D-M9V, D-M9WV D-M9A D-M9AV A B W A B W A B W A B W 12 6.2 6.2 3.8 6.2 6.2 1.8 6.2 6.2 5.8 6.2 6.2 3.8 16 6.7 6.7 3.3 6.7 6.7 1.3 6.7 6.7 5.3 6.7 6.7 3.3 20 7.5 10 7.5 10 7.5 10 2 7.5 10 25 8 12 8 12 8 12 8 12 Auto Switch Mounting Height U [mm] Auto switch model Bore size D-M9V, D-M9WV, D-M9AV U 12 19.5 16 21 20 23 25 24.5 W A B A Operating Range [mm] Auto switch model Applicable
Output 1 Output 2 A B C Dimensions D3 D2 L5 M2 IN L3 L2 L4 OUT IN D1 M1 M1 Applicable tube dia. d L1 Metric Size Weight (g) Model d D1 D2 L3 L2 D3 L1 L4 L5 M1 M2 VR1211F-23 3.2 11.4 8.4 52 6.2 25.7 36.1 17.5 12.7 12.9 26.4 14.8 VR1211F-04 4 12.8 10.4 56 26.6 38.5 21.9 15.7 15.8 30.4 6.8 VR1211F-06 6 12.8 12.8 53.2 28.8 41.9 25.2 16.8 16.8 25.0 Inch Size Weight (g) Model d D1 D2 L3 L2 D3 L1
Order with the option symbol -D to specify DIN rail mounting style. The DIN rail is approximately 30 mm longer than the length of manifold. Series VQ20 L dimension 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 17 18 19 20 Stations No.
L1 A Width across flats H1 KNS-R02-075-4 KNS-R02-090-8 KNS-R02-100-4 KNS-R02-110-8 0.75 x 4 0.9 x 8 1 x 4 1.1 x 8 R 1/4 R 1/4 R 1/4 R 1/4 14 14 14 14 20 20 20 20 14 14 14 14 D 2 A Connection thread H1 L1 Copper extension nozzle: KNL (mm) Model Nozzle size D Outside diameter L1 Outside diameter KNL3-06-150 KNL3-06-200 KNL6-06-150 KNL6-06-200 1.5 2 1.5 2 6 6 6 6 300 300 600 600 D L1 Note)
Construction/Parts/Dimensions AN10-C to 30-C B Dimensions (mm) Sound absorbing material A B C d 6 Model AN10-C06 AN10-C07 AN15-C08 AN20-C10 AN20-C11 AN30-C12 A C (Resin sintered body) 36.5 11 14.5 1/4 45 13 20 8 Body (Resin) 10 57.5 16.5 30.5 3/8 71.5 20 43.5 12 d 3 Silencer Metal Body Type Series AN00 RoHS How to Order Noise reduction 30 dB(A) Low back pressure Easy mounting 500 AN 06 Port
(4) 2.9 14.5 psi (0.1 MPa) (20) 0.07 (2) 0 0 0 0.07 (2) 0.14 (4) 0.21 (6) 0.28 (8) 0 4 2 8 6 10 Suction flow SCFM (L/min (ANR)) Needle opening [rotations] The actual suction flow at the point of suction varies depending on the vacuum pumps piping conditions.
Branch Branch N.C. 1 N.C. 2 1 1 1 1 SD+ 3 2 2 2 2 SD4 3 3 3 3 N.C. 5 4 4 4 4 N.C. 6 N.C. 7 1 2 3 4 1 2 3 4 N.C. 8 Shield Controller CN4 Controller CN4 Description Pin No. Description Pin No. EMG+ 1 EMG+ 1 EMG2 EMG2 SD+ 3 SD+ 3 SD4 SD4 EN_SW+ 5 EN_SW+ 5 ON 6 ON 6 DC24V 7 DC24V 7 GND 8 GND 8 Shield Shield 30 - 9.
(P.20) < Applicable Auto switches > Solid state switch D-M9N(V)M9P(V)M9B(V) D-M9NW(V)M9PW(V)M9BW(V) D-M9NA(V)M9PA(V)M9BA(V) Reed switch D-A90(V)A93(V)A96(V) How to mount and move the auto switch Fig. 8 Note 1) For the tightening of the mounting screws (M2.5), use a precision screwdriver with a handle diameter of approximately 5 to 6 mm.
