/cm') 6 90 PSI (6kglicm") lnput Current 0-4-20mADC(standard) . l 1 5 m A D C ' 2 2 1 0 m A D C ' 3 5 2 5 m A D C *4 10 50 mADC ' Special Order o ,,' Ogeration'/ Construction Model MmOO(Lever type) Single acting, Normal operation When the input current increass, the armature witt be subjected to a clockwise torque, pushing the flapper lever to the teft.