XL-OMV0002

5 XL-OMV0002 2.2 Assy Assy 16 25 40 50 XLC16-30-1 XLC25-30-1 XLC40-30-1 XLC50-30-1-1 XLC16-30-1H XLC25-30-1H XLC40-30-1H XLC50-30-1H-1 63 80 100 160 XLC63-30-1-1 XLC80-30-1-1 XLC100-30-1-1 XLC160-30-1-1 XLC63-30-1H-1 XLC80-30-1H-1 XLC100-30-1H-1 XLC160-30-1H-1 1) M9// 2 (FKM:No.1349-80) XLC16-30-1-M9//-XN1 3)Assy / 16 25 40 50 AS568-025V AS568-030V AS568-035V AS568-039V AS568

ZQ-OM01601

[inHg]:) ([kgf/cm 21 -[F 0] 30 - [F80] 30 ,OFF <> [F80] 1 2 2 1 [F80] 1,OFF 1 2,30 () 2 OFF ON 31 - [F81] , <> [F81] [F81] , 000 40 32 - [F90] <> [F90] [on] [oFF] 1 [oFF]() 2 [F90] 1 34 -"" 33 - 1 2 OUT1 3 OUT1 4 OUT1 5 OUT1 6 OUT2 7 ON 8 OFF 9 10 11 12 13 14 15 2 34 - [F96] <> [F96] ,oFF ,on [F96] 35 - [F98] ON/OFF <> [F98] [F]() [n]( ) OUT1

CC

C J G5-S Air-hydro Converter: CCT40 CV MVGQ 50 M32 x 2 Lube-plug CC Rc 1/4 Air port size RB J D-X 20Rc 1/4 Oil port size Data L Dimension (Effective oil level stroke) (mm) Effective oil level stroke (mm) 50 100 150 200 300 L 213.5 263.5 313.5 363.5 463.5 10-17-9 10 Valve Unit Series CCVS/CCVL How to Order CCV S 1 1 1 U1 Suffix S Single valve Valve unit size Unit for CC63 (Unit mounted to

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

1.

VCA

AXT632-69-1 AXT632-69-2 VVCA30-3A-04-2 VVCA30-3A-04-1 OR-2200-200-H VCA35--VVCA30-6-n VVCA30-4A-04-2 VVCA30-4A-04-1 Material Part no.

MGZ Series

Selection Conditions: 1.

Series MXP Precision Air Slide Table

Allowable kinetic energy E max. : Table 1 Possible to use by E=0.0181 Load rate of moment Wa=W max. Calculate allowable load Wa(N). Wa=112=12 =1 W max.=12 1=2/12=0.167 Allowable load coefficient : Graph 1 Calcurate load rate (1) of moment.

Pneumatic Transfer System Series MF

Curved type Air supply unit Note 1) RS RT RG Lateral curve Inside curve Outside curve Qty. None 1 set 2 sets Description Symbol Nil AS AW Angle A unit (Air system 1) 45 90 180 45 90 180 Note 1) Air supply unit, 1 set breakdown: Supply block (slide table side) 1pc. Supply ring (plate side) 2pcs.

ZK2-C

IEC 60204-1: Safety of machinery -Electrical equipment of machines. (Part 1: General requirements) ISO 10218-1992:Manipulating industrial robots -Safety. JIS B 8370: JIS B 8361: JIS B 9960-1: 1 ) JIS B 8433-1993: *2) 1. 2. 3. 1. 2. 3. 4.

VEX-OMY0001

NXT013-3 VO307K-1 2) 3) VEX322 VEX342 Rc A 1/8 1/4 F G VVEX2 VVEX4 B 1/4 3/8 N NPT ( ) VEX1-17 VEX4-5 C 1/2 T NPTF 11 No.VEX-OMY0001 (2) () 3 2(A) 23(P2) 12(P1) a,b 12(P1),23(P2) (2) a 12(P1) 1(P)2(A)3 3(R) 3(R) b 23(P2) 2(A) 2(A)3(R)1 1(P) 1(P) 12(P1) 1 2 3 23(P2) 4 5 6 7 8 POM 9 -12No.VEX-OMY0001 () () 3(R) 2(A) 1(P) 1(P) 2(A) 3(R) () a b P1P2 2(A) 1(P)

Series 12-CY3B ø6, ø10, ø15, ø20, ø25, ø32, ø40 ø50, ø63 Magnetically Coupled Rodless Cylinder

