Stainless Steel High Vacuum, Angle/In-line Valve, Angle type Series XM, In-line type Series XY

Flange size XMH Symbol Nil C XMH V V V V XYH V V V Type KF (NW) CF Applicable flange size 16, 25, 40, 50 16 (034), 40 (070) Size 16 25 40 50 XYH Nil KF (NW) 25, 40, 50 3.

IZx-OMX0087

Minimum bending radius: Power supply cable: 40 mm (IZT43) Power supply cable: 48 mm (IZT43-L) Communication cable: 40 mm (IZT43-L) Separate cable: 40 mm High voltage cable: 30 mm Separate cable is optional. 1) Power supply cable For IZT43-L, refer to the IO-Link dedicated instruction manual.

IDX-OM-Z004

18 K 75 64 K K16K JIS 65A 10K (17) 17) 40 (K16K) JIS 65A 10K 479 127 1276 51 (14~18) 1418) 1375 1,3 -W4 -W4 (-W4) (-W4) Y1/2 Y1/2 () R1/2 R1/2 36 129 20 7122 350 700 752 1,3 -W5 (-W5) -W5 (-W5) R1/2 R1/2 IDF100F150F-W 6 4 IDX-OM-Z004 6 IDF150F-30-W K16K (10, 0.7m) () (10, 2m) JIS 80A 10K (10,0.7m) ) (10 ( (K16K) JIS 80A 10K 2m) 20 18 t 268 217 t 20 18 t 8x23 8x19

Rotary Gripper Series MRHQ

0.3MPa 20 20 0.2MPa 0.2MPa 10 10 L L 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm MRHQ20D MRHQ20D Internal gripping Pressure 0.7MPa 60 100 Pressure 0.7MPa 0.6MPa Gripping force N Gripping force N 50 0.6MPa 80 0.5MPa 0.5MPa 40 60 0.4MPa 0.4MPa 0.3MPa 30 0.3MPa 40 20 0.2MPa 0.2MPa 20 10 0 20 40 60 80 0 20 40 60 80 100 Gripping point L mm Gripping point L

MRHQ

N 40 30 Gripping force N MHY 0.5MPa 0.5MPa 30 0.4MPa 20 0.4MPa MHW 20 0.3MPa 0.3MPa 10 MRHQ 10 0.25MPa 0.25MPa Misc. 0 10 20 30 40 50 60 0 10 20 30 40 50 60 Gripping point L mm Gripping point L mm DMRHQ20S MRHQ20C 2050 100 Pressure 0.7MPa Pressure 0.7MPa 40 80 0.6MPa 0.6MPa Gripping force N Gripping force N 0.5MPa 30 60 0.5MPa 0.4MPa 20 40 0.4MPa 0.3MPa 0.3MPa 10 20 0.25MPa 0.25MPa 0 20 40

MHL2

0.2MPa 40 40 0.2MPa 0.2MPa 0.2MPa 20 20 40 80 120 160 200 40 80 120 160 20 40 60 80 100 120 140 0 0 0 20 40 60 80 100 120 0 Holding point R (mm) Holding point R (mm) Holding point R (mm) Holding point R (mm) MHL2-40D MHL2-40D MHL2-32D MHL2-32D 2 1 2 1 500 500 0.6MPa 0.6MPa 300 300 0.6MPa 0.6MPa 400 400 Holding force (N) Holding force (N) Holding force (N) Holding force (N) 250 250 0.5MPa

Transfer

spacer Bore size Long spacer 6 7 Short spacer 25 32 40 25 mm 32 mm 40 mm Unit part no.

MGC

Arrange so that maximum load will be 40% for theoretical force of 20, 50% for 32, 55% for 40 and 60% or less for 50, respectively.

MXH

Eccentricity 200 mm 1 10 10 0.1 Weight m (kg) Weight m (kg) Weight m (kg) 1 1 20 16 20 16 10 6 20 16 10 6 0.01 0.1 0.1 10 6 0.01 0.001 0.01 80 100 0 20 40 60 80 100 0 20 40 60 80 100 0 20 40 60 Overhang L (mm) Overhang L (mm) Overhang L (mm) Selection Example 1.

Cylinder with Turntable Series MGT

MGQ 1 2 3 4 5 10 20 30 40 50 100 200 300 400 10 20 30 40 50 100 200 300 400 Eccentric distance l (mm) Eccentric distance l (mm) MGG MGC MGTL100 300 300 MGTM100 200 200 P = 0.5 MPa MGF 100 P = 0.5 MPa Larger than 75st Larger than 50st Load mass m (kg) Load mass m (kg) MGZ 40 50 100 25st 50st 30 25, 50st MGT 20 50 40 10 30 5 4 3 20 2 1 10 20 30 40 50 100 200 300 1 2 3 4 5 10 20 30 40 50 100

JCRB-OM00003

Mount the parallel key (For size 40). 20 With Auto Switch 90, 180 (For CDRB20, 30, 40) B For CDRB20, 30, 40-90 1. Remove the parallel key. (For size 40.) 2. Remove the cross recessed round head screw (18). 3. Remove the cover (14) and magnet holder (15). 4. Remove the hexagon socket head cap screw (19). 5.