9, D-T99 D-9A, D-S99, S9P 90 High precision type MSUA 3 Single vane 7 D-R73, D-T79 D-R80, D-S79, S7P 180 D20 1 D-9, D-T99 D-9A, D-S99, S9P Single vane 90 3 Basic type MSUB 7 Double vane D-R73, D-T79 D-R80, D-S79, S7P 180 20 Double vane is available with 90 rotation setting only. 149 Rotary Table: High Precision Type Vane Style Series MSUA Size: 1, 3, 7, 20 How to Order Connection port location
As setting proportional gain (P constant) in clause 3 above, set integral time (I constant) within the range of 0.000 to 9.999 with (812), and set differential time (D constant) within the range of 0.000 to 9.999 with (813). or 5 Hold down the mode button ( ) for 1sec. or longer to return to parameter change mode. 6 Press the UP or DOWN button ( ) to select reverse direction (ruS).
D-Y7W D-Y7WV 10 2 pcs. 15 Auto Switch Proper Mounting Position (Detection at Sroke End) Auto Switch Proper Mounting Position Auto switch (mm) Auto switch model D-Z7/Z80 D-Y59/Y7P D-Y69/Y7PV D-Y7W D-Y7WV D-M9 D-M9V D-M9W D-M9WV D-A9 D-A9V Bore size (mm) A B A B A B A B 12 16 20 25 32 40 50 63 80 100 6 8 2 4 1 3 9 9 5 5 4 4 9.5 12.5 5.5 8.5 4.5 7.5 9.5 13 5.5 9 4.5 8 10.5 12 6.5 8 5.5 7 14.5
9 8 7 6 HEC012-W2l Power connector (AC) DDK CE05-2A18-10PD-D or equivalent Pin No.
SF4 5 D 5 D 23 Q VO307 CE-compliant Coil rated voltage CE-compliant Coil rated voltage CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz CE-compliant Nil Q 1 2 3 100 VAC 50/60 Hz 200 VAC 50/60 Hz 110 VAC 50/60 Hz 220 VAC 50/60 Hz 24 VDC 12 VDC 240 VAC 50/60 Hz Note) Electrical entry: D or DZ only 4 4 5 6 5 6 Manual
Alarm Display screen (Alarm message) Figure 6-1 Error Occurrence HRZD Series 6.1 Error Message 6-1 HRX-OM-M005 Chapter 6 Error Message and Troubleshooting 6.2 Troubleshooting The procedure for error recovery varies with alarm types.
EX600-DM E EX600-DM F EX600-DY B EX600-DY E EX600-DY F EX600-DX B EX600-DX C EX600-DX D EX600-DX E EX600-DX F 1 1 2 1 1 Description Function 6 6 6 6 2 3 2 3 Displays the status of the unit. 2 2 5 5 5 5 3 3 4 4 1 1 2 1 1 6 6 6 6 2 3 2 3 2 3 5 5 5 5 3 4 4 Valve plate mounting groove 1 1 6 6 Valve plate (EX600-ZMV ) 1 5 2 2 3 5 5 3 Direct mounting (1)When joining six or more units, fix the middle
D-A9V Solid state switches D-F9 D-F9V 2 color indication solid state D-F9W D-F9WV MXQ 6 MXQL 6 6 MXQ 8 MXQL 8 8 MXQ12 MXQL12 12 MXQ16 MXQL16 16 MXQ20 MXQL20 20 MXQ25 MXQL25 25 Function Options Adjuster Options With Buffer Mechanism With End lock Protects work pieces and tools, etc., by eliminating impact at the end of the extension stroke Buffer unit is auto switch capable Holds
A B C D Switch Internal Circuit Non-standard Motors: The following motors will be mounted when a motor mounted type is specified.
7 8 9 A B C D E F 8 6 4 2 40 38 36 34 32 30 28 26 24 22 20 18 16 14 12 10 Input/output connector (CS0) 3 7 5 1 39 37 35 33 31 29 27 25 23 21 19 17 15 13 11 9 Power supply terminal block 20 18 16 14 12 10 8 6 4 2 Input/output connector (CS1) 19 17 15 13 11 9 7 5 3 1 Green Red F E D C B A 9 8 7 6 5 4 3 2 1 0 4 3 2 1 CN1 4 3 2 1 CN2 4 3 2 1 CN3 4 3 2 1 CN4 4 3 2 1 CN5 4 3 2 1 CN6 4 3 2 1 CN7