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TERMINANAL STA D SIDE B A 7 2 4 B A Manual override 6 2 4 A B A B 5 SMC SMC SMC SMC SMC B A L2 L1 2 4 B A A B 4 B A Indicator light 2 4 B A A B 3 B A 2 4 B A A 2 A 44 P = 25 P = 25 50.5 2 4 B A A 1 A 4 2 Stations 38 26.5 (External pilot port) 2-Rc 1/8 R4.5 12 91 140 (Single) 16.5 149 (Double) 43.5 163 (3 position) 50.5 D side 59 96.5 Note) Shown VV5Q41-08C12TO-W 2-5-16 Base Mounted Series

A Hs 34.5 41.5 49.5 58.5 A 9 9 9.5 11 Hs 37.5 44.5 52.5 61.5 A 2 2 2.5 4 Hs 35.5 42.5 50.5 59.5 A 5 5 0 1 Hs 39 46 54 63 A 5 5 5.5 7 Hs 33 40 48 57 A 10 10 10.5 12 Size A 4.5 4.5 5 6.5 Hs 32 39 47 56 Hs 25 32 40 50 0.5 2 56.5 66 Operating range Minimum strokes for auto switch mounting (mm) (mm) D-A7H, D-A80H D-A79W D-F7, D-J79 D-F7W, D-J79W D-F7BAL, D-F7NTL D-F7F Bore size 25 Auto switch

Connector D-C73C, C80C Grommet D-B5, B6 Grommet (2 color indication) D-B59W Grommet D-H7 Grommet (2 color indication) D-H7W Grommet (2 color indication, latch type with diagnostic output) D-H7LF Grommet (2 color indication, with diagnostic output) D-H7NF Grommet (2 color indication, water resistant) D-H7BA Connector D-H7C Grommet (with timer) D-G5NT Auto Switch Mounting Brackets by Stroke

6 DC () Blue D-F9V Mounting screw M2.5 x 4l D-F9B, F9BV 4.3 Slotted set screw Indicator light 2 OUT (+) Brown Main switch circuit 20 2.7 2.8 4.6 OUT () Blue 3.8 3.1 6.2 4 Most sensitive position 6 18 2-Color Display Solid State Switches/Direct Mount Type D-F9NW(V), D-F9PW(V), D-F9BW(V) Auto Switch Specifications Grommet D-F9W, D-F9WV (with Indicator light) Auto switch part no.

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

V c J = m . r l 2 + 1 2 2 T I v I + I I ri J' r 2 4 d = m . ,#,*, a J = m . I a 'ilE' d !-::-!. mb= n, t r a+b l l ta2+c2 i a ' Ti+l 2 . ^ 2 12 ho'oo#" ' 1 J = n y r = m " . * * ' o . F Fig. 6.23 Formulae for the moment ol inertia of various body shapes To define this energy we need to know the inertia of the rotating mass.

Port aperture Switch model D-M9(V), M9W(V), A9(V) A Bore size (mm) A (Mounting groove number) B (Mounting groove number) C (Mounting groove number) D (Mounting groove number) (2) (2) (2) 32 D B (2) (2) (2) 40 Diagram seen from the piston rod 50 (2) (2) (2) C 63 (2) (2) (2) Operating Range Auto Switch Mounting Auto switch model Bore size (mm) 32 40 50 63 D-M9, D-M9V D-M9W,

1.5 PF3W740 1/2, 3/4 23.9, 29.9 26.9, 31.9 PF3W711 44 36 48 58 70 5.5 7 2 PF3W711 3/4, 1 41 -101No.PF-OMW0010-D PF3W721 Basic type Symbol Piping port size A AA B D E F G H J K L N P Model 11/4, 11/2 104 74 31 52 39.5 PF3W721 25 27.5 3.5 depth 14 G 11/4 108 76 33 54 41.5 56 91 71.6 28.5 54 G 11/2 112 78 35 56 43.5 -102No.PF-OMW0010-D PF3W704/720/740/711 (With temperature sensor) Temperature

are in inches. 3 2 4 A 4 A 4 A 4 A U side D side PWR OUT 0 1 Mounting 5 4 1P 1P 2 3 2 B 2 B 2 B 2 B 2 B PCI BUS IN BUS OUT Nil D D0 D3 Direct mounting DIN rail mounting (With DIN rail) DIN rail mounting (Without DIN rail) 7 8 1 2 3 4 5 Valve stations I/O Unit stations 1 2 For 3 stations Specify a longer rail than the standard length.

V c J = m . r l 2 + 1 2 2 T I v I + I I ri J' r 2 4 d = m . ,#,*, a J = m . I a 'ilE' d !-::-!. mb= n, t r a+b l l ta2+c2 i a ' Ti+l 2 . ^ 2 12 ho'oo#" ' 1 J = n y r = m " . * * ' o . F Fig. 6.23 Formulae for the moment ol inertia of various body shapes To define this energy we need to know the inertia of the rotating mass.

