VZ3000

A E Push type A Push-locking type E Dimensions: Single Dimensions: VZ1120-G-M5-X1 Push type A (Push type A) Manual override Manual override (Non-locking) (Mounting hole for manifold) Push-locking type E (Piping port) Manual override (Push-locking type E) ( ) Pressing makes the valve operate.

Electric Actuator with Integrated Guide

a=1000 a=2000 a=3000 L2 (mm) Mer Rolling Yawing 100 m L2 Mer 0 30 20 10 m Transfer load m (kg) 200 a=1000 a=2000 a=3000 L3 (mm) 100 L3 m Mey a 0 30 20 10 Transfer load m (kg) Refer to page 71 for deflection data. 34 38 Non-standard Motor/Horizontal Mount Specification Series LTF6 Dimensions/LTF6EPF(X10) Scale: 20% Photo micro sensor 50 30 thread depth 8 4-M5 x 0.8 E D Proximity sensor (2

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

depth 6 +0.030 0 ( ) A B C , , Adjustment bolt Adjustment: Max. 8.25 2-5.5 through A port B port 2-M5 x 0.8 2-M5 x 0.8 depth 10 Chamfer Chamfer (Single vane) (Double vane) If the adjustment bolt is removed, rotation will be approximately 270 for the single vane type and 100 for the double vane type.

Antistatic One-touch Fittings Series KA

M5, M6 M5, M6 L2 M A D1 D2 L1 Part No.

KS/KX

(mm) Connection thread R Effective area (mm2) Min. port size <M5, M6> <M5, M6> Weight (g) M D1 D2 L1 L2 A Model Nylon Urethane M5 x 0.8 M6 x 1 KSL04-M5 KSL04-M6 KSL04-01S KSL06-M5 KSL06-M6 KSL06-01S KSL06-02S KSL08-01S KSL08-02S KSL08-03S KSL10-02S KSL10-03S KSL10-04S KSL12-03S KSL12-04S 20.5 21 22 8 9 4 12 10.4 21 16 2.5 3.5 3.5 23.5 23.5 1 8 M5 x 0.8 M6 x 1 12 14 22 21 21.5 23 2.5 3 3.5

MK

Example) M5 x 75l (MK2B) MK232/40 10 2 ML2B 6 Moment of inertia (kgm2) C J G5-S 4 MK220/25 CV 2 Mounting bolt 10 3 MVGQ 6 CC 4 Flat washer Operating range RB 2 Note) Be sure to use a flat washer to mount cylinders via through-holes. 10 4 J Model C D 75 85 80 90 90 100 80 90 105 135 105 135 Mounting bolt M5 x 75l M5 x 85l M5 X 80l M5 x 90l M5 x 90l M5 x 100l M5 x 80l M5 x 90l M6 x 105l M6

reduces flow setting time

Mounting Caution Caution For M5, 10-32UNF For G Thread (Face seal type) Tightening method Chamfered area for female thread (Recommended value) 1. Conforming to ISO 16030-2001, the chamfered dimensions shown in the First, tighten it by hand, then give it an additional 1/6 turn to 1/4 turn with a wrench. A reference value for the tightening torque is 1 to 1.5 Nm.

Compact Cylinder with Air Cushion and Lock Series RLQ

Circuit example CLJ2 Retraction locking: B Extension locking: F CLM2 W A B CLG1 1 A Emergency stop Drop prevention CL1 B W MLGC W A CNG B 2 A MNB W B CNA W CNS A A 3 CLS B B CLQ W RLQ W A MLU A 4 B MLGP B W ML1C Mounting Caution 1. Be sure to connect the load to the rod end with the cylinder in an unlocked condition.

Electric Grippers

B-1 A-1 B-2 A-2 B-3 A-3 Connector C terminal no. Signal Cable color S Standard cable Brown Red Orange Yellow Green Blue A A B B COM-A/COM COM-B/ 2 1 6 5 3 4 Cable color Connector D terminal no.

Series MHR2 11- 2 Finger Rotary Actuated Air Gripper 22- Size: 10, 15, 20, 30

thread) 76 73 120 80 120 A 54 Finger opening port M5 x 0.8 14 Finger closing port M5 x 0.8 M5 x 0.8 M5 x 0.8 25 25 Finger closing port Finger opening port 4 x M5 x 0.8 thread depth 10 M5 x 0.8 thread depth 5 Vacuum suction port (A, B common view) +0.02 0 2 x 5 depth 10 52 Auto switch mounting groove 16h9-0.043 0 (A, B common view) 22 35.8 2 70 (76) 10 2-3 3.8 4.7 47 25.5 11.5 2 x 4.2 2 4

3 Port Air Operated Valve

) VPA VPA 1P 3R 32 3 NO 7 VPA3 M5 x 0.8 (Breathing hole) 25.6 30.7 76.8 For vacuum/VPA542V-1(-F) 02 03 A B 1/4, 3/8 2(A) port 41.1 2 x 4.2 (For mounting) 26 NC 2A 3.5 (1.6) 31 25.6 91 (9) 2 x 4.2 (For mounting) 1/8 12(PA) port (Mounting groove for M5 thread) (5.4) 12 (45) 46 31.5 4 45 40 22.5 (50) 39.6 23.5 (60) (31.5) 1/4, 3/8 1(P), 3(R) port (Distance between ports) 1P 3R 32 3 NO 7 M5 x

