Digital Flow Switch

to 35C) 2% F.S. (15 to 35C) (25C standard) Monitor unit Monitor unit Monitor unit Monitor unit 3% F.S. (15 to 35C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 2% F.S. (15 to 35C) 5% F.S. (0 to 50C) (15 to 35C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 0.5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) 5% F.S. (0 to 50C) Repeatability 1% F.S.

3

14 26 18 13.6 PFMC7202 Rc3/4, NPT3/4, G3/4 90 35 66.1 46.7 17.5 24 31 28 16.8 PFMC7501/7102 G1/2 76 30 60.6 41.2 15 14 26 18 13.6 Symbol Model Bracket dimensions S T U V W PFMC7501/7102 24 22 32 40 50 PFMC7202 30 30 42 48 58 Lead wire and M8 connector ZS-40-A Cable Specifications 2 (White) (Black) 4 4 Conductor Nominal cross section AWG23 10 (Blue) 3 1 (Brown) Outside diameter Approx. 0.7

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

Process Data Diagnosis items Bit offset Item Note Internal product malfunction Outside of zero-clear range Outside of rated pressure range Upper temperature limit exceeded inside the product 0 OUT1 output 0: OFF 1: ON 1 OUT2 output 0: OFF 1: ON 2 Diagnosis 0: Normal 1: Abnormal 3 to 15 Measured pressure value Unsigned 13 bit Bit offset 15 14 13 12 11 10 9 8 7 6 5 4 3 2 1 0 Item Measured

OMS0020

Same as above. 5 Step Data No. 3 (Step Data No. 2Note6) 0-15 Same as above. Same as above. 6 Step Data No. 4 (Step Data No. 3Note6) 0-15 Same as above. Same as above. Step Data No. 5 (Not used.) 0-15 Same as above. Same as 7 above. Step Data No. 15 (Not used.) 0-15 Same as above. Same as 17 above. Step Data No. 16-19 18-21 (Not used.)

Air Cylinder/Low Friction Series MB l Q ø32, ø40, ø50, ø63, ø80, ø100

to 750 50 55 70 80 100 120 C95 FT FX ZZ + Stroke FZ CA1 CS1 Single clevis/(C) Port Cushion valve Single clevis CDH10 (mm) Bore size (mm) Stroke range H10 CX 0.1 ZZ Z U RR L CD 0.3 32 40 50 63 80 100 164.5 169 197 197 251 251 154 158 182 182 228 228 13 13 17 17 26 26 14 14 20 20 30 30 10.5 11 15 15 23 23 up to 500 up to 500 up to 600 up to 600 up to 750 up to 750 10 10 14 14 22 22 23 23 30

High Vacuum L Type Valve

Step 7 Reassembly of bonnet assembly (No.2) 3 3 Tightening torque of bolt Bolt (Nm) 1 2 Valve Tightening 1 2 size torque 4 XLG-16 0.7 -25 1.5 4 -40 2.5 Bonnet assembly -50 6.1 -63 15 -80 Body Size 16, 25, 40 Size 50, 63, 80 Tighten the bolts in numerical order to re-assemble the body with the bonnet assembly. Manually tighten screws until the external seal is compressed.

Coolant Valve

6.1 9.3 7.9 13.2 14.3 20.0 14.3 20.0 22.5 29.3 25.7 34.3 35.4 53.6 35.7 57.1 42.4 60.6 63.1 86.5 7 0.3 0.2 11 15 11 15 14 20 16 25 22 32 22 32 28 40 28 40 33 50 33 50 45 65 56 80 3 8 0.7 0.5 1 2 3 4 0.8 1.0 1.2 1.4 1 1 4 1 2.2 2.4 5.0 5.2 32 1 2 1 3.6 3.8 Symbol 6.8 7.0 40 Valve type Operation N.C.

Electric Actuator / Slider type 《 Battery-less absolute encoder type (Step motor 24VDC) 》

R1 1.5 RA 10 * R3 3 RB 15 * R5 5 RC 20 * Applicable Stroke Table *Produced upon receipt of order Stroke Size 50 100 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Controller *Refer to catalog 16 25 32 40 Caution The actuator body and controller are sold as a package.

Series H, DL, L, LL Self-align Fittings

Thread Rc(PT) L1 L2 M 1 4 1 4 3 8 1 4 1 4 1 4 4 DHF04-02 27 DHF06-02 17 17 10 4 15 30.3 30.8 16 16.5 28 6 11 16 12 DHF06-03 31 19 32.8 18.5 8 DHF08-02 29.8 30 16 20 14 17 15.5 10 12 DHF10-02 30.8 37 DHF12-02 30.8 17 17 40 17 19 34 51 17 17 16.5 16.5 104 Series H, DL, L, LL Self-align Fittings Branch tee: DT Thread R(PT) Part No. Effective orifice (mm2) Applicable tube O.D.

EXxx-OMV0017-D

Remote units 0 / 15 / 31 / 63 / 127 Remotes (EX600-WEN#) 0 / 15 / 31 Remotes (EX600-WPN#) 15 Remotes Set the number of Wireless Remote units which are registered to the Wireless Base unit.