MLGC

3 Oil impregnated sintered alloy Oil impregnated sintered alloy Bushing 40: Zinc bronze die casted !4 Bushing 40: Zinc bronze die casted !

Suction cups with flange

29 48 [kPa] -55 2.7 4.3 7.3 11 17 27 44 -50 2.5 3.9 6.7 10 15 24 40 -45 2.2 3.5 6.0 9.0 14 22 36 -40 2.0 3.1 5.3 8.0 12 19 32 -6No.

Thermo-con/Rack Mount Type

35C 200 200 0 0 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] 0 10 20 30 40 50 60 70 Circulating fluid temperature [C] HECR008-A Circulating fluid: Tap water Circulating fluid: Ethylene glycol 20% 2500 2500 Ambient temperature 15C 2000 2000 Cooling capacity [W] Cooling capacity [W] 1500 1500 1000 1000 Ambient temperature 25C Ambient temperature 25C Ambient temperature 35C 500

Rotary Actuated Air Gripper MHR2, MDHR2/MHR3, MDHR3

MHR2-10/MDHR2-10 MHR2-20/MDHR2-20 50 60 Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) Overhang distance H (mm) 50 40 Pressure Pressure Pressure 40 External grip 30 0.2 MPa 0.2 MPa 30 0.3 MPa 0.3 MPa 0.4 MPa 20 0.4 MPa 20 0.5 MPa 0.5 MPa 0.6 MPa 10 0.6 MPa 10 0 10 20 30 40 50 0 10 20 30 40 50 60 Gripping point L (mm) Gripping point L (mm) MHR2-15/MDHR2-15 MHR2-

Series MHL2 11- ø10, ø16, ø20, ø25, ø32, ø40 22- Parallel Type Wide Opening Air Gripper

114 186 340 405 485 660 870 20 40 60 30 60 10 40 60 L1 16 40 L2 MHL2-16D2 MHL2-20D MHL2-20D1 MHL2-20D2 MHL2-25D 146 98 158 178 116 226 138 238 278 166 1010 1175 1645 1840 1850 80 40 80 100 50 60 20 40 60 MHL2-25D1 MHL2-25D2 MHL2-32D MHL2-32D1 MHL2-32D2 MHL2-40D MHL2-40D1 MHL2-40D2 25 198 216 150 198 242 298 336 220 318 402 2720 2935 3070 3985 4820 100 120 70 120 160 188 246 286 40 30 32 20

Fieldbus system Digital unit

(No.4-40 UNC) 5 Joint bracket Bracket for joining to adjacent units. 6 Unit connector (Plug) Transmits signals and power supplies to adjacent units. EX600-DX F No.

CV/MVGQ

CVS1K 40, 50 63, 80 100 J Standard 10-15-67 Double acting DNonrotating rod 40, 50 63 10-15-78 -X Series MVGQ 2012, 16 20, 25 32, 40 50, 63 80, 100 Data 10-16-1 Double acting 10-15-1 Series CV Valve Mounted Cylinder Precautions Be sure to read before handling.

10

For Saturated Steam (664)(183) Upstream pressure of valve P1 1.0 MPa 1.0 Downstream pressure of valve (P2) [MPa] (663)(179) 0.8 (662)(174) (661)(170) Subsonic Critical pressure 0.9 0.6 (660)(164) 0.7 0.8 (658)(158) Sonic 0.4 0.6 (656)(151) 0.5 (654)(143) 0.4 (650)(133) 0.2 0.3 0.2 (646)(120) 0 0.1 2 5 10 15 25 20 3 10 15 20 25 45 40 35 30 4 20 10 30 40 50 60 5 30 40 50 60 70 80 20 7 20 30

CNS

size (mm) Stroke range (mm) Bore size (mm) l U V VA H Z ZZ Z1 ZZ1 h 125 140 160 125 140 160 35 20 23 110 478 507 501 530 0.2 stroke 133 Up to 1000 40 20 28 110 528 560 551 583 0.2 stroke 133 Up to 1000 45 25 35 Clevis pin, flat washer and cotter pin are shipped together. 120 596 632 617 653 0.2 stroke 141 Up to 1200 9-8-17 18 Series CNS Dimensions Center trunnion style (T): CNST Z + 1/2