05-hyc-e Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) Set of left nos. !5, !6, !7, !8, @1. HYCB32-PS HYCB40-PS HYCB50-PS HYCB63-PS 32 40 50 63 !5 !6 !7 !8 19 @1 Cushion seal Rod seal Resin NBR (FKM can be selected.) 1 HYCB50H-PS Set of left nos. !5, !6, !7, !8, @1.
Grease for food part no.: GR-H-010 (10 g) Standard grease part no.: GR-S-010 (10 g) Piston seal NBR 20 25 32 HYG20-PS HYG25-PS HYG32-PS !5 !6 !7 18 !9 Rod seal NBR (FKM can be selected.) O-ring (Rod end) NBR (FKM can be selected.) Set of left nos. !5, !6, !7, !9. Place the seal material symbol in .
*(CEU5**-D)EMC CEU5) 5. 5-1 () CE1 14.5mT CE1 15000 18cm 5-2 0.1mm 0.0 0.2 0.1 A B (1)0.8mm (2) sin cos 2 0.8mm (3)1/8 90,0.1mm/ (4)0.1mm 5-3 CE1 A /B 90 A B 3 2 2 1 1 0 A ON90B ON B ON90A ON A B 6. 6-1 11 11 DC12V DC24V DC12V24V CEU5 CEU5 MODE 2 90 CEU5 4 10,11 SMC 13 CEU5 13 23m 23m () CEU5 11 AC 10 70500mm/s 12 6-2 5,6, 12 5 5,12 10 ?
R R 1. 2. 2 9 - 3-7 1 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 10 - 2 ON OFF ON ON 1 2 1 1 1 2 3 3 0.3~0.5mm 4 5 0.3~0.5mm 11 - M2.54 5 6 5~6mm 0.05~0.1 Nm90 D-Y59/Y69/Y7P/Y7PV D-M9(V) D-Y7W/Y7WV D-M9W(V) D-M9A(V)L MHL2-10D 0.8 0.3 MHL2-16D 0.5 0.4 MHL2-20D 0.5 0.7 ON MHL2-25D 0.5 0.6 OFF MHL2-32D 0.5 0.6 MHL2-40D 0.5 0.9 1. 2. 12 - 3-8
Please refer to page 16-4-5 for figure.
3.5 4 4.5 5 Time sec Test circuit/Conditions P1 P2 Pump SRF30-m 2 Clean Room Regulator/Fluoro Resin Type Series SRF30 Flow-through Characteristics Particulate Generation Characteristics Particle concentration (particles/ml) Particle diameter: 0.1m or larger 400 1000 Value of specific resistance to that of supplied DI water 350 300 Resistivity (km) 100 250 200 150 10 100 50 0 1 0 5 10 15
-l01 G43-10-l01 G43-10-l01 Refer to pages 427 and 430 for details of the modular applicable products and accessories.
XLH-16 XLH-25 XLH-40 XLH-50 16 25 40 50 5150 -6 Pa (abs) 110 l/s 1 5 14 45 80 10 FKM1.310 3/s Pam -11 FKM1.310 KFNW SUS316L,FKM Nm 0.1 0.15 0.35 0.5 5 7 10 13 0.23 0.41 1.05 1.62 1) 3-2.
(mm) 4 6 8 10 12 3.18 4.76 6.35 9.53 12.7 2.5 4 5 6.5 8 2 3.18 4.23 6.35 8.46 Black (B) White (W) Red (R) Blue (BU) Burst Pressure Characteristics Curve Yellow (Y) Green (G) Clear (C) Orange (YR) Nominal size (inch) 5 32 " 5 16 " 1 4 3 8 " 3 16 " 1 8 " 1 2 " " Specifications Fluid Air, Water Max. operating pressure 0.8MPa at 20C Refer to pressure characteristics curve.
frequency [Hz] 70 50 150 100 Valve Construction 2-position single 2-position single Standard 5-port specification Made to Order 3-port specification (-X1) q w 3 (EB) 1 (P) 5 (EA) 3 5 1 3 5 1 2 4 2 4 Component Parts No.
