EX600-SDNA_eng (Default setting) 8 7 Configuration Mode Address X1 9 6 x10 x1 2 1 0 0 5 Mark C on the unit Mark B at cable end Mark A at cable end 4 Address 1 9 4 3 1 0 : : (1) 2 3 Input data + System diagnosis + Unit diagnosis (Up to 10 units) Input data + System diagnosis Input data only (Default setting) 8 7 9 6 6 Content 3 4 1 2 0 5 Content 5 0 (Default setting) 4 1 2 3 Node Address Data Rate 8 7 PGM
Min. 207 Panel 54 72.5 10 69.5 2 R1/8 74 40 7 30 OUT OUT IN 2 x M6 depth 10 2 x Rc1/4 Pressure gauge port Rc1/8 78 70 A 160
F A A Lr Lr = 200mm L X S 400 8 60 Table displacement (m) LXSH-150 Table displacement (m) Table displacement (m) 350 7 LXSH-150 LXSH-150 50 300 6 LXSH-125 LXSH-125 250 5 40 LXSH-125 LXSH-100 LXSH-100 200 4 30 LXSH-75 LXSH-100 LXSH-75 3 150 20 LXSH-50 LXSH-75 2 100 LXSH-50 LXSH-50 10 1 50 1 2 3 4 5 6 8 9 7 0 0 0 1 2 3 4 5 6 8 9 10 10 10 7 1 2 3 4 5 6 8 9 7 Weight (kg) Weight (kg) Weight (kg
Hole 3 1 5 22.2 22.2 3-1/4 111.5 3 1 5 15.7 2 4 40.3 2 4 JIS Symbol JIS Symbol 2 4 2 4 3 1 5 5 1 3 Cylinder ports are NAMUR hole pattern. Cylinder ports are NAMUR hole pattern. 3-12-4 5 NAMUR Interface 5 Port Solenoid Valve Series VFN2000N/3000N NAMUR Mounting Pattern Axis A-A' can be aligned to suit. A 24 VK M5 thread 8 deep, with or without insert depending on base material.
(With gaskets and screw) How to order manifold VVS31 1 0 05 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Thread type EXH port type Nil Rc Valve stations N NPT 1 Common EXH Bottom Side P Side Side A E T NPTF Side Side 1 0 G F Option 05 5 stations 10 10 stations
Start up procedure / Connecting to a computer . 5 2. 1 Preparation . 5 (1) Confirmation of product . 5 (2) Wiring . 5 (3) Installation of the Card Motor . 6 (4) Prepared and wired by the user. . 7 (5) Software installation . 7 2. 2 Controller settings . 8 (1) Start the setup software . 8 (2) Basic Parameter Setup . 9 (3) Step data setting . 9 3Start up procedureTest operation using a computer
Click here for details Port size (Rc) 06 08 10 12 16 20 24 3/4 1 1 1/4 1 1/2 2 2 1/2 3 Differential pressure indication Nominal filtration 0 4 5 005 010 020 074 105 5 m 10 m 20 m 74 m 105 m None Differential pressure indicator Differential pressure indication switch Note) Note) N.C. and N.O. common Note) The paper elements for water-glycol or emulsion is 10 m only.
M L Bearing type Compact type Slide Bearing Ball bushing bearing Bore size/Stroke (mm) Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50 Bore size 6 10 Auto Switch Specifications (Refer to the WEB catalog for detailed specifications and auto switches not in the following table.)
10 O-ring: FKM Internal leak Note 2) (Pam3/s) O-ring: Kalrez 6.5 x 10 9 6.5 x 10 8 Internal leak Note 2) (Pam3/s) at reversed pressure [Reversed pressure: 0.1 MPa (abs) or less] O-ring: FKM O-ring: Kalrez 6.5 x 10 7 6.5 x 10 11 External leak Note 2) (Pam3/s) Gate part 5 to 150 Operation temperature Note 3) (C) Actuator part 5 to 60 Inert gas Fluid 0.6 to 1 Operating time Note 4) (s) FKM,
Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) Set of left nos. !5, !6, !7, !8, @1. HYCB32-PS HYCB40-PS HYCB50-PS HYCB63-PS 32 40 50 63 !5 !6 !7 !8 19 @1 Cushion seal Rod seal Resin NBR (FKM can be selected.) 1 HYCB50H-PS Set of left nos. !5, !6, !7, !8, @1.
Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) Piston seal NBR 20 25 32 HYG20-PS HYG25-PS HYG32-PS !5 !6 !7 18 !9 Rod seal NBR (FKM can be selected.) O-ring (Rod end) NBR (FKM can be selected.) Set of left nos. !5, !6, !7, !9. Place the seal material symbol in .
*(CEU5**-D)EMC CEU5) 5. 5-1 () CE1 14.5mT CE1 15000 18cm 5-2 0.1mm 0.0 0.2 0.1 A B (1)0.8mm (2) sin cos 2 0.8mm (3)1/8 90,0.1mm/ (4)0.1mm 5-3 CE1 A /B 90 A B 3 2 2 1 1 0 A ON90B ON B ON90A ON A B 6. 6-1 11 11 DC12V DC24V DC12V24V CEU5 CEU5 MODE 2 90 CEU5 4 10,11 SMC 13 CEU5 13 23m 23m () CEU5 11 AC 10 70500mm/s 12 6-2 5,6, 12 5 5,12 10 ?
R R 1. 2. 2 9 - 3-7 1 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 10 - 2 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 11 - M2.54 5 6 5~6mm 0.05~0.1 Nm90 D-Y59/Y69/Y7P/Y7PV D-M9(V) D-Y7W/Y7WV D-M9W(V) D-M9A(V)L MHL2-10D 0.8 0.3 MHL2-16D 0.5 0.4 MHL2-20D 0.5 0.7 ON MHL2-25D 0.5 0.6 OFF MHL2-32D 0.5 0.6 MHL2-40D 0.5 0.9 1. 2. 12 - 3-8
Please refer to page 16-4-5 for figure.
3.5 4 4.5 5 Time sec Test circuit/Conditions P1 P2 Pump SRF30-m 2 Clean Room Regulator/Fluoro Resin Type Series SRF30 Flow-through Characteristics Particulate Generation Characteristics Particle concentration (particles/ml) Particle diameter: 0.1m or larger 400 1000 Value of specific resistance to that of supplied DI water 350 300 Resistivity (km) 100 250 200 150 10 100 50 0 1 0 5 10 15
-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.
XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.
(mm) 4 6 8 10 12 3.18 4.76 6.35 9.53 12.7 2.5 4 5 6.5 8 2 3.18 4.23 6.35 8.46 Black (B) White (W) Red (R) Blue (BU) Burst Pressure Characteristics Curve Yellow (Y) Green (G) Clear (C) Orange (YR) Nominal size (inch) 5 32 " 5 16 " 1 4 3 8 " 3 16 " 1 8 " 1 2 " " Specifications Fluid Air, Water Max. operating pressure 0.8MPa at 20C Refer to pressure characteristics curve.
frequency [Hz] 70 50 150 100 Valve Construction 2-position single 2-position single Standard 5-port specification Made to Order 3-port specification (-X1) q w 3 (EB) 1 (P) 5 (EA) 3 5 1 3 5 1 2 4 2 4 Component Parts No.
Side D Side U (SI unit side) Communication connector Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories M12 5-pin Plug A-code 7 5 7 5 Bit No. 1 1 1 3 No. Description Function Valve manifold 2 3 SV24 V 1 +24 V for valve : Output numbers are assigned to stations from side D to U of manifold in order.