Minimum Strokes for Mounting of Auto Switches Unit: mm (in) D-Z7, Z8 D-Y5, Y6, Y7 DD-Y7W, D-Y7BAL 180, 200 2 pcs.

SY SYJ Specifications Max. operating pressure Min. operating pressure SX 0.8MPa 0.15MPa 5 to 50C 2.7mm 2(0.15) 180CPM VVQ1000-FPG-02 1set VQ1000-FPG-C6M5-D 2 pcs.

T 2 x P (Port size) D R V Q B C IN OUT Clearance for maintenance G Drain A AF30-A to AF40-06-A N T J M 2 x P (Port size) Bracket (Option) U D S V Q IN OUT B C 2 x P (Port size) Clearance for maintenance G Drain A E Clearance for maintenance G Drain A Applicable model AF10-A/AF20-A AF20-A AF30-A to AF60-A Optional/Semi-standard specifications With auto drain (N.C.)

AF-OMX0052-C PRODUCT NAME Air Filter MODEL / Series / Product Number AF20-(F,N)01(F,N)02(B,C)(-2,6,C,J,L,R,Z)-D AF30-(F,N)02(F,N)03(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)02(F,N)04(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF40-(F,N)06(B,C,D)(-2,6,8,J,R,W,Z)-D AF50-(F,N)06(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D AF60-(F,N)10(B,C,D)(-2,6,8,J,L,R,W,Z)-D Contents Page 1. Safety Instructions 2-7 2.

www.stevenengineering.com I 6.11 VACUUM VACUUM PADS SERIES ZP H O W T O O R D E R ZPT P A D V E R T I C A L T Y P E W I T H O U T B U F F E R ZPT V A C U U M E N T R Y ( A L S O M O U N T I N G T H R E A D D I A) P A D D I A M E T E R S Y M B O L T H R E A D D I A M E T E R 2~ 8 10~ 16 20~ 32 40 50 02 2 04 4 06 6 08 8 10 10 13 13 16 16 20 20 25 25 32 32 40 40 50 50 P A D M AT E R I A L Male

(mm) Lead wire type In-line entry Perpendicular entry In-line electrical entry type Auto switch model Finger position D-M9 D-M9W D-M9AL D-M9AVL D-M9V D-M9WV Air gripper model L Open 4 2 2 MHSJ3 MHSH3 -16D Closed 7.5 5.5 3.5 5.5 Open 4 MHSJ3 MHSH3 2 2 -20D Closed 7 5 3 5 Open 3 MHSJ3 MHSH3 -25D Closed 7 5 3 5 Open 1 MHSJ3 MHSH3 F -32D Perpendicular electrial entry type Closed 6.5 4.5 2.5

suppressor) D F Q D F Q 300 300 C R E Y C R E Y 1.5 1.5 B1 B B1 A A B 2 x P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole DIN terminal Conduit terminal D G1/2 S Q F Cable 6 to 12 34 D Q2 F (44) 31.5 32 25 R T E C R Y E C 1.5 1.5 S2 B B1 A A Y B B1 2 x P Port size 2 x P Port size U W M U W M X 2 x 5.3 Mounting hole X 2 x 5.3 Mounting hole (mm) Mounting

Sensors 9 Release for switching connector direction Applicable connector: D-sub connector (25P) (Conforming to MIL-C-24308) e d i s U e d i s D n 8 7 6 5 4 3 2 Stations 1 9 60 37 26 One-touch fitting [3(R), 1(P) port] Applicable tubing O.D.: 8 For top ported 4 4 4 4 4 4 4 4 3 R 2 P 1 2 2 2 2 2 2 2 29.6 13.1 7.5 43.5 58.1 P=11.5 One-touch fitting, thread piping [4(A), 2(B) port] Applicable

Communication connector (PROFIBUS-DP): M12, 5 pins (plug) 3 2 5 R 1 4 0 0 0 0 BUS 3 Description Function No. 1 1 12 1 1 Terminal +5V VP 1 X 2 2 P PWR Signal N R x D/T x D(N) 2 3 3 1 GND terminal DGND 3 Signal P R x D/T x D(P) 4 Shield ground SHIELD 5 Power connector: M12, 5 pins (Boss configuration differs from plug and communication connector.)

D-A79W BQ-1 D-F7l, J79, D-F7lV D-J79C D-F7lW, J79W, D-F7lWV D-F7BAL, D-F7lF, D-F7NTL 32/40 50/63 BQ-2 40/50 63 D-P5DW BQP1-050 The set of stainless steel mounting screws (with nuts) described below is available and can be used depending on the operating environment.