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Proof pressure (Inlet) Burst pressure Ambient and operating temperature Cv Select compatible materials of construction for the gas 15 psig (0.105 MPa) 30 psig (0.2 MPa) 45 psig (0.3 MPa) 90 psig (0.6 MPa) 150 psig (1.05 MPa) 300 psig (2.1 MPa) 300 psig (2.1 MPa) 600 psig (4.1 MPa) 450 psig (3.15 MPa) 900 psig (6.2 MPa) 14 to 160F (40 to 71C) (No freezing) 1) 0.3 2 x 10-11 Pam3/sec 2 x 10

The power supply for control and input, or the input device, is Off. 10 to 57 Hz: constant amplitude 0.75 mm p-p 57 to 150 Hz: constant acceleration 49 m/s2 DX E/DX F DY B/DY E/DY F Content Content Content DM E/DM F ST: STatus display LED ST: STatus display LED ST: STatus display LED

See Specific Product Precautions. 0.2 GD 0 0 10 20 30 40 50 Operating temperature (C) Port size Model Rated flow (L/min (ANR)) Note 1) Weight 60 80 100 100 100 100 300 400 500 500 35 g 35 g 35 g 35 g 60 g 150 g 190 g 190 g 190 g 260 g 4 (One-touch fittings) 6 (One-touch fittings) 8 (One-touch fittings) Rc, NPT, G 1/4 Rc, NPT, G 1/4 Rc, NPT, G 1/4 8 (One-touch fittings) 10 (One-touch fittings

installed ( 261.5 with AMC810-14 installed) L2 L1 P = 41 58.5 3 3 2 2 P=41 68.5 34.5 48 68.5 P=41 1 1 Stations Stations 34.5 48 D side entry (LD) ( 261.5 with AMC810-14 installed) 216 with AMC610-10 installed D side U side D side U side 100 with AMC610-10 installed ( 105 with AMC810-14 installed) 100 with AMC610-10 installed 100 with AMC610-10 installed 100 with AMC610-10 installed

OUT port size Material D side U side 1 2 3 4 5 n Symbol 01 02 Port size 1/8 (6A) 1/4 (8A) Stations Body material C37 Symbol Nil H Seal material FKM FKM 02 : 10 2 stations : 10 stations Stainless steel All IN ports are 3/8. Refer to the "L" dimensions on page 6 regarding the maximum number of stations.

zoo ~ ) 2 ~ i 100 E 12 z ,; 2 ~ E , E :; 100 V ~ " I ~ , , " , f< ' ~ 0 u: , ' l ~ ~ 0 w 0 5 10 ~ V " ~ 0 ] w 0 5 10 Needle revolullOOs (RevolutIOns) Needle revolutions (Revolutions) ASP530F ASP630F 12. 1500 'E 20 E 12 11~14:l~ z ~ ~ ~IOOO 15 . , g j " . 000 14 'E ' , ' h E cr z 12 ,; "'500 . l/ : 4 i 1,(" 0 to, 1~ OS, D9 10 ~ E ~ " , "' g 10 : ; ~.; 0 --:' 500 ~ ~ 5 :J" ~ -r ~ 0 w

Dimensions for installation L: Dimensions n: Number of stations L n 2 3 4 5 6 7 8 9 10 L1 133.4 166.4 199.4 232.4 265.4 298.4 331.4 364.4 397.4 L2 117 150 183 216 249 282 315 348 381 -11No.EX-OMY0021 Wiring Select the appropriate cables to mate with the connectors mounted on the SI unit.

Contact SMC representative for the applicable grease. 9/10 9-1. Model Selection 1 10/10 9-2.

Installation example Nm L 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 16 L1 45 55.5 66 76.5 87 97.5 108 118.5 129 139.5 150 160.5 171 181.5 192 202.5 213 L2 89.8 110.8 131.8 152.8 173.8 194.8 215.8 236.8 257.8 278.8 299.8 (mm) : L1 shows the dimensions of the VQC1000 series solenoid valve.