Wedge Cam Operation Slide Guide Series MHK2 Air Gripper/2-Finger Type ø12, ø16, ø20, ø25

mounting groove (2 positions) 15 3 15 10 0 0.05 5 9 4 Note) For single acting, one port is used as a breather port. 7.5 21 M5 x 0.8 (Finger opening port) 2.5 MHKL2-20: Long stroke type 18.6 2 x M5 x 0.8 thread depth 8 (Mounting thread) 24 4H9 depth 4 + 0.030 0 21H9 depth 1.5 + 0.052 0 2 x M5 x 0.8 thread depth 10 (Mounting thread) 4 x M5 x 0.8 thread depth 10 (Mounting thread) Bottom hole

RLQ

RLQB32-20 RLQB32-25 RLQB32-30 RLQB32-40 RLQB32-50 RLQB32-75 RLQB32-100 RLQB40-20 RLQB40-25 RLQB40-30 RLQB40-40 RLQB40-50 RLQB40-75 RLQB40-100 RLQB50-30 RLQB50-40 RLQB50-50 RLQB50-75 RLQB50-100 RLQB63-30 RLQB63-40 RLQB63-50 RLQB63-75 RLQB63-100 M5 x 90l M5 x 95l M5 x 100l M5 x 110l M5 x 120l M5 x 145l M5 x 170l M5 x 100l M5 x 105l M5 x 110l M5 x 120l M5 x 130l M5 x 155l M5 x 180l M6 x 120l

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

A B High precision type Basic type Port location Nil E Side ported Front ported Size 1 2 3 7 A With adjustment bolt Dimensions Clean series products do not have a hollow axis.

3 Port Solenoid Valve Rubber Seal Series SY100

Flow Characteristics Manifold Port size Effective area (mm2) 2(A) port 1(P), 3(R) port SY13 SY13(A) SY13 SY13(A) SY14 SY14(A) SY14 SY14(A) 0.14 0.21 0.14 0.21 0.14 0.21 0.14 0.21 M3 x 0.5 M5 x 0.8 SS3Y1-30 M5 x 0.8 M3 x 0.5 SS3Y1-31 M3 x 0.5 M5 x 0.8 SS3Y1-S41 M5 x 0.8 M5 x 0.8 Note) Value at manifold base mounted How to Order Valve Manifold Assembly Example Stations3 2 1 Valve (N.C.)

3 Port Solenoid Valve Rubber Seal Series SY100 1

Type S41 How to Order Applicable solenoid valve Note) SY114SY114ASY124SY124AApplicable blanking plate assembly SY100-77-1A SS3Y1 S41 05 M3 Stations A port side 02 M3 M5 M3 x 0.5 M5 x 0.8 2 stations 20 20 stations P R R port M5 x 0.8 P port M5 x 0.8 A port M3 x 0.5 M5 x 0.8 Note) SY114(A) and SY124(A) cannot be mounted on the same manifold.

Fieldbus System

L1 4(A) port side: Blue (For rubber seal) : Gray (For metal seal) 2(B) port side:Yellow Light/surge voltage suppressor DIN rail B A A 14 A B A 14 A B 14 A B A 14 A B A A 14 (114.8) 97.5 113.4 116.7 101 1.4 81.2 5.5 B 12 B 12 B 12 B 12 B 12 10.9 34.2 L2 1.5 4 x M5 mounting hole [Communication connector D-sub] (Station n) (Station 1)-(Slide locking manual override) BUS OUT BUS 78.9 (12.9) 76.7

SZ3000

] Applicable tubing O.D.: 8 2n1-M5 x 0.8 [4(A), 2(B) port] (L4) L3 (3.2) 101.2 8 3.1 18 28.8 35 36.3 58.2 3.5 5.5 B B A A A A A (When equipped with switch) DIN rail Manual override Press and turn for the locking type.

SZ3000

4 A 4 A 4 A 4 X P 1 A 4 2n2One-touch fitting [4(A), 2(B) port] 13.3 (Pitch) P = 10.5 Applicable tubing O.D.: 4 6 24 16.2 34 17 36.7 B 2 B 2 B 2 B 2 B 2 R 3 A A 4 A 4 A 4 A 4 A 4 P 1 2One-touch fitting [1(P), 3(R) port] Applicable tubing O.D.: 8 2n1-M5 x 0.8 [4(A), 2(B) port] (L4) L3 (3.2) 101.2 8 3.1 18 28.8 35 36.3 58.2 3.5 5.5 B B A A A A A (When equipped with switch) DIN rail Manual override

VFS

A A A B B B P P P 1.0 MPa 1.5 MPa Set pressure range (1) 0.1 to 0.83 MPa 0.05 to 0.83 MPa Ambient and fluid temperature 5 to 60C (No freezing) Port size for connection of pressure gauge Weight (kg) Effective area at supply side (mm2) (2) S at P1 = 0.7 MPa, P2 = 0.5 MPa Rc 1/8 M5 x 0.8 0.16 5.5 5.1 P A P B 12 11 A EA B EB 0.83 38 40 11 12 26 24 32 31 21 18.5 35 31 44 38 90 77 0.46 18.5