Side D Side U (SI unit side) Communication connector Output No. 1 3 5 7 9 17 29 31 Solenoid on side B Accessories M12 5-pin Plug A-code 7 5 7 5 Bit No. 1 1 1 3 No. Description Function Valve manifold 2 3 SV24 V 1 +24 V for valve : Output numbers are assigned to stations from side D to U of manifold in order.
81 11 M6 x 0.75 10 5 1 6.5 15 123 +0.08 0 32 5.5 10 M10 x 1.25 15 35.5 1/8 11 81 11 M8 x 1.0 12 5.5 1 7.5 24 123 +0.08 0 40 6 14 M14 x 1.5 19 44 1/8 11 92 12 M10 x 1.25 14 6 1.25 8.5 24 144 +0.08 0 50 +0.08 0 7 18 M18 x 1.5 19 55 1/4 11 107 13 M12 x 1.25 16 7.5 2 10 24 167 63 7 18 M18 x 1.5 19 69 1/4 11 107 13 M14 x 1.5 18 11.5 3 14.5 24 167 +0.08 0 80 10 22 M22 x 1.5 23 80 3/8 21 130 40
(Refer to Figure (1).) 4) Remove the cable gland (4) and plain washer (5) and rubber seal (6). 2. Wiring 1) Pass them through the cable (7) in the order of cable ground (4), washer (5), rubber seal (6), and then insert into the housing (2). 2) From the terminal block (3), loosen the screw (11), then pass the lead wire (10) through, then again tighten the screw (11).
22 19.5 17 32 10 13 8 45 6 8 33.5 5.5 15 30 M26 x 1.5 1/8 62 120 M10 x 1.25 26 22 19.5 17 32 12 13 8 45 6 8 37.5 5.5 15 34.5 M26 x 1.5 1/8 64 122 M10 x 1.25 26 24 21 22 41 14 16 11 50 8 10 46.5 7 21.5 42.5 M32 x 2 1/4 88 154 32 M14 x 1.5 (mm) Boss-cut ZZ Bore size (mm) 20 25 32 40 103 107 109 138 10
5 !6 q w e r t y u i Block packing !
No.EX-OML0010CN-C / / EX600-HT1A 2 8 8 9 10 10 11 12 12 13 1. I/O monitor(I/O ) 15 2. Diagnosis Data() 24 3. Sys. Configuration() 27 4. Parameter Setting() 33 5.
10 20 20 20 20 5 5 10 0 0 0 0 0 0 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0 2 4 6 8 10 12 14 16 Suction flow rate [L/min(ANR)] Suction flow rate [L/min(ANR)] Supply pressure [MPa] Supply pressure [MPa] ZU07SA Exhaust Characteristics Exhaust Characteristics Flow Rate Characteristics Flow Rate Characteristics ZU07LA 100 80 100 50 60 50 Vacuum pressure Vacuum
1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?
1 I.{ 50 114 139 13 100 10 t 15 5 9 5.5 v 74 4.5 AMG25O 3/8 '152 13 1 1 3 6 10 '| 69 n '12 4 84 a 5 2 n Ai/lc350 1/2 144 16 145 s s '10 198 m 2 14 7 80 100 g 2.3 ANtG450 314 205 19 147 106 106 JO s 10 14 88 1 1 0 3.2 AMG55O 239 200 10 257 100 s 10 't6 102 130 m 10 4.5 AIVG&5O 1 112 291 c 253 r60 160 10 364 150 .10 20 1 1 s 136 180 4.5 2 48 a 348 220 ?
10, 20 (Micromesh) Max. 3.5, 7, 14, 21 MPa Line Filter FH34/44/54/64 Series 3/8, 1/2, 3/4, 1, 1 1/4 1 1/2, 2, 2 1/2, 3 510 Differential pressure indicator (CB-H) Differential pressure indication switch (CB-H) Blanking cap Paper 5, 10, 20 Micromesh 5, 10, 20 Vertical Return Filter FHBA Series Max. 1.6 MPa 514 3/4, 1 1/4, 1 1/2 Differential pressure indicator (CB-H) Differential pressure indication