160C (40 to 71C) (No freezing) 1) 0.07 2 x 10-11 Pam3/sec 2 x 10-10 Pam3/sec 2) 4 x 10-9 Pam3/sec 2) Ra max 10 in. (0.25 m) Option: 7 in. (0.18 m), 5 in. (0.13 m) Face seal, Tube weld 0.20 psig (0.0014 MPa) rise in delivery pressure per 20 psig (0.14 MPa) source pressure drop Bottom mount 0.19 in3 (3.1 cm3) 0.99 lbs (0.45 kg) 3) Delivery pressure Gas Source pressure Proof pressure (Inlet)

Orifice size (mm) 2 3 4 5 7 10 Symbol 2 3 4 5 7 10 Class 3 Class 2 Class 4 Electrical entry G Grommet C Conduit Refer to the table below for orifice and port size combinations.

Example) AL30-03B-2R Symbol Description Body size 20 30 40 50 60 10 Metric thread (M5) Rc NPT G Nil Thread type N F + M5 01 02 03 04 06 10 M5 1/8 1/4 3/8 1/2 3/4 1 Port size + Nil B Note 1) Option (Mounting) Without mounting option With bracket + Polycarbonate bowl 1000 cm3 tank 1000 cm3 tank (with switch) Lowest limit ON 1000 cm3 tank (with switch) Lowest limit OFF Metal bowl Nylon bowl

(full spanfull-scale) 15[V]F.S. =5-1=4[V] (1F.S.=40.01=0.04[V]) 15 V 15 V 420 mA His ON OFF ON(OFF) 0 1 atm() 10 L/min 1 10 L ON OFF ON ( )OFF () 5 10 L/min 51050 L ON-OFF () / 1 L/min 101112 1 L/min -13No.PF-OMO0007CN (SI ) SI ON-OFF ON 0 20 1 atm()65R.H. -14No.PF-OMO0007CN 90270 IN OUT M4(4) 1.6 mm (39) -15No.PF-OMO0007CN 1.0 MPa IN8 IN IN OUT D D8 () () Rc(NPT)1/8 79 Nm Rc

14 45 80 160 200 Conductance l/s Note 1) Initial pumping 0.5 to 3 2 to 8 2.5 to 11 4 to 18 4 to 18 Internal 1.3 x 10-10 for the standard material (FKM) at ambient temperatures , excluding gas permeation Leakage Pam3/s External 1.3 x 10-11 for the standard material (FKM) at ambient temperatures , excluding gas permeation XMD KF(NW) KF (NW),CF KF(NW) KF (NW), K(DN),CF KF(NW), K (DN) Flange

Specifications Fluid Air Proof pressure 1.0 MPa Max. operating pressure 0.7 MPa 6 10 16 Min. operating pressure 0.12 MPa 0.06 MPa -10 to +70oC. -10 to +60o C with built-in magnet Ambient and fluid (No freezing) temperature Lubrication Not required (non-lube) +1.0 Stroke length tolerance 0 Cushion Rubber bumper Piston speed 50 to 750 mm/s 6 10 16 Allowable kinetic energy 0.012 J 0.035 J 0.090

-6.6 VM 81 88 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 94 VR VH 144(191) 144(191) 97(145) 97(145) VHS 8 (10) 8 (10) 125(136) 123(134) M8 x 1.25 M8 x 1.25 107.5 105.5 1 (P) 3 (R) 1 (P) 3 (R) 17 25 19 2 4-Rc 1/4, 3/8, 1/2 4-Rc 3/4 VH42-06 (Bottom ported

Bore size(mfn) Standard stroke(mm) MGOftl Slide bearing MGor12, rc 10, 20, 30, 40, 50 MGOr2o,2s 20, 30, 40, 50, 75, 100 25, 50, 75, 100 MGOL Ball bush bearing MGOr32,40, 50, 63, 80,1OO . intermediate stroke As to intermediate stroke (5, 10, 15, 20, 30, 35 )' spacer of 5, 10' 15,20mm width will be used (Example) MGOM50-10 is produced by installing 1smm spacel in MGQM50'25 Consult factory when