5 Port Solenoid Valve Metal Seal/Rubber Seal Body Ported

Note 3) K (High pressure) and Y (Low wattage) are not available. Electrical ently: L/ M plug connector only.

3

N Symbol Model Port size A B D E F H K L N PFMC7501/7102 Rc1/2, NPT1/2 70 30 60.6 41.2 15 14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Symbol Model Bracket dimensions S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 Lead wire and M8 connector ZS-40-A Cable Specifications 2 (White) (Black) 4

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

(WWW) XX XXX ZZ (MY1HG) ZZ WW XX VV VV MY3M (Hexagon socket head taper plug) (Hexagon socket head taper plug) XXX ZZ (MY1HG) ZZ (Hexagon socket head taper plug) (Hexagon socket head taper plug) Standard piping/Centralized piping A B C G GB H K J LD L LL LW M MM N NC Model NE NW NF NH 110 140 170 PB PC P PA MY1H25 MY1H32 MY1H40 30 37 45 M5 x 0.8 M6 x 1 M6 x 1 9 13 13 16 19 23 90 110 121 M6

45

Specifications Symbol Specifications For SS5X-45S EX322-S001 EX122-SMB1 EX122-STA1 EX122-SSH1 EX122-SPA1 EX122-SUW1 For SS5X-45S Symbol J1 J2 K Q R1 R2 SUNX Corp.: S-LINK System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

45

Specifications Symbol Specifications For SS5X-45S EX322-S001 EX122-SMB1 EX122-STA1 EX122-SSH1 EX122-SPA1 EX122-SUW1 For SS5X-45S Symbol J1 J2 K Q R1 R2 SUNX Corp.: S-LINK System (16 output points) SUNX Corp.: S-LINK System (8 output points) Fuji Electric Co.: T-LINK Mini System DeviceNet, CompoBus/D (OMRON Corp.)

Booster Regulator/Air Tank

(P3 P2) x 9.9 V [L] = (Q Qb/2) x (Tc x K/60) Obtain the tank capacity V. (841 600/2) x (0.5 x 2/60) V = = 4.6 [L] (1.0 0.8) x 9.9 Applicable combination model Internal capacity Tank model VBAT05A(1) VBAT05S(1) VBAT10A(1) VBAT10S(1) VBAT20A(1) VBAT20S(1) VBAT38A(1) VBAT38S(1) 5L VBA10A/11A Select the tank capacity over V.

C92

Contents CS92-32 CS92-40 CS92-50 CS92-63 CS92-80 CS92-100 CS92-125 CS92-160 32 40 50 63 80 100 125 160 Kits include items 16 to 21 Seal kits consist of items 16 to 21 1.12-5 Series C92 Without Mounting Bracket C92S B-Stroke Bore (mm) WA WB WH ZZ VD AM C D E EE G KK H J K KW M N P S SW B 22 24 32 32 40 40 54 72 30 32 40 40 52 52 60 65 33 44 52 64 78 92 110 140 12 16 20 20 25 30 32 40 46 60

Card Motor

DRIVE DRIVE A6 A6 SVON SVON A7 A7 Internal resistance 10 [k] Internal resistance 10 [k] NC NC A8 A8 2 mA or more is needed for the input to be ON. 2 mA or more is needed for the input to be ON.

Series IRV10/20 Vacuum Regulator

Vacuum Regulator Series IRV10/20 RoHS How to Order Standard connections IRV 20 C08 Accessory w Body size 10 20 Max. flow 140 l/min (ANR) Max. flow 240 l/min (ANR) None Note 1) Nil With pressure gauge Note 2) Note 3) (IRV10: With GZ33-K-01, IRV20: With GZ43-K-01) G Note 3) ZN ZP ZA ZB With ZSE30A-01-N-ML With ZSE30A-01-P-ML With ZSE30A-01-A-ML With ZSE30A-01-B-ML NPN open collector 1 output

VHK

D E F G J K C VR 18 1(P) 2(A) 4 4 VHK-04F-04F VHK-06F-04F VHK-06F-06F VHK-08F-06F VHK-08F-08F VHK-10F-08F VHK-10F-10F VHK-12F-10F VHK-12F-12F 31.5 21.8 17.5 3 port valve 3.5 11 3.4 1.2 15 VHK-B1A 1 27 22 26 41 47.6 23.8 23.8 16.5 15.8 15.8 44.5 14.5 16.5 VH 18 6 4 6 41 48 48.6 24.3 23.7 16.5 3.5 16.8 15.8 11 5.1 1.2 15 16 VHK-B1A 44.5 14.5 1 27 22 16.5 26 24.3 16.8 7.2 18 8 6 8 41 50.5 52.4

E-P HYREG ® VY1 Series

E-P HYREG VY1 Series How to Order Made to Order X39 Low wattage specification P.1003 E-P HYREG Maximum operating pressure: 0.9 MPa Pilot type 0 1 Internal pilot External pilot Note 1) Note 1) Except body size D 0 1 01 0 VY1 Thread type Nil F N T Rc G(2) Symbol Power source voltage DC Command signal DC Input impedance Power source/Command signal NPT NPTF Nil 1 to 5 V 10 k 67 k 1 0 to 10V Note

Stainless steel High Vacuum Angle/In-line Valve Normally Closed/Bellows Seal XMA, XYA Series

XMA XYA M9N 16 A A M9N 25 Angle type In-line type q w e r t y u w Flange type q Flange size XMA Type KF (NW) K (DN) CF Symbol Nil D C Applicable flange size 16, 25, 40, 50, 63, 80 63, 80 16 (034), 40 (070), 63 (114) XMA XYA Size 16 25 40 50 63 80 XYA Nil D K (DN) KF (NW) 25, 40, 50, 63, 80 63, 80 e Indicator/Pilot port direction XMA Rear flange surface XYA Symbol Rear flange surface Right

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?

80 kPa4 to 20 mA DC, 0 to 20 mA DC0 to 5 VDC, 0 to 10 VDC4 points (Negative common)250 or less Note 3)Approximately 6.5 k Power supply voltage 24 VDC type: Approximately 4.7 k Power supply voltage 12 VDC type: Approximately 2.0 k 1 to 5 VDC (Load impedance: 1 k or more)4 to 20 mA DC (Sink type) (Load impedance: 250 or less)Output accuracy within ?