TF G 1/8 G 1/8 G 1/8 G 1/4 G 1/4 G 1/4 TN NPT 1/8 NPT 1/8 NPT 1/8 NPT 1/4 NPT 1/4 NPT 1/4 Nil M3 x 0.5 M5 x 0.8 M5 x 0.8 Rc 1/8 Rc 1/8 Rc 1/8 Rc 1/4 Rc 1/4 Rc 1/4 12-CY3B6 12-CY3B10 12-CY3B15 12-CY3B20 12-CY3B25 12-CY3B32 12-CY3B40 12-CY3B50 12-CY3B63 25 30 35 50 50 50 60 60 70 10 16 19 25 30 40 40 60 70 16 16 78 81 103 132 137 156 182 180 192 d C H B H 4 4 8 8 10 B 8 14 26 32 41 C 9.2 16.2

Gun Type Ionizer

(Refer to Table 1.) Table 1 Model Applicable tubing O.D.

K35-OMX0029

Switch No. 0 (Default) 1 2 3 4 5 6 7 8 9 Slower (Speeds up gradually.)

Soft Start-up Valve AV2000/3000/4000/5000

Quick exhaust Normal operation High speed supply B 1/2 PP PA C D PP PA 1(P) 2 2(A) 1 1/2 PP = approx.

SMC CORPORATION OF JAPAN

Introduction. 1-1 1.1 Outline .1-1 1.1.1 List of Models Compatible with the SMC VLS software . 1-1 1.1.2 Product Configuration. 1-1 1.1.3 Major Features of the ECC-PNAL-PCS/WIN-E Software. 1-1 1.2 Definitions.1-2 1.3 Abbreviations.1-2 2. Installation . 2-1 2.1 Operating System Requirements.2-1 2.2 Installation.2-1 2.3 Uninstallation .2-1 2.4 System Configuration .2-2 3.

Refrigerated Air Dryer

1 1.25 1.16 1.21 1.02 AMF 0.91 0.97 1 1 1 1 0.83 0.89 0.83 0.8 0.92 0.99 ZFC 0.79 0.77 0.7 0.64 0.75 0.98 0.6 0.48 0.63 0.92 SF 0.53 SFD Data C: Inlet Air Pressure Data D: Air Flow Capacity LLB Inlet air pressure (MPa) Inlet air pressure (MPa) Air flow capacity (m3/h [ANR]) Correction factor Correction factor Model IDFA3E IDFA4E 24 IDFA3E to 11E IDFA15E1 to 75E IDFA100F to 150F IDFA6E 36

V100

assembly Poppet Return spring Poppet spring Coil assembly Manual override VP 3 1 3 1 S070 7 9 3 5 VQ 7 8 9 VKF VQZ VZ Replacement Parts VS Description No.

Cylinder with Lock Series CNS

433 9 112 180.5 M30 x 1.5 35 1/2 93.5 25 343 95 20 28 45 30 110 528 17 36 19 106 496 9 118 197 M36 x 1.5 39 3/4 104 25 396 109 25 35 50 25 120 591 With rod boot (mm) For long strokes (mm) Stroke range (mm) Stroke range (mm) Bore size (mm) Bore size (mm) l ZZ1 h RT RY 125 140 160 125 140 160 501 0.2 stroke 133 36 164 to 1400 1401 to 1600 551 0.2 stroke 133 36 184 to 1400 1401 to 1600 612

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

1 I/O cable length [m]*10 o Cable length [m]*6, *9 LEC Y Nil Without cable H Without cable (Connector only) 1 1.5 *9 The length of the encoder, motor and lock cables are the same. Nil Without cable 2 2 m 5 5 m A 10 m Nil: Left Motorless *10 When Without driver is selected for driver type, only Nil: Without cable can be selected. Refer to page 624 if I/O cable is required.

CEx-OMQ0010

j k L 2. 7. 8. 1. 9. 2. 10. 11. ()70% ()35% 1. 15% 1. 2. 3 3. () 1. 0.1~1.0MPa 0.3~0.5MPa 0~60 ()35% 2. ) 1. 1. 2. 2. 3. 1. 1. ( 2. 6 ) 3. 2. 50% 4. (6 ) 3. 5. 4. () 0.5 5. 1 2 3. F.G. 1. 4. 1 ISO VG32 1. 2. 1. 2. 3. 1. 2 1. 2. 2. 14.5mT CE2 1.5~2 15,000 18cm 3. 4. IP65 5.