EX600-LAB1_LBB1.eng

Red ON Short circuit at L+ or C/Q LED 1, 2, 3, 4 for I/Q (EX600-LAB1) Function LED status Description End plate bracket (EX600-ZMA2) OFF Input OFF I/Q Orange ON Input ON CAUTION indicates a hazard with a low level of risk which, if not avoided, could result in minor or moderate injury.

Process Gas Diaphragm Valve

OUTLET INLET Mounting hole Top view (Mounting hole on bottom) Porting Symbols OUTLET (Downstream) INLET (Upstream) 2PW 2PWA 2PWC q q q w 2 PORTS w w 3PWD 3PWE 3PWG 3 PORTS q q q e e e w w w 4PWM q e r 4 PORTS w 1114 A

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Option/Semi-standard symbol: When more than one specification is required, indicate in alphanumeric order. q Symbol Description Body size 20 30 40 50 60 25 Nil K Note 1) Without backflow function With backflow function With backflow function w + Nil N F Thread type e Rc NPT G + 01 02 03 04 06 10 1/8 1/4 3/8 1/2 3/4 1 Port size r + Nil B Note 3) H Note 2) a Without mounting option With bracket

Digital Flow Switch For Air/Water Series PF2A/PF2W

Real-time switch output Unit switching Hysteresis mode ON For Air YES OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l Real-time flow rate "P" Window comparator mode H : Hysteresis CFM x 10-2 x CFM x 10-1 ft3 x 10-1 H H CFM = ft3/min ON High Flow Rate Type (For Air) NO OFF P-1 P-2 Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 Real-time flow rate OUT1

Cylinder with Lock

2) (n = 2, 4, 6, 8)1 95 + 100 (n 2) (n = 2, 4, 6, 8)1 100 + 100 (n 2) (n = 2, 4, 6, 8)1 105 + 100 (n 2) (n = 2, 4, 6, 8)1 110 + 100 (n 2) (n = 2, 4, 6, 8)1 1 60 65 75 80 85 2 (Different surfaces) 70 75 80 85 2 (Same surface) n (Different surfaces) 70 + 30 (n 2) (n = 2, 4, 6, 8)1 75 + 30 (n 2) (n = 2, 4, 6, 8)1 80 + 30 (n 2) (n = 2, 4, 6, 8)1 85 + 30 (n 2) (n = 2, 4, 6, 8)1 D-A44 n

VQ7-6/7-8

Blank plate (filter, regulator) 4 Number of manifold blocks required for mounting (stations) 2 2 2 2 2 2 2 1 2 VQ7-6-FHG-D 4 Use of control units 2 VQ7-6-FG-D 1) The supply pressure (Po) passes through the regulator with filter and is adjusted to the prescribed pressure.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

B 2 B 2 B 2 2 B 2 B 2 B 2 B 2 B 2 B 2 B 2 PE R 3 R 3 R 3 R 3 P 1 P 1 P 1 P 1 X A 4 A 4 A 4 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 2-One-touch fitting (X, PE ports) Applicable tube O.D.: 6 2n-One-touch fitting (A, B ports) Applicable tube O.D.: 4 6 Applicable connector: 26 pin MIL type with strain relief (L4) L3 (conforms to MIL-C-83503) 7.6 Connector case attachment lever (both sides) (3.2) 101.2

Series VQ1000 Body Ported Plug Lead Unit: Cassette Type For details about certified products conforming to international standards, visit us at www.smcworld.com.

OMRON Corp.: CompoBus/S System (16 output points) OMRON Corp.: CompoBus/S System (8 output points) Mitsubishi Electric Corp.: CC-LINK System 0 A B C D E F1 G H J1 J2 K Q R1 R2 V (2) Max. 16 stations Kit S Max. 8 P. 2-4-80 Max. 16 stations P. 2-4-82 C Connector kit 1 2 No. of terminals: 8, 1 row Applicable stations 1 to 8 Kit T Max. 8 Max. 16 No. of terminals: 16, 2 rows Max. 16 Applicable

Compact Cylinder Series CQS

Basic style (Through-hole/Both ends tapped common): CQSKW/CDQSKW 12 16 Auto switch Minimum lead wire bending radius 10 2 x 2 x OB counterbore H thread effective depth C F Q Width across flats K1 2 x M5 x 0.8 2 x 2 x OA effective depth RA Width across flats K2 I SMC T D M E SMC 2 x N through M E RB RB 5 Flat washer 2 pcs.

5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) Weight without sub-plate 1.12-7 VQZ1000/2000/3000 Body Ported Construction: VQZ1000/2000/3000 Metal seal Rubber seal e w q r e w q r 2 position single 2 position single (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q r e w q r 2 position double 2 position double (A) 4 (B) 2 (A) 4 (B) 2 5 (R1) 1 (P) 3 (R2) 5 (R1) 1 (P) 3 (R2) e w q e w q 4 r 3 position pressure

Magnetically Coupled

2 !6 t !0 i q o u y !7 r !9 w !4 NCY3B6 NCY3B10, 15 !4 !8 !7 !6 !5 !0 i o q u y t r !2 w !1 The above drawing is 15. (3 magnets are used in 10.) NCY3B20 to 40 !3 !4 !1 !8 !6 !5 !7 !0 i q o u t y r e w !2 NCY3B50, 63 !4 !8 !6 !5 !0 !7 i o q u y t !3 r !2 w !1 Component Parts No.

Symbol: 105R (Base Mounted, 3 Port, Universal), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 10R6 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 3 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 10R3 (Base Mounted, 2 Port, N.C., Port 1 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Standard, Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Symbol: 10R4 (Base Mounted, 2 Port, N.O., Port 3 IN, Port 2 OUT), Function: Y (Power-saving Circuit), Voltage: 5 (24 VDC), Wetted Part Material: G (Plate: PFA; Diaphragm: Kalrez®), Sub-plate Material, Port Size, Reverse Mounting Prevention Pin: w/o Sub-plate, Option: None, Lead Wire Length: 300mm, CE Compliant: Q (CE Compliant)

Function: 2 (2 Position Double), Piping: 4 (Base Mounted), Exhaust: 0 (Individual), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: None, Thread: M Thread, Rc, Option: None, CE Compliant: Q (CE Compliant)

Function: 1 (2 Position Single), Piping: 4 (Base Mounted), Exhaust: 3 (Common), Specifications: Standard, Voltage: 5 (24VDC), Lead Wire: G (Grommet Lead Wire 0.3m), Surge Suppressor: None, Manual Override: None, Port Size: None, Thread: M Thread, Rc, Option: None, CE Compliant: Q (CE Compliant)

Type: 334 (Base Mounted), Valve Option: Standard Type, Rated Voltage: 5 (24 VDC), Electrical Entry: G (Grommet, Lead Wire 300mm), Light/Surge Voltage Suppressor: None, Port Size: None (without sub-plate), Thread: Rc with sub-plate, or Nil, Bracket: None, CE-Compliant: Q (CE-compliant)