Rotary Table: High Precision Type

Allowable load Size Allowable radial load(N) Allowable thrust load(N) Allowable moment (Nm) 1 20 15 0.3 3 40 30 0.7 7 50 60 0.9 20 60 80 2.9 Table rotation range Angle adjustment is possible as shown in the Fig. 2 below using adjustment bolts (A) and (B).

CU

(mm) D-A9, D-A9V D-F9, D-F9W D-F9V, D-F9WV Bore size (mm) A A W B W B W A B 20 25 32 22 22 13 (10.5) 19 18 9 19 11 15 24.5 24.5 9 (6.5) 15 20 5 15 7 11 26.5 26.5 11.5 (9) 17.5 22.5 7.5 17.5 9.5 13.5 Values in ( ) are dimensions for D-A93 type.

LEC-OM032xx

Specifications .11 3. 1 Specifications.11 3. 2 Details of parts.13 3.3 Outside dimension diagram.14 (1) Screw mount type (LECGE1).14 (2) DIN rail mount type (LECGE1D).14 3.4 How to install.15 (1) How to install.15 (2) Installation location .15 4.

How to Order Series ZM Vacuum Ejector With Valve and Switch For details about certified products conforming to international standards, visit us at www.smcworld.com. 1

Left Right VAC. port Common EXH port 2-Rc 1/2, 3/4 (mm) L1 1 Stations L 28 1.5 40 1.5 56 1.5 4 76 1.5 88 1.5 104 1.5 5 92 1.5 104 1.5 120 1.5 6 108 2.0 120 2.0 136 2.0 7 124 2.0 136 2.0 152 2.0 8 140 2.0 152 2.0 168 2.0 9 156 2.0 168 2.0 184 2.0 10 2 44 1.5 56 1.5 72 1.5 3 60 1.5 72 1.5 88 1.5 172 2.0 184 2.0 200 2.0 L2 L3 13-4-15 15 Series ZM Manifold

High Vacuum L Type Valve

Step 7 Reassembly of bonnet assembly (No.2) 3 3 Tightening torque of bolt Bolt (Nm) 1 2 Valve Tightening 1 2 size torque 4 XLC-16 0.7 -25 1.5 4 -40 2.5 Bonnet assembly -50 6.1 -63 15 -80 Body Size 16, 25, 40 Size 50, 63, 80 Tighten the bolts in numerical order to re-assemble the body with the bonnet assembly. Manually tighten screws until the external seal is compressed.

XLG Series

Magnet (option) External seal (maintenance part) Heater (option) Pilot port (Pressurized / Totally closed) Axial seal (material : FKM) Scraper (Material : FKM) Valve (material : SUS304) Valve seal (maintenance part) Body(material: A6063) C D C E E (KF Flange) Fn J H B G A Unit: mm A Model A B C D E Fn G H J XLG-16 40 110 38 1 30 17 40 26 XLG-25 50 120 48 1 12 40 26 39 27.5 XLG-40 65 171

XL-OMY0002

30 40 13 XL-OMY0002 8 X L D 25 M9N A A ( X A N1 A ) 25 40 B A 50 63 80 C P11 160 100 FKM() P8 KF (NW) D K (DN) () A / A F G A J B K C L M M9N D-M9N M9P D-M9P / 560 M9B D-M9B A90 D-A90 H0 H4 H5 5150 100 A93 D-A93 120 M9// 25H4 14 XL-OMY0002 9. 200 2580 100 100,160 [] 1 1.5 1 XLD-25,XLD-40,XLD-50,XLD-63,XLD-80 200 XLD-100,XLD-160 100 : FKM 110 Pa <> 15 XL-OMY0002

JXCx-OMY0004

Please take appropriate countermeasures in accordance with alarm content in reference to the controller Operation Manual. 15. Alarm for Motor Control (P.64) SF Red LED is ON. Alarm generated Check the content of alarm Refer to the controller operation manual and take appropriate measures. 15.

Compact Rotary Actuator Rack & Pinion Style Series CRQ2 How to Order CRQ2B S 20 90 Without auto switch CDRQ2B S 20 90 M9BW With auto switch Built-in magnet Number of Shaft type auto switches S Single shaft 2 pcs. Nil W Double shaft S 1 pc. ∗ Refer to p

Combination of simple specials and Made to Order Size Refer to pages 256 to 270 for details. 10 15 20 30 40 Suffix symbol 10 15 20 30 40 Symbol Size Cushion Without cushion Rubber bumper Air cushion Nil C Port type Made to order Refer to page 247 for details.

Space Saving Vacuum Ejector/Vacuum Pump System Series ZQ

Refer to Handling Precautions for SMC Products (M-E03-3) for Safety Instructions and Vacuum Equipment Precautions. 50 40 40 40 30 20 20 20 Caution Maximum suction flow 10 Refer to the vacuum equipment model selection on Best Pneumatics No.r for the selecting and sizing of Series ZQ. 0 0.1 0.2 0.3 0.4 0.5 0 5 10 15 20 25 Suction flow (l/min(ANR)) Supply pressure (MPa) 3 Space Saving Vacuum